Patents by Inventor Robertus Johannes Marinus De Jongh

Robertus Johannes Marinus De Jongh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic projection apparatus, computer program for control thereof, and device manufacturing method
    Patent number: 6992752
    Abstract: In a lithographic projection apparatus, modified control of a moveable component within the apparatus is provided to improve control of the position and velocity of a point on the component that is set apart from the center of mass of the component. The force required to provide the center of mass of the component with the acceleration required for the point on the component is determined. The force in a given direction is corrected by an amount proportional to the product of the velocity of the point in an orthogonal direction and the angular velocity about an axis perpendicular to the two orthogonal directions.
    Type: Grant
    Filed: February 10, 2003
    Date of Patent: January 31, 2006
    Assignee: ASML Netherlands B.V.
    Inventor: Robertus Johannes Marinus De Jongh
  • Lithographic projection apparatus, computer program for control thereof, and device manufacturing method
    Publication number: 20030180639
    Abstract: In a lithographic projection apparatus, modified control of a moveable component within the apparatus is provided to improve control of the position and velocity of a point on the component that is set apart from the center of mass of the component. The force required to provide the center of mass of the component with the acceleration required for the point on the component is determined. The force in a given direction is corrected by an amount proportional to the product of the velocity of the point in an orthogonal direction and the angular velocity about an axis perpendicular to the two orthogonal directions.
    Type: Application
    Filed: February 10, 2003
    Publication date: September 25, 2003
    Applicant: ASML NETHERLANDS B.V.
    Inventor: Robertus Johannes Marinus De Jongh