Abstract: A substrate processing apparatus is provided. The substrate processing apparatus includes a substrate supporting member including a spin head on which a substrate is placed, a nozzle discharging processing liquid to the substrate placed on the spin head, and a processing liquid supplying source supplying the processing liquid to the nozzle. The nozzle includes a nozzle main body that has a plurality of discrete discharging openings and an integration discharging opening. The discrete discharging openings have a slit-shaped cross section having a first length and are arrayed in series in a predetermined direction. The integration discharging opening is formed by connecting the discrete discharging openings to each other in a single slot shape having a length greater than the first length, and finally discharges the processing liquid.

Abstract: A half tone mask having a transparent substrate, a light semitransmission layer, and a light shield layer; and a method for fabricating the same. The halftone mask is applied to multiple cycles of a photolithography process, thus shortening a time taken to fabricate the mask and reducing the production costs of the mask. Since a desired pattern is uniformly formed through a light semitransmission layer of the half tone mask of the present invention according to the uniformity of a chrome oxide (CrxOy) film, i.e., the uniformity in sputtering, the halftone mask is not limited in size.

Abstract: The motor includes a cylindrical rotor core, a plurality of magnets axially penetrated in the rotor core, a pair of separation-preventing plates installed at both ends of the rotor core, and at least one fixing member to fix the separation-preventing plates to the rotor core. The fixing member includes a rod portion extending in an axial direction of the rotor core to be disposed on an outer circumferential surface of the rotor core, and supporting portions bent from both ends of the rod portion and used to support the separation-preventing plates. The separation-preventing plates can be fixed to the rotor core by the fixing member disposed on the outer circumferential surface of the rotor core. The fixing member has no risk of hindering the flow of magnetic flux generated from the magnets, resulting in an improvement in the performance of the motor.

Abstract: A half tone mask having a transparent substrate, a light semitransmission layer, and a light shield layer, a method for fabricating the same, and a flat panel display using the same. The half tone mask is applied to multiple cycles of a photolithography process, thus shortening a time taken to fabricate the mask and reducing the production costs of the mask. Since a desired pattern is uniformly formed through a light semitransmission layer of the half tone mask of the present invention according to the uniformity of a chrome oxide (CrxOy) film, i.e., the uniformity in sputtering, the half tone mask is not limited in size.