Patents by Inventor Roger M. Johnson
Roger M. Johnson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11911869Abstract: Embodiments of a system and method for polishing substrates are provided. In one embodiment, a polishing system is provided that includes a polishing module having a platen, and a platen temperature control system. The platen temperature control system includes a PID controller, a fluid controller, and a heat exchanger. The flow controller is configured to control an amount of fluid provided from the heat exchanger to a channels of the platen in response to instructions provided by the PID controller.Type: GrantFiled: January 24, 2020Date of Patent: February 27, 2024Assignee: Applied Materials, Inc.Inventors: Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen, Roger M. Johnson
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Patent number: 11850700Abstract: An apparatus and method for sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing (CMP) systems is disclosed. A method includes transferring a first substrate to a first polishing station of a plurality of polishing stations, polishing the first substrate at the first polishing station, transferring the first substrate to a second polishing station, and transferring a second substrate to the first polishing station. The method includes cleaning a first surface of a plurality of surfaces of the polishing system by dispensing a first cleaning fluid from a first one or more nozzles of a plurality of nozzles to direct the first cleaning fluid onto the first surface and dispensing a second cleaning fluid from the first one or more nozzles to direct the second cleaning fluid onto the first surface, where the second cleaning fluid is different from the first cleaning fluid.Type: GrantFiled: September 29, 2021Date of Patent: December 26, 2023Assignee: Applied Materials, Inc.Inventors: Jeonghoon Oh, Jamie Stuart Leighton, Roger M. Johnson, Van H. Nguyen
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Publication number: 20220118583Abstract: An apparatus and method for sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing (CMP) systems is disclosed. A method includes transferring a first substrate to a first polishing station of a plurality of polishing stations, polishing the first substrate at the first polishing station, transferring the first substrate to a second polishing station, and transferring a second substrate to the first polishing station. The method includes cleaning a first surface of a plurality of surfaces of the polishing system by dispensing a first cleaning fluid from a first one or more nozzles of a plurality of nozzles to direct the first cleaning fluid onto the first surface and dispensing a second cleaning fluid from the first one or more nozzles to direct the second cleaning fluid onto the first surface, where the second cleaning fluid is different from the first cleaning fluid.Type: ApplicationFiled: September 29, 2021Publication date: April 21, 2022Inventors: Jeonghoon OH, Jamie Stuart LEIGHTON, Roger M. JOHNSON, Van H. NGUYEN
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Patent number: 11251067Abstract: Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.Type: GrantFiled: April 26, 2019Date of Patent: February 15, 2022Assignee: Applied Materials, Inc.Inventors: Brian T. West, Miroslav Gelo, Yan Rozenzon, Roger M. Johnson, Mark Covington, Soundarrajan Jembulingam, Simon Nicholas Binns, Vivek Vinit
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Patent number: 11114285Abstract: Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes an exhaust cooling apparatus located downstream of a plasma source. The exhaust cooling apparatus includes at least one cooling plate a device for introducing turbulence to the exhaust flowing within the exhaust cooling apparatus. The device may be a plurality of fins, a cylinder with a curved top portion, or a diffuser with angled blades. The turbulent flow of the exhaust within the exhaust cooling apparatus causes particles to drop out of the exhaust, minimizing particles forming in equipment downstream of the exhaust cooling apparatus.Type: GrantFiled: April 13, 2017Date of Patent: September 7, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Michael S. Cox, Brian T. West, Roger M. Johnson, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho
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Patent number: 10930479Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.Type: GrantFiled: November 28, 2018Date of Patent: February 23, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox
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Publication number: 20200343126Abstract: Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.Type: ApplicationFiled: April 26, 2019Publication date: October 29, 2020Inventors: Brian T. WEST, Miroslav GELO, Yan ROZENZON, Roger M. JOHNSON, Mark COVINGTON, Soundarrajan JEMBULINGAM, Simon Nicholas BINNS, Vivek VINIT
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Publication number: 20200246935Abstract: Embodiments of a system and method for polishing substrates are provided. In one embodiment, a polishing system is provided that includes a polishing module having a platen, and a platen temperature control system. The platen temperature control system includes a PID controller, a fluid controller, and a heat exchanger. The flow controller is configured to control an amount of fluid provided from the heat exchanger to a channels of the platen in response to instructions provided by the PID controller.Type: ApplicationFiled: January 24, 2020Publication date: August 6, 2020Inventors: Jeonghoon OH, Jamie Stuart LEIGHTON, Van H. NGUYEN, Roger M. JOHNSON
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Publication number: 20190096643Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.Type: ApplicationFiled: November 28, 2018Publication date: March 28, 2019Inventors: Simon Nicholas BINNS, Brian T. WEST, Ronald Vern SCHAUER, Roger M. JOHNSON, Michael S. COX
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Patent number: 10176973Abstract: Embodiments disclosed herein include a method for abating compounds produced in semiconductor processes. The method includes energizing an abating agent, forming a composition by reacting the energized abating agent with gases exiting a vacuum processing chamber, and flowing the composition through a plurality of holes formed in a cooling plate. By cooling the composition with the cooling plate, damages on the downstream pump are avoided.Type: GrantFiled: January 20, 2017Date of Patent: January 8, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Patent number: 10153143Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.Type: GrantFiled: February 16, 2015Date of Patent: December 11, 2018Assignee: Applied Materials, Inc.Inventors: Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox
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Publication number: 20170301524Abstract: Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes an exhaust cooling apparatus located downstream of a plasma source. The exhaust cooling apparatus includes at least one cooling plate a device for introducing turbulence to the exhaust flowing within the exhaust cooling apparatus. The device may be a plurality of fins, a cylinder with a curved top portion, or a diffuser with angled blades. The turbulent flow of the exhaust within the exhaust cooling apparatus causes particles to drop out of the exhaust, minimizing particles forming in equipment downstream of the exhaust cooling apparatus.Type: ApplicationFiled: April 13, 2017Publication date: October 19, 2017Inventors: Michael S. COX, Brian T. WEST, Roger M. JOHNSON, Yan ROZENZON, Dinkesh SOMANNA, Dustin W. HO
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Patent number: 9754771Abstract: Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.Type: GrantFiled: July 23, 2014Date of Patent: September 5, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Brian T. West, Roger M. Johnson, Michael S. Cox
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Publication number: 20170133208Abstract: Embodiments disclosed herein include a method for abating compounds produced in semiconductor processes. The method includes energizing an abating agent, forming a composition by reacting the energized abating agent with gases exiting a vacuum processing chamber, and flowing the composition through a plurality of holes formed in a cooling plate. By cooling the composition with the cooling plate, damages on the downstream pump are avoided.Type: ApplicationFiled: January 20, 2017Publication date: May 11, 2017Inventors: Michael S. COX, Rongping WANG, Brian T. WEST, Roger M. JOHNSON, Colin John DICKINSON
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Patent number: 9552967Abstract: Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes a plasma source that has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.Type: GrantFiled: January 13, 2016Date of Patent: January 24, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Patent number: 9543124Abstract: Embodiments disclosed herein include a plasma source for abating compounds produced in semiconductor processes. The plasma source has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the cylindrical electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.Type: GrantFiled: December 31, 2015Date of Patent: January 10, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Publication number: 20160133442Abstract: Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes a plasma source that has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.Type: ApplicationFiled: January 13, 2016Publication date: May 12, 2016Inventors: Michael S. COX, Rongping WANG, Brian T. WEST, Roger M. JOHNSON, Colin John DICKINSON
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Publication number: 20160118226Abstract: Embodiments disclosed herein include a plasma source for abating compounds produced in semiconductor processes. The plasma source has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the cylindrical electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.Type: ApplicationFiled: December 31, 2015Publication date: April 28, 2016Inventors: Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Patent number: 9240308Abstract: Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes a plasma source that has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.Type: GrantFiled: September 26, 2014Date of Patent: January 19, 2016Assignee: APPLIED MATERIALS, INC.Inventors: Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Patent number: 9230780Abstract: Embodiments disclosed herein include a plasma source for abating compounds produced in semiconductor processes. The plasma source has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the cylindrical electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.Type: GrantFiled: March 6, 2014Date of Patent: January 5, 2016Assignee: APPLIED MATERIALS, INC.Inventors: Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson