Abstract: Methods and apparatus that introduce, within the ion implant chamber or an isolated chamber in communication therewith, the capability to remove contaminants and oxide surface layers on a wafer surface prior to ion implantation, are disclosed. The mechanisms for removal of contaminants include conducting: a low energy plasma etch, heating the wafer and application of ultraviolet illumination, either in combination or individually. As a result, implantation can occur immediately after the cleaning/preparation process without the contamination potential of exposure of the wafer to an external environment. The preparation allows for the removal of surface contaminants, such as water vapor, organic materials and surface oxides.

Abstract: A method of increasing ion source lifetime in an ion implantation system uses the introduction of an inert gas, such as argon or xenon, into the halide-containing source gas. Inert gas constituents have a cleansing effect in the plasma ambient by enhancing sputtering.

Abstract: A computer implemented web based access control facility for a distributed environment, which allows users to request for access, take the request through appropriate approval work flow and finally make it available to the users and applications. This program also performs an automatic task of verifying the health of data, access control data as well as the entitlements, to avoid malicious user access. The system also provides an active interface to setup a backup, to delegate the duty in absence. Thus this system provides a comprehensive facility to grant, re-certify and control the entitlements and users in a distributed environment.

Abstract: A method of increasing ion source lifetime in an ion implantation system uses the introduction of an inert gas, such as argon or xenon, into the halide-containing source gas. Inert gas constituents have a cleansing effect in the plasma ambient by enhancing sputtering.

Abstract: Maneuvers of a controlled vehicle, such as a car, traveling at moderate to high speeds are planned by propagating cost waves in a configuration space using two search strategies referred to as budding and differential budding. Control is achieved by monitoring properties of the controlled vehicle and adjusting control parameters to achieve motion relative to a frame of reference. The frame of reference may change before the transformation to configuration space occurs. The method transforms goals, obstacles, and the position of the controlled vehicle in task space to a configuration space based on the position of these objects relative to a moving frame of reference. The method also determines a local neighborhood of possible motions based on the control capabilities of the vehicle. In one embodiment, the controlled parameters are time derivatives of the monitored properties. A variation of the method provides for the parallel computation of the configuration space.