Abstract: A system and method for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.

Abstract: A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.

Abstract: A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample section with relation to the optical metrology system. A method and a computer program product are provided.

Abstract: A method for addressing high Work In Process (WIP) conditions for increasing throughput while minimizing risk in a manufacturing line. Selected products to be skipped over during high WIP conditions include determining toolsets having work in process exceeding a certain threshold. For each of the toolsets, products which meet a criteria for skipping are selected. The selected products skip over to the toolset used in a subsequent process step ahead of product failing to meet the criteria for skipping. Solutions to this problem also include the WIP of the current process step, nominal WIP and WIP of subsequent process steps. Candidate lots for skipping process steps are identified by referencing a matrix of parameters that includes yield and criticality.

Abstract: A method, system and computer program product for determining an Azimuth angle of an incident beam to a wafer are disclosed. A method comprises: using the incident beam to make a first set of measurements of calibration targets of a first set of grating angles that are different than one another; analyzing the first set of measurements to determine an reference grating angle which corresponds to a grating line to which the incident beam has a practically zero Azimuth angle; and determining the Azimuth angle of the incident beam to the wafer using the determined reference grating angle.

Abstract: A method, system and computer program product for determining matching of a tool set in a production process are disclosed. According to an embodiment, a method for determining matching of a tool set in a production process comprises: selecting a measurement step within the production process, a subset of tools of the tool set being used in the measurement step; collecting production data for each tool of the subset, the production data being related to a process feeder tool; generating a weighted average of the production data for each tool of the subset; and analyzing weighted averages of all tools of the subset using a matching standard to determine matching of the subset.

Abstract: A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.

Abstract: Dynamic offset determination for each of a plurality of measurement systems for matching the systems is disclosed. One embodiment uses an artifact which is periodically run across the measurement system to be matched. Inputs for each run include the current offsets and historical data for the entire fleet and the new test measurement for the current measurement system under test. Evaluation based on exponentially weighted moving average and median calculation techniques may result in a new, reset offset for one or more measurement systems. The reset offset(s) is then applied to product measurements to nullify any tool matching issues.

Abstract: Automated tool recipe verification and correction are disclosed. A tool recipe is intercepted during uploading or downloading of the tool recipe. A determination whether an associated parameter verification set (PVS) template for the tool recipe exists is performed, and if it exists, a determination whether to verify the tool recipe is performed. Each parameters of the tool recipe having an auditable corresponding parameter is compared to the auditable corresponding parameter of the associated PVS template. Where no non-matching parameter sets exist, the tool recipe is verified; otherwise, a determination as to whether of all of the non-matching parameter sets are indicated as modifiable in the associated PVS template is made. If all of the parameters of the non-matching parameter sets are modifiable, then they are modified to match the respective auditable corresponding parameter and the tool recipe is verified, otherwise, the verification is inhibited.

Abstract: Automated tool recipe verification and correction are disclosed. A tool recipe is intercepted during uploading or downloading of the tool recipe. A determination whether an associated parameter verification set (PVS) template for the tool recipe exists is performed, and if it exists, a determination whether to verify the tool recipe is performed. Each parameters of the tool recipe having an auditable corresponding parameter is compared to the auditable corresponding parameter of the associated PVS template. Where no non-matching parameter sets exist, the tool recipe is verified; otherwise, a determination as to whether of all of the non-matching parameter sets are indicated as modifiable in the associated PVS template is made. If all of the parameters of the non-matching parameter sets are modifiable, then they are modified to match the respective auditable corresponding parameter and the tool recipe is verified, otherwise, the verification is inhibited.