Abstract: An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.

Abstract: The invention provides a magnet assembly for a planar electromagnetic motor, the magnet assembly comprising:—a first plurality of superconductive (SC) coils, inside an outer circumference and arranged in a planar pattern such as a rectangular pattern,—a second plurality of SC coils, arranged along an outer boundary of the planar pattern, a coil of the first plurality of SC coils having a first in-plane shape and a coil of the second plurality of SC coils having a second in-plane shape, different from the first in-plane shape, wherein the second plurality of SC coils is arranged at least partly inside the outer circumference.

Abstract: A reluctance transducer includes a soft ferromagnetic yoke and a soft ferromagnetic core element, which is movable relative to the yoke. Two permanent magnets bear the core element. The permanent magnets are arranged relative to each other and to the yoke so that the reluctance transducer has a good linear relationship between displacement and force. The reluctance transducer can be applied as stiffness compensating element. The reluctance transducer can include an electrical winding to allow its application as a magnetic bearing, an actuator or as a displacement, velocity or acceleration sensor with improved intrinsic linearity.

Abstract: A reluctance transducer includes a soft ferromagnetic yoke and a soft ferromagnetic core element, which is movable relative to the yoke. Two permanent magnets bear the core element. The permanent magnets are arranged relative to each other and to the yoke so that the reluctance transducer has a good linear relationship between displacement and force. The reluctance transducer can be applied as stiffness compensating element. The reluctance transducer can include an electrical winding to allow its application as a magnetic bearing, an actuator or as a displacement, velocity or acceleration sensor with improved intrinsic linearity.

Abstract: A reluctance transducer includes a soft ferromagnetic yoke and a soft ferromagnetic core element, which is movable relative to the yoke. Two permanent magnets bear the core element. The permanent magnets are arranged relative to each other and to the yoke so that the reluctance transducer has a good linear relationship between displacement and force. The reluctance transducer can be applied as stiffness compensating element. The reluctance transducer can include an electrical winding to allow its application as a magnetic bearing, an actuator or as a displacement, velocity or acceleration sensor with improved intrinsic linearity.

Abstract: A structure such as an electronically deformable mirror contains a deformable membrane, an array of actuators located facing the membrane, each actuator being arranged to actuate local displacement of the membrane perpendicular to its surface. The actuators and the membrane are connected via an array of actuating connections. The actuating connections substantially transmit movement perpendicular to the second surface, but leave planar displacement and/or local rotation of the second surface substantially free. Preferably, the actuators contain an array of soft magnetic islands on a soft magnetic base plane, with actuator coils running around the islands and a system of sort magnetic walls on the base plane to separate the coils. The walls support a soft magnetic resilient surface that extend over of the islands and serve to drive the actuating connections.

Abstract: The invention relates to an actuator comprising a leaf spring attached to a carrier in at least one point of attachment, means for providing a magnetic field and means for guiding the magnetic field so as to provide a magnetic flux loop. A movable part of the leaf spring is movable relative to the means for providing the magnetic field. The actuator further comprises a drive core attached to the movable part of the leaf spring, which is incorporated in the flux loop, for imparting the relative movement to the movable part. The drive core is so positioned that the magnetic properties of the flux loop are changed under the influence of said relative movement for gearing the magnetic force on the drive core and the spring force of the leaf spring to each other.

Abstract: The invention relates to an actuator comprising a leaf spring attached to a carrier in at least one point of attachment, means for providing a magnetic field and means for guiding the magnetic field so as to provide a magnetic flux loop. A movable part of the leaf spring is movable relative to the means for providing the magnetic field. The actuator further comprises a drive core attached to the movable part of the leaf spring, which is incorporated in the flux loop, for imparting the relative movement to the movable part. The drive core is so positioned that the magnetic properties of the flux loop are changed under the influence of said relative movement for gearing the magnetic force on the drive core and the spring force of the leaf spring to each other.