Patents by Inventor S. Y. Liang

S. Y. Liang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask carrier treatment to prevent haze and ESD damage
    Publication number: 20080060974
    Abstract: A reticle carrier including a base portion and a cover portion at least partially detachable from the base portion. The base portion and the cover portion are configured to collectively house a reticle in a region collectively defined by the base portion and the cover portion when the base portion and the cover portion are fully attached. At least a portion of an interior surface of at least one of the base portion and the cover portion is treated with a sulfide-absorbing composition, such as silver or a silver-containing alloy.
    Type: Application
    Filed: February 21, 2006
    Publication date: March 13, 2008
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: S. Y. Liang, Chih-Wing Chang, Hsin-Yuan Chen, Chung-Jen Chen, J. F. Lee, Chih-Chien Wang, Chun-Yi Ho