Reaction chamber base plate
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Description
The broken lines in the figure drawings are included to show portions of the reaction chamber base plate that form no part of the claimed design.
Claims
The ornamental design for a reaction chamber base plate as shown and described.
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Patent History
Patent number: D1059311
Type: Grant
Filed: Aug 13, 2021
Date of Patent: Jan 28, 2025
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Todd Dunn (Cave Creek, AZ), Abhishek Mangoli (Phoenix, AZ), Ruchik Bhatt (Chandler, AZ)
Primary Examiner: Derrick E Holland
Assistant Examiner: Caleb M Baker
Application Number: 29/803,622
Type: Grant
Filed: Aug 13, 2021
Date of Patent: Jan 28, 2025
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Todd Dunn (Cave Creek, AZ), Abhishek Mangoli (Phoenix, AZ), Ruchik Bhatt (Chandler, AZ)
Primary Examiner: Derrick E Holland
Assistant Examiner: Caleb M Baker
Application Number: 29/803,622
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)