Patents by Inventor Ron Naftali
Ron Naftali has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9835563Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.Type: GrantFiled: November 19, 2015Date of Patent: December 5, 2017Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or, Doron Korngut
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Publication number: 20170309511Abstract: According to an embodiment, a support module is provided for supporting a substrate. The support module may include a chuck and a vertical stage. The chuck may include multiple chuck segments that are independently movable. When the substrate is positioned on the chuck, different chuck segments are positioned under different areas of the substrate. The vertical stage may include multiple piezoelectric motors. Each piezoelectric motor may be configured to perform nanometric scale elevation and lowering movements. The multiple piezoelectric motors may be configured to independently move the multiple chuck segments.Type: ApplicationFiled: April 20, 2016Publication date: October 26, 2017Inventors: Doron Korngut, Yuri Belenky, Yoram Uziel, Ron Naftali, Ron Bar-or, Yuval Gronau
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Publication number: 20170307539Abstract: An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detectioType: ApplicationFiled: April 20, 2016Publication date: October 26, 2017Inventors: Boris Golberg, Ron Naftali
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Patent number: 9784689Abstract: According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receiveType: GrantFiled: July 10, 2015Date of Patent: October 10, 2017Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Ido Almog, Ron Naftali
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Publication number: 20170084425Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.Type: ApplicationFiled: December 7, 2016Publication date: March 23, 2017Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: Yoram Uziel, Benzion Sender, Doron Aspir, Yohanan Madmon, Ron Naftali, Yuri Belenky
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Publication number: 20170010219Abstract: According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receiveType: ApplicationFiled: July 10, 2015Publication date: January 12, 2017Inventors: Ido Almog, Ron Naftali
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Publication number: 20160268097Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provisioType: ApplicationFiled: May 20, 2016Publication date: September 15, 2016Inventors: Michael R. Rice, Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Zvika Rozenberg, Erez Admoni, Yochanan Madmon
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Patent number: 9297692Abstract: An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.Type: GrantFiled: February 20, 2013Date of Patent: March 29, 2016Assignee: Applied Materials Israel, Ltd.Inventors: Yoram Uziel, Alon Litman, Ofer Adan, Ron Naftali, Juergen Frosien
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Publication number: 20160077016Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.Type: ApplicationFiled: November 19, 2015Publication date: March 17, 2016Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or
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Patent number: 8134699Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: GrantFiled: March 22, 2011Date of Patent: March 13, 2012Assignees: Applied Materials, Inc., Applied Materials Israel, Ltd.Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
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Publication number: 20110170090Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: ApplicationFiled: March 22, 2011Publication date: July 14, 2011Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
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Patent number: 7973919Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.Type: GrantFiled: April 1, 2010Date of Patent: July 5, 2011Assignee: Applied Materials Israel, Ltd.Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
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Patent number: 7924419Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: GrantFiled: November 25, 2009Date of Patent: April 12, 2011Assignees: Applied Materials Israel, Ltd., Applied Materials, Inc.Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
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Publication number: 20100188658Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information.Type: ApplicationFiled: April 1, 2010Publication date: July 29, 2010Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
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Patent number: 7714999Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.Type: GrantFiled: December 6, 2007Date of Patent: May 11, 2010Assignee: Applied Materials Israel, Ltd.Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
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Publication number: 20100097680Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: ApplicationFiled: November 25, 2009Publication date: April 22, 2010Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
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Patent number: 7630069Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: GrantFiled: January 23, 2006Date of Patent: December 8, 2009Assignee: Applied Materials, Inc.Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
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Patent number: 7498557Abstract: A cascaded image intensifier device is presented. In one embodiment the device comprises: at least two sections in cascade, each of a first section and a last section out of the at least two sections including a photocathode unit adapted to convert photons to electrons and a screen unit adapted to convert electrons to photons; wherein the first section includes a reducing element adapted to: (i) reduce ion-caused degradation of a photocathode unit of the first section, and (ii) reduce a number of photons exiting from the first section from a first value to a second value; and wherein the last section outputs a number of photons that equals or exceeds the first value. Also disclosed are methods and systems using the disclosed cascaded image intensifier device.Type: GrantFiled: September 7, 2006Date of Patent: March 3, 2009Assignee: Applied Materials Israel Ltd.Inventors: Iddo Pinkas, Tal Kuzniz, Avishay Guetta, Helmut Banzhoff, Ron Naftali
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Patent number: 7468506Abstract: A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.Type: GrantFiled: January 19, 2006Date of Patent: December 23, 2008Assignee: Applied Materials, Israel, Ltd.Inventors: Steven R. Rogers, Nissim Elmaliach, Emanuel Elyasef, Alon Litman, Ron Naftali
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Patent number: 7468507Abstract: A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.Type: GrantFiled: January 25, 2006Date of Patent: December 23, 2008Assignee: Applied Materials, Israel, Ltd.Inventors: Steven R. Rogers, Nissim Elmaliach, Emanuel Elyasef, Alon Litman, Ron Naftali, Doron Meshulach