Abstract: An insulating film is provided in a region surrounding a circuit region on a p type silicon substrate, and a frame-shaped electrode is provided to surround the circuit region on the insulating film. The region directly under the electrode at the surface of the p type silicon substrate is formed as a non-doped region with no impurity implanted. Then, a positive power supply potential is applied to the electrode. In this way, a depletion layer is formed directly under the electrode at the surface of the p type silicon substrate. Consequently, the substrate noise is shielded.

Abstract: On a silicon substrate, a first insulation layer, a lower conductive layer, a capacitor-insulator layer, and an upper conductive layer are formed in that order. Then, a first resist pattern is formed, the upper conductive layer is etched to form an upper electrode, and the capacitor-insulator layer is successively etched partway under the same etching condition as that of the upper conductive layer. Next, second resist pattern is formed, the remaining part of the capacitor-insulator layer is etched to form a second insulation layer, and the lower conductive layer is successively etched under the same etching condition as that of the capacitor-insulator layer so as to form a lower electrode and a lower wiring. In this manner, an MiM capacitor element constituted by the upper electrode, a part of the second insulation layer, and the lower electrode can be fabricated.

Abstract: A multilayer interconnection layer is provided on a semiconductor substrate. An inductor is provided on an insulating layer that forms the uppermost layer of the multilayer interconnection layer. The inductor is formed by spirally arranging a single wiring. On the insulating layer, a multilayer structure body is provided in an inner region of the inductor. In the multilayer structure body, a plurality of ferromagnetic cores formed of Ni are arranged in a matrix. The height of each ferromagnetic core is equal to or larger than the width thereof.

Abstract: Electrically conductive layers 1a and 2a connected to each other via a contact form one inductor, while electrically conductive layers 1b and 2b connected to each other via other contact form the other inductor. Since the areas defined by the loops forming these two inductors are equal to each other, the inductances of the inductors are also equal to each other. Between both the inductors, the lengths in the loop of the portions (the conductive layers 1a and 1b) formed on a lower interlayer insulating film are equal to each other, while the lengths in the loop of the portions (the conductive layers 2a and 2b) formed on an upper interlayer insulating film are also equal to each other. This allows external disturbances such as parasitic capacitance to affect both the inductors equally. Accordingly, a voltage controlled oscillator incorporating the invention can stably provide undistorted sinusoidal oscillation signals.

Abstract: A ring-shaped P+ type diffusion region is formed on the top surface of a P type substrate in such a way as to surround a single internal circuit region. A shunt wiring is formed in an area including directly above the P+ type diffusion region on the P type substrate. The shunt wiring is connected to the P+ type diffusion region by a plurality of contacts. The shunt wiring is provided with an annular ring portion surrounding the internal circuit region. A meander inductor led out from the ring portion and the one end of the meander inductor is connected to a ground potential wiring. A resonance circuit is formed by a parasitic capacitor and the inductance of the shunt wiring. The parasitic capacitor is formed between the shunt wiring and the P+ type diffusion region on the P type substrate.

Abstract: A semiconductor IC device includes a base substrate comprising P−-type silicon, a first P+-type silicon layer is provided on the base substrate, and an N+-type silicon layer and a second P+-type silicon layer are provided in the same layer thereon. The impurity concentration of the first P+-type silicon layer and the N+-type silicon layer is higher than that of the base substrate. Also, a buried oxide layer and an SOI layer are provided on the entire upper surface of the N+-type silicon layer and the second P+-type silicon layer. The first P+-type silicon layer is connected to ground potential wiring GND, and the N+-type silicon layer is connected to power-supply potential wiring VDD. Accordingly, a decoupling capacitor, which is connected in parallel to the power supply, is formed between the P+-type silicon layer and the N+-type silicon layer.

Abstract: A semiconductor integrated circuit device, and method of manufacturing the same, includes an inductor with improved inductance and an improved quality factor (Q-factor) that can be miniaturized. In one example, an inductor (3) is provided on an insulating layer (2) of a multilayer interconnection layer (1). The inductor (3) is formed by a spiral arrangement of a wiring (3a). A lamination film (14) is provided in an internal region (13) of an inductor (3) on insulating layer (2), and can be formed by laminating a titanium-tungsten (TiW) layer (9), a copper (Cu) layer (10), a ferromagnetic substance layer (15) made of nickel (Ni), a Cu layer (11), and a TiW layer (12), in that order. A lower surface of ferromagnetic substance layer (15) can be lower than an upper surface of wiring layer (3a), and an upper surface of ferromagnetic substance layer (15) can be higher than a lower surface of wiring layer (3a).

Abstract: Disclosed are an inductor for a semiconductor integrated circuit, which provides a wider cross-sectional area, significantly reduces the resistance to improve the Q value and has a highly uniform film thickness, and a method of fabricating the inductor. A spiral inductor is formed on a topmost interconnection layer of a multilayer interconnection layer formed by a damascene method. This inductor is formed by patterning a barrier metal layer on an insulation film, on which a topmost interconnection is formed, in such a way that the barrier metal layer contacts the topmost interconnection, then forming a protective insulation film on an entire surface of the barrier metal layer, forming an opening in that portion of the protective insulation film which lies over the barrier metal layer, forming a thick Cu film with the barrier metal layer serving as a plating electrode, and performing wet etching of the Cu film. This process can allow the inductor to be so formed as to be thick and have a wide line width.

Abstract: Electrically conductive layers 1a and 2a connected to each other via a contact form one inductor, while electrically conductive layers 1b and 2b connected to each other via other contact form the other inductor. Since the areas defined by the loops forming these two inductors are equal to each other, the inductances of the inductors are also equal to each other. Between both the inductors, the lengths in the loop of the portions (the conductive layers 1a and 1b) formed on a lower interlayer insulating film are equal to each other, while the lengths in the loop of the portions (the conductive layers 2a and 2b) formed on an upper interlayer insulating film are also equal to each other. This allows external disturbances such as parasitic capacitance to affect both the inductors equally. Accordingly, a voltage controlled oscillator incorporating the invention can stably provide undistorted sinusoidal oscillation signals.

Abstract: Wiring lines for use at a high frequency having reduced resistance and/or inductance are disclosed that may be readily manufactured in a semiconductor integrated circuit. Wiring lines can include extension lines (2), connected to both ends of an inductor (1), that may each include divided wiring lines (2a and 2b) that are separated by a slit (3). A length, width and thickness of divided wiring lines (2a and 2b) can be essentially equal, resulting in divided wiring lines (2a and 2b) of essentially equal longitudinal resistance. A width of a slit (3) may preferably be greater than a width of each of divided wiring lines (2a and 2b).