Patents by Inventor Robin A. Gardiner

Robin A. Gardiner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for delivering an involatile reagent in vapor form to a CVD reactor
    Patent number: 5204314
    Abstract: A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably comGOVERNMENT RIGHTS IN INVENTIONThis invention was made with Government support under Contract No. N00014 88-0531 awarded by the Defense Advanced Projects Research Administration (DARPA). The Government has certain rights in this invention.
    Type: Grant
    Filed: December 13, 1991
    Date of Patent: April 20, 1993
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Peter S. Kirlin, Robin L. Binder, Robin A. Gardiner