Abstract: A sensor, in accordance with aspects of the present technique, is provided. The sensor comprises a membrane formed of gallium nitride. The membrane is disposed on a substrate, which is wet-etched to form a closed cavity. The membrane exhibits both a capacitive response and a piezo-response to an external stimulus. The sensor further includes a circuit for measuring at least one of the capacitive response or the piezo-response. In certain aspects, the sensor may be operable to measure external stimuli, such as, pressure, force and mechanical vibration.

Abstract: A technique for operating a sensor system is provided. The method includes exciting a first sensor with a first excitation signal at a first frequency and exciting a second sensor with a second excitation signal at a second frequency. The technique also includes combining a first measurement signal generated from the first sensor with a second measurement signal generated from the second sensor to determine a sensed parameter. The technique may be employed for reducing crosstalk between closely proximate sensors, such as capacitive probes, and may serve to determine distances within operating machines, such as turbine systems.

Abstract: A clearance measurement system is provided. The clearance measurement system includes a reference geometry disposed on a first object having an otherwise continuous surface geometry and a sensor disposed on a second object, wherein the sensor is configured to generate a first signal representative of a first sensed parameter from the first object and a second signal representative of a second sensed parameter from the reference geometry. The clearance measurement system also includes a processing unit configured to process the first and second signals to estimate a clearance between the first and second objects based upon a measurement difference between the first and second sensed parameters.

Abstract: A pressure sensor is provided. The pressure sensor includes a multi-layer laminate comprising a substrate and a semiconductor layer, wherein the substrate comprises single crystal or quasi-single crystal aluminum oxide, and a portion of the substrate that is spaced from a peripheral edge is wet etched to form an inwardly facing sidewall that defines a volume; and a substrate to which the multi-layer laminate is secured. The volume is an enclosed volume further defined by a substrate surface.

Abstract: An etchant including a halogenated salt, such as Cryolite (Na3AlF6) or potassium tetrafluoro borate (KBF4), is provided. The salt may be present in the etchant in an amount sufficient to etch a substrate and may have a melt temperature of greater than about 200 degrees Celsius. A method of wet etching may include contacting an etchant to at least one surface of a support layer of a multi-layer laminate, wherein the support layer may include aluminum oxide; or contacting an etchant to at least one surface of a support layer of a multi-layer laminate, wherein the etchant may include Cryolite (Na3AlF6), potassium tetrafluoro borate (KBF4), or both; and etching at least a portion of the support layer. The method may provide a laminate produced by growing a crystal onto an aluminum oxide support layer, and chemically removing at least a portion of the support layer by wet etch. An electronic device, optical device or combined device including the laminate is provided.

Abstract: A clearance sensing system for a rotating machine includes a plurality of sensor probes disposed within a stationary shroud of the rotating machine. Each of the plurality of sensor probes is adapted to measure a parameter indicative of an axial and a radial displacement of a rotating component within the shroud and to produce a signal that corresponds to the parameter. In certain embodiments, this parameter may include a capacitance between the rotating component and the sensor probe. The clearance sensing system further includes a circuit that receives the signal from each of the plurality of sensor probes and determines (a) the axial displacement of the rotating component within the shroud and (b) a radial displacement of the rotating component relative to the shroud.

Abstract: A method of forming a patterned optical transmission device on a substrate includes forming a liquid phase pattern on the substrate. The liquid phase pattern comprises a fluid precursor having a suspension or a solution of a dopant in a solvent. Catalyzing the liquid phase pattern to convert the liquid phase pattern into a hardened pattern, and processing the hardened pattern to form a patterned optical transmission device.

Abstract: A sensor, in accordance with aspects of the present technique, is provided. The sensor comprises a membrane formed of gallium nitride. The membrane is disposed on a substrate, which is wet-etched to form a closed cavity. The membrane exhibits both a capacitive response and a piezo-response to an external stimulus. The sensor further includes a circuit for measuring at least one of the capacitive response or the piezo-response. In certain aspects, the sensor may be operable to measure external stimuli, such as, pressure, force and mechanical vibration.

Abstract: A system for measuring clearance between a first object and a second object is provided. The system includes a sensor configuration to generate a first signal representative of a first sensed parameter and a second signal representative of a second sensed parameter. The system also includes a clearance measurement unit configured to process the first and second signals based upon a ratiometric technique to calculate clearance between the first and second objects.

Abstract: A technique for operating a sensor system is provided. The method includes exciting a first sensor with a first excitation signal at a first frequency and exciting a second sensor with a second excitation signal at a second frequency. The technique also includes combining a first measurement signal generated from the first sensor with a second measurement signal generated from the second sensor to determine a sensed parameter. The technique may be employed for reducing crosstalk between closely proximate sensors, such as capacitive probes, and may serve to determine distances within operating machines, such as turbine systems.

Abstract: A sensor system comprising a sensor operable to provide an output signal representative of a sensed parameter is provided. The sensor system also comprises a control system coupled to the sensor, wherein the control system is operable to change a physical characteristic of the sensor based on the output signal representative of the sensed parameter.

Abstract: A method of fabricating a stamping mold suitable for use in the formation of a tapered waveguide structure includes defining a stamping pattern upon the surface of a silicon wafer, and removing portions of the silicon wafer surface in accordance with the stamped pattern, thereby creating tapered vertical surfaces within the wafer.

Abstract: The invention provides novel “folded” Mach-Zehnder interferometers (“folded” MZI's), methods for making folded MZI's, and systems and devices incorporating them. The novel folded MZI's are elaborated from conventional MZI structures by cutting across the interferometer arms of a conventional MZI structure and creating reflectors on the exposed ends of the interferometer arms to form two “folded” MZI's from a single conventional Mach-Zehnder interferometer structure. The novel folded MZI's show promise as sensors having a reduced size and enhanced sensitivity relative to sensors incorporating conventional Mach-Zehnder Interferometers.

Abstract: Embodiments of methods, apparatuses, devices, and/or systems for optical are disclosed.

Abstract: An optical lens structure includes a substantially transparent substrate a lens array attached to the substrate with lenses of the lens array situated opposite the substrate and packaging material surrounding at least the periphery of the lens array, the packaging material including at least two alignment holes which are aligned with respect to positions of the lenses. In one example, the structure is fabricated by attaching a lens array to a substrate with lenses of the lens array situated opposite the substrate, surrounding a periphery of the lens array with a packaging material, the packaging material being attached to the substrate, planarizing the packaging material, and providing alignment holes through the packaging material.

Abstract: An electromagnetic coupler comprising: a coupling waveguide adapted for receiving input modes along an input axis, propagating coupling modes along a coupling axis, and transmitting output modes along an output axis, the output axis being not parallel to the coupling axis; and an output waveguide disposed adjacent the coupling waveguide and adapted for receiving the output modes.

Abstract: An optical lens structure includes a substantially transparent substrate a lens array attached to the substrate with lenses of the lens array situated opposite the substrate and packaging material surrounding at least the periphery of the lens array, the packaging material including at least two alignment holes which are aligned with respect to positions of the lenses. In one example, the structure is fabricated by attaching a lens array to a substrate with lenses of the lens array situated opposite the substrate, surrounding a periphery of the lens array with a packaging material, the packaging material being attached to the substrate, planarizing the packaging material, and providing alignment holes through the packaging material.

Abstract: An imaging system for generating an image of an object is provided. The imaging system comprises an X-ray source disposed in a spatial relationship to the object configured to transmit X-ray radiation through the object. The system further comprises at least one X-ray detecting media configured to convert the X-ray radiation transmitted through the object to optical signals. In addition, the system comprises an optical transmission conduit comprising a first end and a second end and an optical detector configured to convert optical signals to corresponding electrical signals. The first end of the optical transmission conduit is coupled to the X-ray detection device and the second end coupled to the optical detector.

Abstract: An ultrasound system includes an ultrasound probe configured for sensing and transmitting ultrasound signals. The ultrasound system further includes an optical conduit configured for coupling a light source and an optical detector in an optical path. The optical conduit includes electro-optic modulators configured for modulating optical signals on the optical conduit with at least one of the electrical signals configured to generate corresponding optically modulated analog signals on the optical conduit. In one example, the electro-optic modulators comprise electro-optic polymer modulators.

Abstract: An optoelectronic package is fabricated by a method which includes: positioning an optical device within a window of a substrate active-side up and below a top substrate surface; filling the window with an optical polymer material; planarizing surfaces of the optical polymer material and the substrate; patterning waveguide material over the optical polymer material and the substrate to form an optical interconnection path; and to form a mirror to reflect light from the optical device to the interconnection path; and forming a via to expose a bond pad of the optical device.