Patents by Inventor Ronald L. DiCarlo

Ronald L. DiCarlo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11680318
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: June 20, 2023
    Assignee: Edwards Semiconductor Solutions LLC
    Inventors: Egbert Woelk, Ronald L. Dicarlo, Jr.
  • Publication number: 20220290299
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Application
    Filed: May 31, 2022
    Publication date: September 15, 2022
    Applicant: Ceres Technologies, Inc.
    Inventors: Egbert WOELK, Ronald L. DICARLO, Jr.
  • Patent number: 11345997
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: May 31, 2022
    Assignee: Ceres Technologies, Inc.
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
  • Publication number: 20200299837
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Application
    Filed: June 8, 2020
    Publication date: September 24, 2020
    Applicant: Ceres Technologies, Inc.
    Inventors: Egbert WOELK, Ronald L. DICARLO, JR.
  • Patent number: 10676821
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: June 9, 2020
    Assignee: Ceres Technologies, Inc.
    Inventors: Egbert Woelk, Ronald L. Dicarlo, Jr.
  • Publication number: 20190032207
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Application
    Filed: July 31, 2018
    Publication date: January 31, 2019
    Applicant: Ceres Technologies, Inc.
    Inventors: Egbert WOELK, Ronald L. DICARLO, JR.
  • Publication number: 20180334744
    Abstract: Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.
    Type: Application
    Filed: July 30, 2018
    Publication date: November 22, 2018
    Applicant: Ceres Technologies, Inc.
    Inventors: Egbert WOELK, Ronald L. DICARLO
  • Patent number: 10066296
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: September 4, 2018
    Assignee: Ceres Technologies, Inc.
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
  • Patent number: 10060030
    Abstract: Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: August 28, 2018
    Assignee: Ceres Technologies, Inc.
    Inventors: Egbert Woelk, Ronald L. DiCarlo
  • Patent number: 9957612
    Abstract: Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: May 1, 2018
    Assignee: CERES TECHNOLOGIES, INC.
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Deodatta Vinayak Shenai-Khatkhate
  • Publication number: 20160265113
    Abstract: Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.
    Type: Application
    Filed: May 20, 2016
    Publication date: September 15, 2016
    Inventors: Egbert WOELK, Ronald L. DiCARLO
  • Patent number: 9416452
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: August 16, 2016
    Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Egbert Woelk, Ronald L. DiCarlo
  • Publication number: 20160122870
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Application
    Filed: January 8, 2016
    Publication date: May 5, 2016
    Inventors: Egbert Woelk, Ronald L. DiCarlo
  • Patent number: 9243325
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: July 18, 2012
    Date of Patent: January 26, 2016
    Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
  • Publication number: 20150203962
    Abstract: Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.
    Type: Application
    Filed: December 11, 2014
    Publication date: July 23, 2015
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Deodatta Vinayak Shenai-Khatkhate
  • Publication number: 20150167172
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Application
    Filed: February 27, 2015
    Publication date: June 18, 2015
    Inventors: Egbert Woelk, Ronald L. DiCarlo
  • Patent number: 8997775
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: April 7, 2015
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
  • Publication number: 20140283917
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Application
    Filed: June 9, 2014
    Publication date: September 25, 2014
    Inventors: Egbert Woelk, Ronald L. DiCarlo, JR.
  • Patent number: 8776821
    Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: July 15, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
  • Patent number: 8758515
    Abstract: A delivery device comprises an inlet port and an outlet port. The delivery device comprises an inlet chamber and an outlet chamber, with the outlet chamber being opposedly disposed to the inlet chamber and in fluid communication with the inlet chamber via a conical section. The outlet chamber comprises a labyrinth that is operative to prevent solid particles of a solid precursor compound contained in the delivery device from leaving the delivery device while at the same time permitting vapors of the solid precursor compound to leave the delivery device via the outlet port.
    Type: Grant
    Filed: August 9, 2010
    Date of Patent: June 24, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Egbert Woelk, Ronald L. DiCarlo