Abstract: A physical quantity sensor includes a movable flat plate having a plurality of openings passing therethrough that is swingable around an axis of rotation, a support substrate linked to the flat plate via a column to suspend the movable flat plate over the support substrate via a gap, and a protrusion protruding toward the movable element. In a plan view, the openings are excluded from a D/2-width annular range surrounding the outer circumference of the protrusion, where D is the maximum outer diametrical dimension of the protrusion.

Abstract: A physical quantity sensor includes: a movable body that includes a beam, a coupling portion that is connected with the beam and is provided in a direction intersecting with the beam, and a first and second mass portions that are connected with the coupling portion at connection positions; a first and second fixed electrodes are opposed to the first and second mass portions; and a protrusion are provided and protrude toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions of the first and second mass portions opposite to the beam is L, and a distance from the protrusions to end portions of the first and second mass portions opposite to the beam is L1, the distance L1 is 0.5 L or longer and 3.1 L or shorter.

Abstract: A physical quantity sensor includes: a movable body that includes a beam portion as a rotation shaft, a coupling portion that is connected with the beam portion and is provided in a direction intersecting with the beam portion, and a first and a second mass portions as a mass portion that are connected with the coupling portion; a first and a second fixed electrodes as a measurement electrode that are provided on a support substrate and are opposed to the first and the second mass portions; and a protrusion that is provided in a region where the first and the second fixed electrodes are provided and protrudes from the support substrate toward the first and the second mass portions, in which a length of the coupling portion in the intersecting direction is 1.4 or more times a length from the beam portion to the first and the second mass portions.

Abstract: A physical quantity sensor includes a movable body that includes a beam portion, a coupling portion that is connected with the beam portion at connection positions and is provided in a direction intersecting with the beam portion, and a first and second mass portions that are connected with the coupling portion; a first and second fixed electrodes that are provided on a support substrate and are opposed to the first and second mass portions; and a protrusion is provided and protrude from the support substrate toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions opposite to the beam portion is L, and a distance from the protrusions to end portions opposite to the beam portion is L1, the distance L1 is 0.18 L or longer and 0.88 L or shorter.

Abstract: A physical quantity sensor includes a substrate, a movable section displaceable in a first direction with respect to the substrate, first and second movable electrode sections provided in the movable section, a first fixed electrode section fixed to the substrate and disposed to be opposed to the first movable electrode section in the first direction, a second fixed electrode section fixed to the substrate and disposed to be opposed to the second movable electrode section in the first direction, a restricting section configured to restrict a movable range in the first direction of the movable section, a first wire provided on the substrate and electrically connected to the first fixed electrode section, and a second wire provided on the substrate and electrically connected to the second fixed electrode section. The first wire and the second wire are respectively cross the restricting section in a plan view of the substrate.

Abstract: A physical quantity sensor includes a substrate, a fixed member fixed to the substrate, a movable member displaceable in a first direction with respect to the fixed member, a movable electrode assembly provided in the movable member, a fixed electrode assembly fixed to the substrate and opposing the movable electrode assembly in the first direction, and a restrictor configured to restrict a movable range of the movable member in the first direction. The movable member includes a first outer edge disposed on one side in the first direction and a second outer edge disposed on the other side. The restrictor includes at least one of a first restrictor facing the first outer edge across a gap and a second restrictor facing the second outer edge across another gap.

Abstract: It is an object of the invention to enhance the possibility of realizing a required torque in a supercharging region where scavenging occurs in a control apparatus for a supercharged engine. In order to achieve this object, the control apparatus for the supercharged engine according to the invention determines an operation amount of an intake valve driving device from a target in-cylinder air amount that is calculated from a required torque, and determines an operation amount of a throttle from a target intake valve passing air amount that is obtained by adding an amount of air blowing through an interior of a cylinder to the target in-cylinder air amount.

Abstract: A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.

Abstract: A throughput in processing a substrate can be improved and a running cost thereof can be reduced. A substrate processing apparatus 1 that processes a substrate 3 with a processing liquid and dries the substrate 3 includes a substrate rotating device 22 configured to rotate the substrate 3; a processing liquid discharging unit 13 configured to discharge the processing liquid toward the substrate 3; a substitution liquid discharging unit 14 configured to discharge a substitution liquid, which is substituted with the processing liquid on the substrate 3, toward the substrate 3 while relatively moving with respect to the substrate 3; and an inert gas discharging unit 15 configured to discharge an inert gas toward a peripheral portion of the substrate 3 in an inclined direction from above the substrate 3 while moving in a direction different from a direction in which the substitution liquid discharging unit 14 is moved.

Abstract: An image forming output control device includes a duplicate image information detector to receive instruction information from a processing execution control apparatus, compare image information included in a plurality of objects being unit images constituting the instruction information, and detect a plurality of duplicate image information objects, in which the image information is duplicate with each other, in the objects in which identification information for identifying the objects is different from each other; a drawing information generation controller to control a drawing information generator to generate drawing information according to the instruction information; and a drawing result storage unit to store drawing result information being a drawing result of the image information.

Abstract: A physical quantity sensor includes an element piece, in which the element piece includes a support portion that includes a first support portion, a second support portion, and a third support portion that links the first and second support portions, and is connected to a base substrate at the third support portion, a movable electrode portion that is positioned between the first and second support portions, and includes a movable electrode finger, an elastic portion that links the movable electrode portion and the support portion and has elasticity, and a fixed electrode portions having fixed electrode fingers that are arranged facing the movable electrode finger.

Abstract: A physical quantity sensor includes a first sensor element, and an outer edge portion arranged in at least part of the outer periphery of the first sensor element, and a first groove extending in a first direction provided in the outer edge portion in a plan view of the outer edge portion.

Abstract: A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.

Abstract: A functional device includes a movable body and a supporting section configured to support the movable body via coupling sections extending along a first axis. The supporting section includes a connection region connected to the coupling sections and provided along the first axis and contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate.

Abstract: A control device for a vehicle comprises a projected driving route calculating part calculating a projected driving route up to a destination, a target charge amount setting part setting a target amount of charge of the battery at each point on the projected driving route, an operating schedule setting part setting the operating schedule of the internal combustion engine and rotary electrical machine so that the amount of charge of the battery becomes the target amount of charge, and an operating schedule resetting part resetting an operating schedule when the difference between the amount of charge of the battery and the target amount of charge becomes a reset request value or more. The operating schedule resetting part is configured so as to reduce the reset request value when the remaining distance on the projected driving route is short compared to when it is long.

Abstract: A target first air amount for achieving a requested torque by an operation of an intake property variable actuator is calculated by using a first parameter. A target second air amount for achieving the requested torque by an operation of a turbocharging property variable actuator is calculated by using a second parameter. A value of a first parameter changes to a value that reduces a conversion efficiency of an air amount into torque in response to the requested torque decreasing to a first reference value or lower. Further, a value of the second parameter starts to change to a direction to reduce the conversion efficiency in response to the requested torque decreasing to a second reference value that is larger than the first reference value, or lower, and gradually changes to a direction to reduce the conversion efficiency in accordance with the requested torque further decreasing from the second reference value to the first reference value.

Abstract: A physical quantity sensor includes a substrate; a movable body that is displaceable about a support axis according to a physical quantity and includes an opening; a support that is provided on the substrate and is located in the opening, and the support includes a first fixed plate and a second fixed plate that are fixed to the substrate and provided so as to sandwich the support axis in plan view; a first beam and a second beam that each connect the first fixed plate with the second fixed plate and are spaced apart from each other; a third beam extending in a direction of the support axis and connecting the first beam with the movable body; and a fourth beam extending in a direction of the support axis and connecting the second beam with the movable body.

Abstract: A manufacturing method of a physical quantity sensor includes forming first and second fixed electrodes, and a dummy electrode on a substrate; and a movable body forming. The electrode forming includes forming a first mask layer on the substrate, forming a first electrode material layer by forming a first conductive layer on the substrate and the first mask layer, forming a second conductive layer on the substrate and the first electrode material layer, forming a second mask layer by forming a mask material layer on the second conductive layer, and removing a part of a section of the mask material layer not overlapping the first electrode material layer in plan view, and forming a second electrode material layer by etching the second conductive layer, with the second mask layer as a mask such that the second conductive layer is provided on the first electrode material layer and on the substrate.

Abstract: A physical quantity sensor includes: a movable body; a support that supports the movable body via a coupler; a substrate that is disposed so as to overlap the movable body in a plan view and is provided with a first fixed electrode and a second fixed electrode thereon along a first direction orthogonal to a longitudinal direction of the coupler; a third fixed electrode that does not overlap the movable body in the plan view, is electrically connected with any one of the first fixed electrode and the second fixed electrode, and is provided on the substrate; and a first dummy electrode that is disposed next to the third fixed electrode in the plan view, is at the same potential as the movable body, and is provided on the substrate.

Abstract: A physical quantity sensor has a first structure which has a movable section that includes movable electrode fingers, a second structure which includes first fixed electrode fingers that are arranged to oppose the movable electrode fingers, a third structure which includes second fixed electrode fingers that are arranged to oppose the movable electrode fingers, and a first electrostatic capacity forming section that forms an electrostatic capacity between the first structure and the second structure.