Abstract: A beam combiner is disclosed that comprises a planar lightwave circuit that is based on undoped silicon nitride-based surface waveguides, wherein the planar lightwave circuit comprises a plurality of input ports, a mixing region, and an output port, and wherein the mixing region comprises a plurality of directional couplers that are arranged in a tree structure. Embodiments of the present invention are capable of combining a plurality of light signals characterized by disparate wavelengths on irregular spacings with low loss. Further, the present invention enables high-volume, low cost production of beam combiners capable of combining three or more light signals into a single composite output beam.

Abstract: A beam combiner is disclosed that comprises a planar lightwave circuit that is based on undoped silicon nitride-based surface waveguides, wherein the planar lightwave circuit comprises a plurality of input ports, a mixing region, and an output port, and wherein the mixing region comprises a plurality of directional couplers that are arranged in a tree structure. Embodiments of the present invention are capable of combining a plurality of light signals characterized by disparate wavelengths on irregular spacings with low loss. Further, the present invention enables high-volume, low cost production of beam combiners capable of combining three or more light signals into a single composite output beam.

Abstract: A scanning projector for projecting an image comprising multiple wavelength signals is disclosed. Embodiments of the present invention include a beam combiner comprising a planar lightwave circuit having a plurality of surface waveguides arranged to define a plurality of input ports, a mixing region, and an output port. Each input port receives a different wavelength signal and provides it to the mixing region. The mixing region combines the plurality of wavelength signals into a single composite output beam that is scanned over a region to create an image in a region. In some embodiments, the projector (1) interrogates image points in the region using a first wavelength signal to determine a measurand and (2) projects an image over the image points of the region using a second wavelength signal, wherein each image point is illuminated with the second wavelength signal based on a measurand at that image point.

Abstract: The present invention relates to an electronic circuit arrangement (10) comprising: a substrate (12) having a first surface (12a) and a second surface (12b), an electronic circuit, an electrical connection part (16) for providing an electrical connection to the electronic circuit and being arranged on the first surface (12a), and at least one electrical wire (18). The electrical wire (18) comprises at least one conductive core (20) and an isolation (22) surrounding the conductive core (20). An end portion (18a) of the electrical wire (18) is an isolation-free portion for allowing access to the conductive core (20), wherein the end portion (18a) of the electrical wire (18) is connected to the electrical connection part (16). At least one through-hole (24) extending from the first surface (12a) to the second surface (12b) is provided in the substrate (12), wherein the electrical wire (18) is arranged through the through-hole (24).

Abstract: The invention relates to an electrical cable (100) for exchanging communication signals between two devices, particularly a cable (100) that can be integrated into a catheter or a guidewire (5). The cable (100) comprises at least one pair (120, 130) of differential wires (D1+, D1?, D2+, D2?) that are, during operation, supplied with opposite voltages, thus defining a voltage-neutral plane (VNP) between them. Moreover, the cable (100) comprises at least one set (140) of single-ended wires (S11, S12; S21, S22; S31, S32) that is arranged symmetrically with respect to said voltage-neutral plane (VNP). Optionally a core wire (110) may be used for providing mechanical stability and additional electrical functionality. Electromagnetic disturbances from the differential wires to the single-ended wires (and vice versa) are minimized due to the particular arrangement of wires.

Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substratesides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10).

Abstract: The present invention relates to a detector tile, a detector panel arrangement, an X-ray detector, an X-ray imaging system, and a method for providing a detector tile for a seamless detector surface with a continuous pixel array. In order to build a large area detector with reduced gap appearance, a detector tile (30) is provided having a flat primary substrate (32) and a surface layer (34) with a circuitry arrangement (36). The surface layer is arranged on a front side (38) of the primary substrate covering the primary substrate. The circuitry arrangement comprises a number of detector pixels (40) providing a pixel array (42), wherein at least one connection opening (44) is provided in the surface layer and the flat primary substrate at least at one edge of the detector tile, which connection opening is leading from the surface layer to the rear of the substrate for guiding electrical connection elements between the front side and the rear of the detector tiles.

Abstract: A scanning projector suitable for projecting an image comprising a plurality of light signals of different wavelengths is disclosed. Embodiments of the present invention comprise a beam combiner comprising a planar lightwave circuit that includes a plurality of surface waveguides arranged in define a plurality of input ports, a mixing region, and an output port. Each input port receives a different light signal and provides it to the mixing region. The mixing region combines the plurality of into a single composite output beam that is scanned over a region to create an image in a region.

Abstract: The present invention relates to a through-wafer via device (10) comprising a wafer (12) made of a wafer material and having a first wafer surface (12a) and a second wafer surface (12b) opposing the first wafer surface (12a). The through-wafer via device (10) further comprises a plurality of side by side first trenches (14) provided with a conductive material and extending from the first wafer surface (12a) into the wafer (12) such that a plurality of spacers (16) of the wafer material are formed between the first trenches (14). The through-wafer via device (10) further comprises a second trench (18) provided with the conductive material and extending from the second wafer surface (12b) into the wafer (12), the second trench (18) being connected to the first trenches (14).

Abstract: Sensor guide wire for intravascular measurements of physiological variables in a living body or of external signals, which sensor guide wire has a proximal region, a distal sensor region and a tip region, the sensor guide wire comprises a core wire having a longitudinal axis parallel to the longitudinal axis of the sensor guide wire, and a sensor element arranged in the distal sensor region, the sensor element has a sensitive portion for measuring the physiological variable and to generate a sensor signal in response to said variable. The sensor element has an essentially planar main surface and has its maximal extension in the plane of the main surface, and a thickness perpendicular to the plane of the main surface, wherein the sensor element is arranged in an essentially perpendicular relation to said core wire with regard to the planar main surface of the sensor element.

Abstract: The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).

Abstract: The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).

Abstract: A method of forming a spectral purity filter having a plurality of apertures configured to transmit extreme ultraviolet radiation and suppress transmission of a second type of radiation, in which trenches are formed in a base material in a pattern corresponding to the walls to be formed between the apertures. The trenches are filled with a grid material to form walls of the grid material, and the base material is selectively removed until the grid material is exposed and forms the spaces between the walls of the grid material for the apertures.

Abstract: A sensor for detecting bubbles in gas phase present in a liquid flowing through a flow path. The sensor can include a heating element for heating the liquid, which can be provided with a predetermined level of power at least during detecting, and a transducer arrangement arranged for generating a measurement signal indicative for the temperature of the heating element. The sensor furthermore can include a comparator arrangement for comparing a measurement value of the measurement signal with a predetermined threshold level, which can correspond to a reference temperature attainable by the heating element in response to the predetermined level of power and a minimum velocity attainable by the liquid in the flow path. Based on the latter comparison, the comparator arrangement can generate an output signal indicative for a possible presence of bubbles in gas phase.

Abstract: The invention relates to a sensor (102) and a control unit (702) for cooperation with the sensor. The sensor (102) serves for measuring a velocity of a fluid (308) flowing through a channel (306). The sensor (102) employs a thermal measuring principle, which measuring principle is robust regarding disturbances on the amount of power dissipated by the heating element (106). A sensor receiver (110) is arranged for receiving an electromagnetic radiation generated by a control transmitter (722) comprised in a control (702) unit for cooperation with the sensor (102). The electromagnetic radiation is employed for powering the heating element (106) which is arranged for heating the fluid. On the basis of a measurement signal generated by a transducer arrangement comprised in the sensor (102), a control actuator (724) controls the velocity of the fluid. For this purpose a sensor transmitter (116) is arranged for transmitting the measurement signal to a control receiver (734).

Abstract: A local power-delivery/data-reception unit is installed within an insertion end of a sealed catheter. The local power-delivery/data-reception unit wirelessly powers a separately sealed sensor that is attached to the insertion end and configured for wirelessly sending a data signal to the local power-delivery/data-reception unit. The catheter may further feature a remote power-delivery/data-reception unit disposed within the handle and configured for wirelessly communicating with the local power-delivery/data-reception unit and a controller for controlling the sensor.

Abstract: An integrated electronic-micro fluidic device an integrated electronic-micro fluidic device, comprising a semiconductor substrate on a first support, an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. A micro fluidic structure is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support.

Abstract: A local power-delivery/data-reception unit is installed within an insertion end of a sealed catheter. The local power-delivery/data-reception unit wirelessly powers a separately sealed sensor that is attached to the insertion end and configured for wirelessly sending a data signal to the local power-delivery/data-reception unit. The catheter may further feature a remote power-delivery/data-reception unit disposed within the handle and configured for wirelessly communicating with the local power-delivery/data-reception unit and a controller for controlling the sensor.

Abstract: A method of manufacturing an electronic device that comprises a microelectromechanical (MEMS) element, the method comprising the steps of: providing a material layer (34) on a first side of a substrate (32); providing a trench (40) in the material later (34); etching material from the trench (40) such as to also etch the substrate (32) from the first side of the substrate (32); grinding the substrate (32) from a second side of the substrate to expose the trench (40); and using the exposed trench (40) as an etch hole. The exposed trench (40) is used as an etch hole for releasing a portion of the material layer (34), for example a beam resonator (12), from the substrate (32). An input electrode (6), an output electrode (8), and a top electrode (10) are provided.

Abstract: A method for developing a disease model for a disease that is caused by or modified by stretching of cells, in particular a cardiac disease model uses a device for determining the cardiotoxicity of a chemical compound, comprising a substrate (10) carrying a deformable stack (34), said stack being partially detached from the substrate by a cavity (32) allowing an out-of-plane deformation of the stack, said stack comprising a first deformable layer (16), a second deformable layer (20) and a multi-electrode structure (18) sandwiched between the first and second deformable layers, the second deformable layer carrying a pattern of cardiomyocytes (28) adhered thereto; and a liquid container (26) mounted on the substrate for exposing the cardiomyocytes to the chemical compound. A method of manufacturing such a device is also disclosed.