Abstract: A vehicle is operable in three modes of operation. The vehicle includes a first electromagnetic device, a second electromagnetic device electrically coupled to the first electromagnetic device, and an engine coupled to the first electromagnetic device and configured to drive the first electromagnetic device to provide electrical energy. In each of the three modes of operation, whenever the engine drives the first electromagnetic device to provide the electrical energy, the first electromagnetic device operates without providing the electrical energy to an energy storage device.

Abstract: Methods for reducing contact resistance include performing a selective titanium silicide (TiSi) deposition process on a middle of the line (MOL) contact structure that includes a cavity in a substrate of dielectric material. The contact structure also includes a silicon-based connection portion at a bottom of the cavity. The selective TiSi deposition process is selective to silicon-based material over dielectric material. The methods also include performing a selective deposition process of a metal material on the MOL contact structure. The selective deposition process is selective to TiSi material over dielectric material and forms a silicide capping layer on the silicon-based connection portion. The methods further include performing a seed layer deposition process of the metal material on the contact structure.

Abstract: A drum drive system includes a controller configured to control a prime mover, a variable displacement pump, and a variable displacement motor of the vehicle to provide a target drum speed for a drum of the vehicle. To provide the target drum speed, the controller having programmed instructions to (i) initially operate the variable displacement motor at a maximum motor displacement and operate the variable displacement pump at a pump displacement that provides the target drum speed without needing to actively manipulate a prime mover speed of the prime mover, (ii) increase the pump displacement and decrease a motor displacement without needing to actively manipulate the prime mover speed while still providing the target drum speed, and (iii) increase the prime mover speed if necessary to maintain the target drum speed in response to the pump displacement reaching a maximum pump displacement and the motor displacement reaching a minimum motor displacement.

Abstract: Methods for reducing resistivity of metal gapfill include depositing a conformal layer in an opening of a feature and on a field of a substrate with a first thickness of the conformal layer of approximately 10 microns or less, depositing a non-conformal metal layer directly on the conformal layer at a bottom of the opening and directly on the field using an anisotropic deposition process. A second thickness of the non-conformal metal layer on the field and on the bottom of the feature is approximately 30 microns or greater. And depositing a metal gapfill material in the opening of the feature and on the field where the metal gapfill material completely fills the opening without any voids.

Abstract: A method and apparatus for forming tungsten features in semiconductor devices is provided. The method includes exposing a top opening of a feature formed in a substrate to a physical vapor deposition (PVD) process to deposit a tungsten liner layer within the feature. The PVD process is performed in a first processing region of a first processing chamber and the tungsten liner layer forms an overhang portion, which partially obstructs the top opening of the feature. The substrate is transferred from the first processing region of the first processing chamber to a second processing region of a second processing chamber without breaking vacuum. The overhang portion is exposed to nitrogen-containing radicals in the second processing region to inhibit subsequent growth of tungsten along the overhang portion. The feature is exposed to a tungsten-containing precursor gas to form a tungsten fill layer over the tungsten liner layer within the feature.

Abstract: A drum drive system includes a controller configured to selectively control an engine, a variable displacement pump, and a variable displacement motor of a vehicle to provide a target drum speed for a drum of the vehicle. To provide the target drum speed, the controller is configured to: (i) initially operate the variable displacement motor at a maximum motor displacement and operate the variable displacement pump at a pump displacement that provides the target drum speed without needing to actively manipulate an engine speed of the engine; (ii) increase the pump displacement and decrease a motor displacement without needing to actively manipulate the engine speed while still providing the target drum speed; and (iii) increase the engine speed in response to the pump displacement reaching a maximum pump displacement and the motor displacement reaching a minimum motor displacement if necessary to maintain the target drum speed.

Abstract: A vehicle is operable in three modes of operation. The vehicle includes a first electromagnetic device, a second electromagnetic device electrically coupled to the first electromagnetic device, and an engine coupled to the first electromagnetic device and configured to drive the first electromagnetic device to provide electrical energy. In each of the three modes of operation, whenever the engine drives the first electromagnetic device to provide the electrical energy, the first electromagnetic device operates without providing the electrical energy to an energy storage device.

Abstract: The present disclosure discloses a grating spectrometer having a V-shaped projection light path and capable of eliminating coma aberration. The grating spectrometer includes an entrance slit S1, a grating G, an entrance spherical reflector M1, a focusing spherical reflector M2, and an exit slit S2 which are arranged on a light path in sequence in a light transmission direction. The entrance slit S1 and the exit slit S2 are respectively arranged on two sides of the grating G, and a coaxial entrance light path formed by the entrance slit S1 and the entrance spherical reflector M1 and a coaxial diffraction light path formed by the grating G and the focusing spherical reflector M2 form a V-shaped structure by projection in a diffraction plane. The grating spectrometer has actual population and application value.

Abstract: A vehicle is operable in three modes of operation. The vehicle includes a first electromagnetic device, a second electromagnetic device electrically coupled to the first electromagnetic device, and an engine coupled to the first electromagnetic device and configured to drive the first electromagnetic device to provide electrical energy. In each of the three modes of operation, whenever the engine drives the first electromagnetic device to provide the electrical energy, the first electromagnetic device operates without providing the electrical energy to an energy storage device.

Abstract: A method of operating a first electric machine and a second electric machine in a vehicle drive includes operating the vehicle drive in a first operating mode by operating the first electric machine to regulate electrical power at a bus to maintain a first voltage on the bus and operating the second electric machine to consume electrical power from the bus. The method includes operating the vehicle drive in a second operating mode by operating the first electric machine to consume electrical power from the bus and operating the second electric machine to regulate electrical power at the bus to maintain a second voltage on the bus. A sum of the electrical power regulated by the first electric machine, the electrical power losses, and the electrical power consumed by the second electric machine is zero in the first operating mode and in the second operating mode.

Abstract: A wafer holder and a wafer transfer apparatus, system and method are disclosed. The wafer holder is mounted onto the wafer transfer apparatus and includes a holder body and a sucker. The holder body defines a first opening, while the sucker includes a first skirt. The first skirt is located on one side of the holder body and connected to the first opening. A groove is formed at a joint between the first skirt and the first opening. The groove is located at an outer side of the first skirt, and is able to relief stresses produced at a base portion of the sucker during deformation of the first skirt.

Abstract: A drive train for a vehicle includes a first electromagnetic device, a second electromagnetic device electrically coupled to the first electromagnetic device by an electrical power transmission system, and an engine coupled to the first electromagnetic device and configured to drive the first electromagnetic device to provide electrical energy. In all modes of operation where the engine drives the first electromagnetic device to provide the electrical energy, the first electromagnetic device operates without providing the electrical energy to an energy storage device.

Abstract: The present invention discloses a coma-elimination broadband high-resolution spectrograph, comprising incident slits, a collimating mirror, an integrated grating, a two-dimensional focus imaging mirror and a two-dimensional area array detector, wherein the incident slits enters along the incident slits, passes through a light through hole in the center of the integrated grating and is incident to the collimating mirror, the incident light enters the integrated grating along a coaxial optical path L1 after collimation of the collimating mirror and is focused by the two-dimensional focus imaging mirror after diffraction of each sub-grating, diffraction light in full spectrum region enters a focal plane of the two-dimensional area array detector for detection along an coaxial optical path L2, and off-axis angles of the L1 and the L2 are zero.

Abstract: The present invention discloses a multichannel broadband high-resolution spectrograph, comprising a plurality of light source incident slits, a multichannel integrated grating, a multichannel shared two-dimensional focus imaging mirror and a two-dimensional area array detector which are sequentially disposed along a light source incident or reflection line, wherein the multichannel integrated grating consists of a plurality of sub-gratings, incident light enters the corresponding integrated gratings along the light source incident slits and then is focused by the shared two-dimensional focus imaging mirror after diffraction of the integrated grating, and diffraction light in a full-spectrum region is incident onto a focal plane of the two-dimensional area array detector for detection. No any mechanical displacement part is disposed, multichannel, full-spectrum and high-speed detection and analysis is achieved, and the present disclosure has high spectrum resolution and working reliability.

Abstract: A drive train for a vehicle includes a first electromagnetic device, a second electromagnetic device electrically coupled to the first electromagnetic device by an electrical power transmission system, and an engine coupled to the first electromagnetic device and configured to drive the first electromagnetic device to provide electrical energy. In all modes of operation where the engine drives the first electromagnetic device to provide the electrical energy, the first electromagnetic device operates without providing the electrical energy to an energy storage device.

Abstract: A drum drive system includes a controller configured to selectively control an engine, a variable displacement pump, and a variable displacement motor of a vehicle to provide a target drum speed for a drum of the vehicle. To provide the target drum speed, the controller is configured to: (i) initially operate the variable displacement motor at a maximum motor displacement and operate the variable displacement pump at a pump displacement that provides the target drum speed without needing to actively manipulate an engine speed of the engine; (ii) increase the pump displacement and decrease a motor displacement without needing to actively manipulate the engine speed while still providing the target drum speed; and (iii) increase the engine speed in response to the pump displacement reaching a maximum pump displacement and the motor displacement reaching a minimum motor displacement if necessary to maintain the target drum speed.

Abstract: A mask fork, configured to transfer a mask from a standard mechanical interface pod. The standard mechanical interface pod includes a plurality of supports having a L-shaped cross section. Each of the plurality of supports includes a connecting section extending horizontally and a supporting section extending vertically, and the connecting section has a bottom to which a limiting section is fixed. The mask fork includes a fork body and two tines connected to the fork body in symmetry with each other. Each of the tines comprises a transfer member configured to support the mask during a transfer of the mask and anti-collision members including a first anti-collision member extending horizontally and a second anti-collision member extending vertically. The first anti-collision member is horizontally attached to a side of the transfer member facing away from the mask.

Abstract: A vehicle includes an engine, a drum, a drum drive system, and a control system coupled to the engine and the drum drive system. The drum drive system includes a pump and a motor. The pump is mechanically coupled to the engine and configured to pump a fluid through a hydraulic system. The pump has a variable pump displacement. The motor is fluidly coupled to the pump by the hydraulic system and positioned to drive the drum to agitate the drum contents. The motor has a variable motor displacement. The control system is configured to receive pressure data indicative of a pressure of the fluid within the hydraulic system, reduce the variable motor displacement in response to the pressure of the fluid being less than a threshold system pressure, and reduce a speed of the engine based on the reduction of the variable motor displacement.

Abstract: A vehicle drive includes a gear set, a first motor/generator coupled to the gear set, a second motor/generator at least selectively rotationally engaged with the gear set, and an engine at least selectively coupled to the gear set and at least selectively coupled to the second motor/generator. The second motor/generator is electrically coupled to the first motor/generator by an electrical power transmission system. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A reticle cassette includes a bottom panel, a frame arranged on the bottom panel, and a top cover arranged on the frame, the bottom panel, the frame and the top cover defining a chamber with an opening, the reticle cassette further providing a door panel at one side of the opening. The bottom panel is provided thereon with a plurality of reticle supporting posts each separated from the frame by a lateral gap, and the frame has a longitudinal cross-section comprising H-shaped structures. A web and a bottom surface of the first vertical wall are separated from the bottom panel by vertical gaps. The gaps are arranged between the reticle supporting posts and the frame so as to make the reticle cassette suitable for use with both vacuum suction type and physical clamping type handling forks to pick up the reticle.