Patents by Inventor Sadao Terakado

Sadao Terakado has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope and method for dimension measuring by using the same
    Patent number: 6114695
    Abstract: An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.
    Type: Grant
    Filed: May 10, 1999
    Date of Patent: September 5, 2000
    Assignee: Hitachi, Ltd.
    Inventors: Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Sadao Terakado, Katsuhiro Kuroda, Ken Ninomiya, Tokuo Kure
  • Scanning electron microscope and method for dimension measuring by using the same
    Patent number: 5969357
    Abstract: An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.
    Type: Grant
    Filed: November 26, 1997
    Date of Patent: October 19, 1999
    Assignee: Hitachi, Ltd.
    Inventors: Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Sadao Terakado, Katsuhiro Kuroda, Ken Ninomiya, Tokuo Kure
  • Scanning electron microscope and method for dimension measuring by using the same
    Patent number: 5866904
    Abstract: An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.
    Type: Grant
    Filed: November 14, 1997
    Date of Patent: February 2, 1999
    Assignee: Hitachi, Ltd.
    Inventors: Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Sadao Terakado, Katsuhiro Kuroda, Ken Ninomiya, Tokuo Kure
  • Scanning electron microscope and method for dimension measuring by using the same
    Patent number: 5594245
    Abstract: An electron beam, which can transmit through part of a specimen and can reach a portion that is not exposed to the electron beam, is irradiated, and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A three-dimensional model is assumed, the three-dimensional model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified three-dimensional model.
    Type: Grant
    Filed: February 10, 1995
    Date of Patent: January 14, 1997
    Assignee: Hitachi, Ltd.
    Inventors: Hideo Todokoro, Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Sadao Terakado, Katsuhiro Kuroda, Ken Ninomiya, Tokuo Kure
  • Transmission electron microscope
    Patent number: 5350918
    Abstract: In a transmission electron microscope, an electron beam from an electron gun is irradiated on a specimen by an illuminating lens system and a transmission image of the specimen is formed on a photographic film by an image forming lens system. The transmission image is picked up by a TV camera and displayed on a television display screen and a view field range of recording image with the photographic film is manifested on the display screen.
    Type: Grant
    Filed: August 27, 1992
    Date of Patent: September 27, 1994
    Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.
    Inventors: Sadao Terakado, Hiroyuki Kobayashi, Morioki Kubozoe
  • Electron microscope
    Patent number: D381031
    Type: Grant
    Filed: July 27, 1995
    Date of Patent: July 15, 1997
    Assignee: Hitachi, Ltd.
    Inventors: Tomoyuki Miyata, Atsushi Katayama, Daiji Tsuboi, Hiroyuki Kobayashi, Hisashi Sato, Sadao Terakado, Peter Hohmann