Abstract: A support such as a clamp (310) is configured to releasably hold a patterning device such as a reticle (300) to secure it and prevent heat-induced deformation of it. For example, an electrostatic clamp includes a first substrate (312) having opposing first (313) and second (315) surfaces, a plurality of burls (316) located on the first surface and configured to contact the reticle, a second substrate (314) having opposing first (317) and second (319) surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements (318) are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.

Abstract: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

Abstract: An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion.

Abstract: A chuck, chuck control system, lithographic apparatus and method of using a chuck are disclosed.

Abstract: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

Abstract: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

Abstract: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

Abstract: A cathode ray tube comprises a color selection electrode with a shadow mask fixed to a frame and put under tension. The frame comprises a bimetal element (or bimetal elements) which are constructed such that at a raised temperature the tension is released by reducing the distance between sides of the frame to which the mask is attached. The reduction in distance at the center of the sides exceeds, preferably by a factor 1.5 to 3, the reduction in distance at the corners of said sides.

Abstract: A cathode ray tube comprising an electron gun. The electron gun has electrodes which are secured to supports by connecting elements. The width of the connecting elements varies. As a result, the high-voltage behavior of the cathode ray tube is improved.

Abstract: A cathode ray tube comprising a color selection electrode supported in tension. The electrode includes a circumferential portion on which vibration damping means are located for damping vibrations in the color selection electrode. The vibration damping means include a resonator in the form of at least one metal tongue, which is capable of vibrating when the color selection electrode vibrates. The tongue is arranged in, or substantially parallel to, the plane of the color selection electrode. Means are provided to exchange vibration by means of collision and/or friction between the circumferential portion of the color selection electrode and the tongue.

Abstract: A cathode ray tube comprises a color selection electrode with a shadow mask fixed to a frame and put under tension. The frame comprises a bimetal element (or bimetal elements) which are constructed such that at a raised temperature the tension is released by reducing the distance between sides of the frame to which the mask is attached. The reduction in distance at the center of the sides exceeds, preferably by a factor 1.5 to 3, the reduction in distance at the corners of said sides.

Abstract: A color cathode ray tube comprises an electron gun and a deflection unit, the electron gun being arranged in a neck portion of an envelope, and the deflection unit being arranged around the envelope. The neck portion of the envelope includes a first part in which the electron gun is arranged. Behind this first part, the neck portion narrows (the outside diameter decreases). The deflection unit is at least partly provided around this narrowed part.

Abstract: A cathode ray tube comprising a color selection electrode supported in tension. The electrode includes a circumferential portion on which vibration damping means are located for damping vibrations in the color selection electrode. The vibration damping means include a resonator in the form of at least one metal tongue, which is capable of vibrating when the color selection electrode vibrates. The tongue is arranged in, or substantially parallel to, the plane of the color selection electrode. Means are provided to exchange vibration by means of collision and/or friction between the circumferential portion of the color selection electrode and the tongue.

Abstract: The invention relates to a color cathode ray tube. The color cathode ray tube comprises a display screen, an electron gun for generating three electron beams, wherein the electron beams are directed towards the display screen. Also deflection means are present for generating a magnetic field in a first direction for deflecting the electron beams across the display screen. The electron gun comprises a centering cup having a first part provided with a central aperture and two outer apertures for passing the three electron beams, and a second part extending in the direction of the display screen.

Abstract: A cathode ray tube includes an electron gun having a beam-shaping portion (20) for generating electron beams (7-9), a prefocusing system (30) of electrodes (31, 32) across which a prefocusing voltage is supplied during operation so as to form an electron-optical prefocusing lens, and a main lens system (40) of electrodes (32, 41) across which a main lens voltage is applied during operation so as to form an electron-optical main lens. The electrodes (31, 32, 41) are provided with securing means (48) for connection to an insulating supporting body (47) and with apertures (16) for passing the electron beams (7-9). Electrode (32) protrudes toward electrode (31) in such a way that the mutual distance (l2) between the two electrodes at the location of the apertures (16) therein is smaller than their mutual distance (l1) at the location of their respective securing means (48).

Abstract: A vacuum device has an envelope and a getter assembly mounted within the envelope. The getter assembly includes a reservoir for containing getter material and a deflector having a surface located opposite the getter material and is oriented to deflect the getter material in a predetermined direction within the vacuum device. The deflector surface has raised and/or depressed portions, such as ribs or undulations, in the direction of diffusion of the getter material. These portions reduce the accumulation of getter material on the deflector during getterfiring, resulting in a much reduced likelihood that getter material particles may break loose from the deflector. By preventing loose particles within the vacuum device, the possibility of a short-circuit in the vacuum device is reduced.

Abstract: A picture display device comprises an evacuated envelope and is provided at a first side with an electroluminescent display screen and at an opposite side with an electron gun (6). Between the electron gun (6) and the display screen, the device comprises deflection means with which an electron beam generated by the electron gun (6) can be deflected during operation. The electron gun (6) has at least an electron beam-generating portion (20) and is provided with a main lens system (40) having a first electrode (41), a final electrode (45) and at least one intermediate electrode (42-44) across which a main lens voltage is gradually applied step-wise during operation so as to form an electron-optical main focusing lens. The gun is further provided with means for presenting a dynamic potential (V.sub.d) to at least an electrode (41) of the main lens system (40), which is the first electrode viewed in the direction of propagation of the electron beam (7-9).

Abstract: Vacuum tube comprises a ceramic element and method of interconnecting a ceramic element and a conductive element. A conductive connection consisting of a first layer containing silver and a filler and a second layer containing silver, gold or copper is formed between the ceramic element and the conductive element. The two above-mentioned layers are bonded together by means of diffusion bonding.

Abstract: A vacuum tube includes a ceramic element and a conductive element. A conductive connection consisting of a first layer containing silver and a filler and a second layer containing silver, gold or copper is formed between the ceramic element and the conductive element. The two above-mentioned layers are bonded together by means of diffusion bonding.

Abstract: Electrodes of an electron gun are etched in an electrochemical bath. The electrodes to be etched serve as the anode in the bath. The side of the electrode to be etched which faces the cathode in the chemical bath, faces an electrode at a higher potential in the assembled electron gun.