Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.

Abstract: Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes a plasma source that has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.

Abstract: Embodiments disclosed herein include a plasma source for abating compounds produced in semiconductor processes. The plasma source has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the cylindrical electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.

Abstract: Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.

Abstract: A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.

Abstract: A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.

Abstract: An automated film encoding and decoding system for bringing photographic film from the state of exposure to subject matter through all of the processes required to produce finished photos and package the same. The system includes an encoder coordinately operative with a camera for the placement of a human and machine readable code on the film the decoder capable of reading the code for the control of production-processing equipment in laboratories provided with such equipment. The human readability of the code accommodates production-processing of the film by attendant personnel and also allows for quality control check of automated production-processisng equipment. The encoding includes film frame identification information, subject matter information and registration mark information all of which may be utilized on a single exposure situation.

Abstract: The present invention is directed to a multiple camera system which captures a photo image on film and captures and stores an electronic image on a magnetic recording media. The system has two operating states. In the "compose" or "view" state the electronic image channel is operated at a first gain setting, color temperature and F-stop to provide a real time moving image on a monitor. In the capture state the electronic gain, color temperature, and F-stop of the electronic camera are altered to collect or capture an electronic image during strobe illumination. The system utilizes a pair of dedicated zoom lenses, which are mechanically corrected for parallax error and the focal length of the two lenses are matched and linked together so that their focal lengths may be altered simultaneously by the operator.

Abstract: An automated film encoding and decoding system for bringing photographic film from the state of exposure to subject matter through all of the processes required to produce finished photos and package the same. The system includes an encoder coordinately operative with a camera for the placement of a human and machine readable code on the film the decoder capable of reading the code for the control of production-processing equipment in laboratories provided with such equipment. The human readability of the code accommodates production-processing of the film by attendant personnel and also allows for quality control check of automated production-processing equipment. The encoding includes film frame identification information, subject matter information and registration mark information all of which may be utilized on a single exposure situation.