Abstract: Embodiments of the present invention provide a lift tool used to facilitate moving a susceptor. The lift tool includes a plate-shaped central region, a plurality of arms connected to and extending outward from the central region, wherein each arm includes a through-hole. The lift tool also includes a plurality of hooks extending through the through hole of a respective arm. Each hook may include a leg and a foot connected to the leg.

Abstract: A gas-delivery assembly and reactor system including the gas-delivery system are disclosed. The gas-delivery assembly includes a transport tube and a baffle to facilitate desired distribution of gas that can include activated species.

Abstract: A modular reaction chamber configured to enable installation of two or more susceptors that are each designed for use in differing temperature ranges (e.g., at differing maximum temperatures). The modular chamber is designed to allow the first and second susceptors and their corresponding heaters to be swapped out or installed to suit the application need (e.g., a low temperature process and a high temperature process). The reaction chamber includes a body adapted, e.g., with an opening in a lower portion of the body, for receiving two or more adaptor or interface plates (or plate assemblies). Each of the plates or plate assemblies is configured for use with a particular susceptor heater assembly (e.g., low temperature heater and high temperature heater and so on) including providing proper cooling and to seal the opening in the lower portion of the reaction chamber body.

Abstract: A baffle for use in a reaction chamber may comprise a baffle first end, a baffle second end, and a baffle space enclosed by a baffle wall system and the reaction chamber floor, wherein the baffle first end may comprise a baffle aperture disposed therethrough configured to allow a fluid to flow from the reaction chamber volume into the baffle space through the baffle aperture and exit the baffle space through a vacuum aperture in the reaction chamber floor toward a vacuum source.