Abstract: A mask transfer system and transfer method, including an inner mask store (1) used for storing masks, a rotating mechanical arm used for moving the masks, and a mask fork (3) connected to the rotating mechanical arm and used for picking up the masks. The rotating mechanical arm is provided with a micro-adjustment piece (4) used for coordinating with the rotating mechanical arm to compensate position deviations of the masks picked up by the mask fork, so as to implement mask pre-alignment. The mask transfer system and transfer method achieve the effect of being low in cost.

Abstract: The present invention discloses a multichannel broadband high-resolution spectrograph, comprising a plurality of light source incident slits, a multichannel integrated grating, a multichannel shared two-dimensional focus imaging mirror and a two-dimensional area array detector which are sequentially disposed along a light source incident or reflection line, wherein the multichannel integrated grating consists of a plurality of sub-gratings, incident light enters the corresponding integrated gratings along the light source incident slits and then is focused by the shared two-dimensional focus imaging mirror after diffraction of the integrated grating, and diffraction light in a full-spectrum region is incident onto a focal plane of the two-dimensional area array detector for detection. No any mechanical displacement part is disposed, multichannel, full-spectrum and high-speed detection and analysis is achieved, and the present disclosure has high spectrum resolution and working reliability.

Abstract: The present invention discloses a coma-elimination broadband high-resolution spectrograph, comprising incident slits, a collimating mirror, an integrated grating, a two-dimensional focus imaging mirror and a two-dimensional area array detector, wherein the incident slits enters along the incident slits, passes through a light through hole in the center of the integrated grating and is incident to the collimating mirror, the incident light enters the integrated grating along a coaxial optical path L1 after collimation of the collimating mirror and is focused by the two-dimensional focus imaging mirror after diffraction of each sub-grating, diffraction light in full spectrum region enters a focal plane of the two-dimensional area array detector for detection along an coaxial optical path L2, and off-axis angles of the L1 and the L2 are zero.

Abstract: A wafer holder and a wafer transfer apparatus, system and method are disclosed. The wafer holder is mounted onto the wafer transfer apparatus and includes a holder body and a sucker. The holder body defines a first opening, while the sucker includes a first skirt. The first skirt is located on one side of the holder body and connected to the first opening. A groove is formed at a joint between the first skirt and the first opening. The groove is located at an outer side of the first skirt, and is able to relief stresses produced at a base portion of the sucker during deformation of the first skirt.

Abstract: A mask fork, configured to transfer a mask from a standard mechanical interface pod, wherein the standard mechanical interface pod comprises a plurality of supports having an L-shaped cross section, each of the plurality of supports includes a connecting section extending horizontally and a supporting section extending vertically, and the connecting section has a bottom to which a limiting section is fixed, wherein the mask fork includes a fork body and two tines connected to the fork body in symmetry with each other, each of the tines includes a transfer member configured to support the mask during a transfer of the mask and anti-collision members including a first anti-collision member extending horizontally and a second anti-collision member extending vertically, the first anti-collision member is horizontally attached to a side of the transfer member facing away from the mask, the first anti-collision member is connected between the transfer member and the second anti-collision member, when the mask fork

Abstract: A reticle cassette includes a bottom panel (1), a frame (2) arranged on the bottom panel (1), and a top cover (3) arranged on the frame (2), the bottom panel, the frame and the top cover defining a chamber with an opening, the reticle cassette further providing a door panel (4) at one side of the opening. The bottom panel (1) is provided thereon with a plurality of reticle supporting posts each separated from the frame (2) by a lateral gap, and the frame (2) has a longitudinal cross-section comprising H-shaped structures. A web (21) and a bottom surface of the first vertical wall (22) are separated from the bottom panel (1) by vertical gaps. The gaps are arranged between the reticle supporting posts and the frame (2) so as to make the reticle cassette suitable for use with both vacuum suction type and physical clamping type handling forks to pick up the reticle.

Abstract: A vehicle drive includes a gear set, a first motor/generator coupled to the gear set, a second motor/generator at least selectively rotationally engaged with the gear set, and an engine at least selectively coupled to the gear set and at least selectively coupled to the second motor/generator. The second motor/generator is electrically coupled to the first motor/generator by an electrical power transmission system. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A vehicle includes a chassis, tractive elements configured to support the chassis, a primary driver configured to output mechanical energy to at least one of the tractive elements to drive the vehicle, a coolant circuit, a fan assembly, and a controller. The coolant circuit includes a thermal energy interface configured to transfer thermal energy from the primary driver to coolant and a radiator configured to receive the coolant. The fan assembly includes a hydraulic pump coupled to the primary driver, a hydraulic motor fluidly coupled to the hydraulic pump, a fan coupled to the hydraulic motor and configured to provide air flow to the radiator, and an actuator configured to vary a displacement of at least one of the hydraulic pump and the hydraulic motor. The controller is configured to control the actuator to vary a speed of the fan based on telematics data.

Abstract: A method of operating a first electric machine and a second electric machine in a vehicle drive includes operating the vehicle drive in a first operating mode by operating the first electric machine to regulate electrical power at a bus to maintain a first voltage on the bus and operating the second electric machine to consume electrical power from the bus. The method includes operating the vehicle drive in a second operating mode by operating the first electric machine to consume electrical power from the bus and operating the second electric machine to regulate electrical power at the bus to maintain a second voltage on the bus. A sum of the electrical power regulated by the first electric machine, the electrical power losses, and the electrical power consumed by the second electric machine is zero in the first operating mode and in the second operating mode.

Abstract: A vehicle drive includes a gear set, a first motor/generator coupled to the gear set, a second motor/generator at least selectively rotationally engaged with the gear set, an engine at least selectively coupled to the gear set and selectively coupled to the second motor/generator, and a clutch configured to selectively engage the second motor/generator to the engine. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A method of operating a first electric machine and a second electric machine in a vehicle drive includes operating the vehicle drive in: a first operating mode by operating the first electric machine in a voltage mode and the second electric machine in a torque mode; and a second operating mode by operating the first electric machine in the torque mode and the second electric machine in the voltage mode.

Abstract: A vehicle drive includes a gear set, a first motor/generator coupled to the gear set, a second motor/generator at least selectively rotationally engaged with the gear set, an engine at least selectively coupled to the gear set and selectively coupled to the second motor/generator, and a clutch configured to selectively engage the second motor/generator to the engine. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A vehicle drive includes a gear set, a first motor/generator coupled to a sun gear of the gear set, a second motor/generator selectively coupled to at least one of (a) a planetary gear carrier of the gear set and (b) a ring gear of the gear set, an engine coupled to the ring gear of the gear set and selectively coupled to the second motor/generator, and a clutch configured to selectively engage the second motor/generator to the engine. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A method of operating a first electric machine and a second electric machine in a vehicle drive includes operating the vehicle drive in: a first operating mode by operating the first electric machine in a voltage mode and the second electric machine in a torque mode; and a second operating mode by operating the first electric machine in the torque mode and the second electric machine in the voltage mode.

Abstract: A vehicle drive includes a gear set, a first motor/generator coupled to a sun gear of the gear set, a second motor/generator selectively coupled to at least one of (a) a planetary gear carrier of the gear set and (b) a ring gear of the gear set, an engine coupled to the ring gear of the gear set and selectively coupled to the second motor/generator, and a clutch configured to selectively engage the second motor/generator to the engine. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A method of operating a first motor/generator and a second motor/generator in a vehicle drive includes operating the vehicle drive in a first operating mode and a second operating mode, the first operating mode including operating the first motor/generator as a generator and operating the second motor/generator as a motor, the second operating mode including operating both the first motor/generator as a generator and the second motor/generator as a generator when a first power generation capability associated with the first motor/generator is below a first threshold level, the first motor/generator and the second motor/generator providing electrical power to the DC bus without doing either of (a) providing electrical power to an energy storage device or (b) consuming electrical power from an energy storage device.

Abstract: A vehicle drive includes a first gear set and a second gear set, a first motor/generator coupled to a sun gear of the first gear set, a second motor/generator selectively coupled to at least one of (a) a planetary gear carrier of the first gear set and (b) a ring gear of the first gear set, an engine coupled to the ring gear of the first gear set and selectively coupled to the second motor/generator, and a clutch configured to selectively engage the second motor/generator to the engine. The first motor/generator and the second motor/generator are electrically coupled without an energy storage device configured to at least one of (a) provide electrical energy to the first motor/generator or the second motor/generator to power the first motor/generator or the second motor/generator and (b) be charged by electrical energy from the first motor/generator or the second motor/generator.

Abstract: A method of operating a first motor/generator and a second motor/generator in a vehicle drive includes operating the vehicle drive in a first operating mode and a second operating mode, the first operating mode including operating the first motor/generator as a generator and operating the second motor/generator as a motor, the second operating mode including operating both the first motor/generator as a generator and the second motor/generator as a generator when a first power generation capability associated with the first motor/generator is below a first threshold level, the first motor/generator and the second motor/generator providing electrical power to the DC bus without doing either of (a) providing electrical power to an energy storage device or (b) consuming electrical power from an energy storage device.

Abstract: One embodiment provides a method of operating a first motor/generator and a second motor/generator in a vehicle drive. The first motor/generator is electrically coupled to the second motor/generator by a DC bus. The vehicle drive is configured to propel a vehicle. The method includes operating the first motor/generator as a generator, providing electrical power to the DC bus. The first motor/generator provides the electrical power required by the second motor/generator and the electrical power required to offset losses. The method also includes operating the second motor/generator as a motor, consuming electrical power from the DC bus. The sum of the electrical power provided, the electrical power losses, and the electrical power consumed is zero. The first motor/generator provides electrical power and the second motor/generator consumes electrical power without providing electrical power to an energy storage device or consuming electrical power from an energy storage device.

Abstract: One embodiment provides a vehicle drive. The vehicle drive includes a first gear set and a second gear set. Each gear set includes a sun gear, a ring gear, planetary gears, and a planetary gear carrier. The vehicle drive includes a first motor/generator coupled to the sun gear of the first gear set. The vehicle drive includes a second motor/generator coupled to the planetary gear carrier or the ring gear of the first gear set. The second motor/generator is electrically coupled to the first motor/generator. The motor/generators are electrically coupled without an energy storage device. The vehicle drive includes an engine coupled to the ring gear of the first gear set and selectively coupled to the second motor/generator. The vehicle drive includes a first and a second clutch configured to selectively engage the second motor/generator to the planetary gear carrier of the first gear set or the engine.