Abstract: A drive element includes: a fixing part; a drive part placed on a lateral side of the fixing part and coupled to the fixing part; and a movable part configured to be driven by the drive part. A lower electrode, a piezoelectric layer, and an upper electrode are formed in order in an upper surface region of the fixing part and the drive part, and in a wiring region on the fixing part side of the upper surface region, a low dielectric layer containing at least one element forming the piezoelectric layer is formed on an upper surface of the piezoelectric layer.

Abstract: A drive element includes: a movable part; a drive part configured to rotate the movable part about a rotation axis; and a connection part connecting the drive part to a fixing part. The movable part, the drive part, and the fixing part are aligned along the rotation axis. The connection part is connected to the fixing part via at least one pair of joint surfaces that are not orthogonal to the rotation axis and that are symmetrical with respect to the rotation axis.

Abstract: A piezoelectric drive element includes: a movable part; a pair of piezoelectric drive parts each connected at one end portion thereof to the movable part and configured to rotate the movable part about at least a rotation axis; and a fixing part to which end portions of the piezoelectric drive parts are connected. The pair of piezoelectric drive parts are aligned in a direction along the rotation axis with the movable part located therebetween, a width of the movable part is narrower than a width of each of the pair of piezoelectric drive parts in a plan view, and the fixing part is placed in a gap region that is outside the movable part and that is located between the pair of piezoelectric drive parts in a plan view.

Abstract: A driving element includes: a base; a movable part spaced apart from the base in a direction parallel to a rotation axis; a connection part connecting the base and the movable part; a pair of first arm parts extending in a first direction parallel to the rotation axis with the rotation axis located therebetween; a pair of second arm parts extending in a second direction opposite to the first direction, with the rotation axis located therebetween; a coupling part coupling the pair of first arm parts and the pair of second arm parts to the connection part; and a piezoelectric driver disposed on at least either the pair of first arm parts or the pair of second arm parts.

Abstract: An actuator that includes: a first driving body that includes a first piezoelectric material that extends in a first axis direction; a second driving body that includes a second piezoelectric material shorter than the first piezoelectric material in the first axis direction; and a base that holds the first driving body and the second driving body at proximal end portions of the first driving body and the second driving body in the first axis direction. The first driving body and the second driving body are aligned and coupled together in a polarization axis direction in a state in which a polarization axis of the first piezoelectric material and a polarization axis of the second piezoelectric material correspond with each other. A length of the second piezoelectric material in a second axis direction is greater than a length of the first piezoelectric material in the second axis direction.

Abstract: An optical reflector element includes: a first oscillator and a second oscillator for oscillating a reflector and disposed with the reflector being interposed therebetween along a first axis; and a third oscillator for oscillating the first oscillator and the second oscillator. The third oscillator includes: a first assister that causes the support of the first oscillator and the support of the second oscillator to operate, by connecting the support of the first oscillator and the support of the second oscillator to one base included in a pair of bases disposed with the first axis being interposed therebetween; and a second assister that causes the support of the first oscillator and the support of the second oscillator to operate, by connecting the support of the first oscillator and the support of the second oscillator to an other base included in the pair of bases.

Abstract: A light control system includes an optical reflector element and a control device. The optical reflector element includes a reflector, and a first oscillator and a second oscillator that are disposed with the reflector being interposed therebetween. When the control device is to oscillate a first oscillator and a second oscillator to cause the first and second oscillators to rotate in the same direction around a first axis, the control device: oscillates a first driver and a second driver of the first oscillator to cause each of the first and second drivers to have a first portion and a second portion that oscillate in opposite directions in the thickness direction; and oscillates a first driver and a second driver of the second oscillator to cause each of the first and second drivers to have a third portion and a fourth portion that oscillate in opposite directions in the thickness direction.

Abstract: An optical reflector element includes: a pair of vibrator groups each of which includes tuning fork vibrators that are coupled together such that vibration centers of the tuning fork vibrators align on an imaginary rotational axis; a reflective body interposed between the pair of vibrator groups; a pair of supports that couple the pair of vibrator groups and the reflective body together; and a base to which the pair of vibrator groups are coupled in a manner that allows the pair of vibrator groups to vibrate.

Abstract: A light control system includes an optical reflection element and a controller. The optical reflection element includes: a reflector; and a first swing portion and a second swing portion disposed at respective one of positions sandwiching the reflector. Each of the first swing portion and the second swing portion includes: a first connection portion coupled to the reflector; a first vibration portion; a second vibration portion; a first drive portion; a second drive portion; and a second connection portion that connects the first and second vibration portions to a base. The controller causes the first and second drive portions of the first swing portion to vibrate in the same phase, and causes the first and second drive portions of the second swing portion to vibrate in the same phase but in the opposite phase to the first swing portion.

Abstract: Provided are a structure including: a substrate; a first layer provided on the substrate; a second layer provided on the first layer; and a third layer provided on the second layer, in which the first layer is a layer containing a compound represented by a chemical formula MIn2O4 using M as a metal element, the second layer is a metal layer having a face-centered cubic structure, and the third layer is a ferroelectric film, and a sensor using the structure.

Abstract: The present invention provides a thin film structural body comprising a sapphire substrate having a principal plane of a {11-26} plane and a first epitaxial thin film which is grown directly on the principal plane of the sapphire substrate and has a principal plane of a {100} plane. As one example, in a fabrication method of the thin film structural body, a first epitaxial thin film is grown on a principal plane of a {11-26} plane of the sapphire substrate. The grown first epitaxial thin film has a principal plane of a {100} plane.

Abstract: Provided are a structure including: a substrate; a first layer provided on the substrate; a second layer provided on the first layer; and a third layer provided on the second layer, in which the first layer is a layer containing a compound represented by a chemical formula MIn2O4 using M as a metal element, the second layer is a metal layer having a face-centered cubic structure, and the third layer is a ferroelectric film, and a sensor using the structure.

Abstract: The present invention provides a thin film structural body comprising a sapphire substrate having a principal plane of a {11-26} plane and a first epitaxial thin film which is grown directly on the principal plane of the sapphire substrate and has a principal plane of a {100} plane. As one example, in a fabrication method of the thin film structural body, a first epitaxial thin film is grown on a principal plane of a {11-26} plane of the sapphire substrate. The grown first epitaxial thin film has a principal plane of a {100} plane.

Abstract: A boundary acoustic wave device includes a first medium layer made of piezoelectric material, a second medium layer provided on the first medium layer, a third medium layer provided on the second medium layer, and an electrode provided at an interface between the second and third medium layers. The electrode drives the third medium layer to generate a transverse wave. A propagation speed of the transverse wave in the third medium layer is lower than a propagation speed of the transverse wave in the first medium layer. A propagation speed of the transverse wave in the second medium layer is lower than the propagation speed of the transverse wave in the first medium layer. This boundary acoustic wave device has a large electro-mechanical coupling coefficient.

Abstract: A surface acoustic wave device includes a piezoelectric substrate and a lid spaced apart from each other oppositely by a specific interval. A comb electrode and a pad electrode are provided to the piezoelectric substrate on a main surface on the lid side, and an external terminal is provided to the lid on a surface on the opposite side to the piezoelectric substrate. Further, the surface acoustic wave device includes a connection electrode that electrically connects the pad electrode and the external terminal, and an insulator interposed between at least one of the main surface of the piezoelectric substrate and the pad electrode and the lid.

Abstract: An electronic part, an object of which is to improve temperature characteristics and electrical properties, includes a substrate (1), a comb-type electrode (2) that is disposed on the upper surface of the substrate (1), and a protective film (4) that covers the comb-type electrode (2) and has an uneven shape at its top surface. If the pitch width of one pitch in the uneven shape of the protective film (4) is L, the width of one pitch of a convex portion (4a) of the unevenness in the uneven shape of the protective film (4) is L1, the width of one pitch of a concave portion (4b) thereof is L2, the pitch width of one pitch of the comb-type electrode (2) is p, the width of one of electrode fingers which form the comb-type electrode (2) is p1 and the width between the electrode fingers is p2, then each parameter is set so that the following expressions are satisfied, L1?p1 and L2?p2 (herein, the correlations of L?p, p1+p2=p and L1+L2=L are satisfied).

Abstract: A boundary acoustic wave device includes a first medium layer made of piezoelectric material, a second medium layer provided on the first medium layer, a third medium layer provided on the second medium layer, and an electrode provided at an interface between the second and third medium layers. The electrode drives the third medium layer to generate a transverse wave. A propagation speed of the transverse wave in the third medium layer is lower than a propagation speed of the transverse wave in the first medium layer. A propagation speed of the transverse wave in the second medium layer is lower than the propagation speed of the transverse wave in the first medium layer. This boundary acoustic wave device has a large electro-mechanical coupling coefficient.

Abstract: In an electronic component package in which an electronic component mounted on a mounting substrate via external electrodes placed on the mounting substrate is covered by a mold resin, the electronic component has a component cover which covers elements placed on the lower face of a component substrate, and which forms cavities, and a protective member which is lower in elastic modulus than the mold resin is disposed in a portion which excludes portions joined with the external electrodes in a lower face of the component cover, and which is opposed to the cavities.

Abstract: An actuator includes a base, an arm having an elastic property and supported by the base, electrostatic-driving electrodes provided on the base and the arm, respectively, and a piezoelectric-driving layer. The piezoelectric-driving layer includes a first electrode layer on the arm, a piezoelectric layer on the first electrode layer, and a second electrode layer on the piezoelectric layer. This actuator can be driven quickly with a low voltage.

Abstract: An electronic part includes a substrate, a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate, and a protective film formed on the upper surface of the substrate so as to cover the comb-shaped electrode. The protective film has convex portions and concave portions. The convex portions are upwardly convex at the positions corresponding to the electrode fingers, and the concave portions are downwardly concave between the convex portions. The cross section of the protective film in the direction orthogonal to the extending direction of the electrode fingers has a downward convex curve between apex portions of the convex portions.