Abstract: A method for producing MnZn-ferrite comprising Fe, Mn and Zn as main components, and at least Co, Si and Ca as sub-components, the main components in the MnZn-ferrite comprising 53-56% by mol (as Fe2O3) of Fe, and 3-9% by mol (as ZnO) of Zn, the balance being Mn as MnO, comprising the step of sintering a green body to obtain MnZn-ferrite; the sintering comprising a temperature-elevating step, a high-temperature-keeping step, and a cooling step; the high-temperature-keeping step being conducted at a keeping temperature of higher than 1050° C. and lower than 1150° C. in an atmosphere having an oxygen concentration of 0.4-2% by volume; the oxygen concentration being in a range of 0.001-0.2% by volume during cooling from 900° C. to 400° C. in the cooling step; and the cooling speed between (Tc+70)° C. and 100° C. being 50° C./hour or more, wherein Tc represents a Curie temperature (° C.) calculated from % by mass of Fe2O3 and ZnO.

Abstract: An inertial sensor includes: a substrate; a moving element swinging about a swing axis along a Y-axis; a detection electrode provided at the substrate, overlapping the moving element as viewed in a plan view from a Z-axis direction orthogonal to the Y-axis, and forming an electrostatic capacitance with the moving element; an exposure part provided at an inner side of the detection electrode and exposing a surface facing the moving element, of the substrate; a protrusion overlapping the moving element as viewed in a plan view from the Z-axis direction and protruding toward the moving element from the exposure part of the substrate; and a covered electrode provided at a top of the protrusion and having a same electric potential as the moving element.

Abstract: A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C×1.5?Cmin.

Abstract: A vehicle drive device includes an electric motor disposed in a wheel, a planetary gear mechanism, and a hub. The electric motor is configured to generate a drive force which drives the wheel. The drive force of the electric motor is transmitted to the planetary gear mechanism. The hub transmits a drive force of the planetary gear mechanism to the wheel. The planetary gear mechanism includes a pinion gear having a first pinion and a second pinion coaxial with the first pinion and having a smaller diameter than the first pinion, a fixed ring gear which engages with the first pinion, and a drive ring gear which engages with the second pinion and transmits a drive force to the hub. The first pinion is disposed at a position away from an end portion of the stator core in a direction in which a rotation center axis of the wheel extends.

Abstract: An inertial sensor includes a movable element including a first movable section and a second movable section, a first detection electrode, and a first dummy electrode. The first movable section has a first section, a second section that is farther from the swing axis than the first section, and a third section disposed between the first section and second section. A separation distance between the third section and the first dummy electrode is greater than a separation distance between the first section and the first detection electrode.

Abstract: An inertial sensor includes, provided that axes X, Y, and Z are three axes perpendicular to one another, a substrate, a fixed section fixed to the substrate, a movable element that swings around a swing axis extending along the axis Y, a first beam and a second beam that link the fixed section to the movable element and are torsionally deformed by the swing motion of the movable element, and a detection electrode that is disposed on the substrate and overlaps with the movable element in the plan view along the axis-Z direction, and the first beam and the second beams differ in shape from each other and have the same torsional spring constant.

Abstract: An inertial sensor includes a substrate, a movable element that swings around a swing axis; and a protrusion that overlaps with the movable element in the plan view and protrudes from the substrate toward the movable element. The protrusion includes a first protrusion and a second protrusion so located as to be farther from the swing axis than the first protrusion, and when the movable element swings relative to the substrate around the swing axis, the first protrusion and the second protrusion come into contact with the movable element at the same time or the first protrusion comes into contact with the movable element and then the second protrusion comes into contact with the movable element.

Abstract: An inertial sensor includes a movable element including a first movable section and a second movable section, a first detection electrode, and a first dummy electrode. The first movable section has a first section, a second section that is farther from the swing axis than the first section, and a third section disposed between the first section and second section. The first section of the first movable section has a first opening and the third section of the first movable section has a second opening. An opening ratio of the first opening to the first section of the first movable section is smaller than an opening ratio of the second opening to the third section of the first movable section.

Abstract: A physical quantity sensor includes a substrate; a movable body that is displaceable about a support axis according to a physical quantity and includes an opening; a support that is provided on the substrate and is located in the opening, and the support includes a first fixed plate and a second fixed plate that are fixed to the substrate and provided so as to sandwich the support axis in plan view; a first beam and a second beam that each connect the first fixed plate with the second fixed plate and are spaced apart from each other; a third beam extending in a direction of the support axis and connecting the first beam with the movable body; and a fourth beam extending in a direction of the support axis and connecting the second beam with the movable body.

Abstract: A manufacturing method of a physical quantity sensor includes forming first and second fixed electrodes, and a dummy electrode on a substrate; and a movable body forming. The electrode forming includes forming a first mask layer on the substrate, forming a first electrode material layer by forming a first conductive layer on the substrate and the first mask layer, forming a second conductive layer on the substrate and the first electrode material layer, forming a second mask layer by forming a mask material layer on the second conductive layer, and removing a part of a section of the mask material layer not overlapping the first electrode material layer in plan view, and forming a second electrode material layer by etching the second conductive layer, with the second mask layer as a mask such that the second conductive layer is provided on the first electrode material layer and on the substrate.

Abstract: An optical device including at least a part of a rotation body acquired by rotating a reference plane shape or a parallelly shifted body acquired by parallelly shifting the reference plane shape, the reference plane shape including an incidence portion allowing light from a predetermined site to enter, an emit portion that reflects the light which has traveled through the incidence portion and which is directly irradiated and a first reflection portion that reflects the reflected light by the emit portion toward the emit portion. The reference plane shape may include a second reflection portion that reflects the light which has traveled through the incidence portion and which is directly irradiated to the emit portion. An optical system apparatus includes a light source placed at the predetermined site.

Abstract: A inertial sensor includes a substrate, a fixed portion that is fixed to the substrate, a movable portion is connected to the fixed portion, and is displaceable in an X axis direction, and a movable electrode that is supported at the movable portion, and a frame part includes a first edge that is located on one side of the X axis direction, and is disposed along a Y axis direction, and a second edge that is located on the other side of the X axis direction, and is disposed along the Y axis direction. The fixed portion is disposed further toward the second edge than the first edge, and the substrate includes a first projection that overlaps the first edge, and is disposed to be separated from the first edge, and a second projection that overlaps the second edge, and is disposed to be separated from the second edge.

Abstract: A method for cleaning a substrate includes supplying to a substrate a film-forming processing liquid which includes a volatile component and forms a film on the substrate, vaporizing the volatile component in the film-forming processing liquid such that the film-forming processing liquid solidifies or cures on the substrate and forms a processing film on the substrate, supplying to the substrate having the processing film a strip-processing liquid which strips the processing film from the substrate, and supplying to the processing film formed on the substrate a dissolving-processing liquid which dissolves the processing film after the supplying of the strip-processing liquid.

Abstract: A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C?1.5?Cmin.

Abstract: An inertial sensor includes: a substrate; a movable body swung around a swing axis with respect to the substrate; a detection electrode that is provided at the substrate and that overlaps with the movable body in a plan view; a dummy electrode that is provided on the substrate, that overlaps with the movable body in the plan view, and that has the same potential as that of the movable body; and a protrusion that is provided on the substrate, that overlaps with the first movable portion in the plan view, that protrudes toward the movable body, and that prevents the movable body from being displaced around the swing axis, in which the dummy electrode is located between the protrusion and the detection electrode, and surrounds at least a part of a periphery of the protrusion, and a contact portion of the protrusion with the movable body is formed of an insulating material.

Abstract: A physical quantity sensor includes a substrate; a movable body that is displaceable about a support axis according to a physical quantity and includes an opening; a support that is provided on the substrate and is located in the opening, and the support includes a first fixed plate and a second fixed plate that are fixed to the substrate and provided so as to sandwich the support axis in plan view; a first beam and a second beam that each connect the first fixed plate with the second fixed plate and are spaced apart from each other; a third beam extending in a direction of the support axis and connecting the first beam with the movable body; and a fourth beam extending in a direction of the support axis and connecting the second beam with the movable body.

Abstract: A physical quantity sensor includes a substrate, an element portion disposed so as to overlap the substrate, a conductor pattern disposed on the substrate so as to face the element portion, and a protection film covering at least a part of an exposed portion of the conductor pattern exposed from element portion in a plan view from a direction in which the substrate and the element portion overlap.

Abstract: A compound represented by Formula (I): Chemical Formula 1 wherein Chemical Formula 2 or the like Y1 is O or the like; Z1 is C(R4) or N; Z2a is C(R5a) or the like; Z3a is C(R6) or the like; R4, R5a and R6 are each independently a hydrogen atom or the like; R1 is substituted or unsubstituted aromatic carbocyclyl or the like; R2a, R2b, R2c and R2d are each independently a hydrogen atom or the like; X is N(R7a) or the like; R7a is a hydrogen atom or the like; R3 is Chemical Formula 3 or the like Ring B is a 6-membered aromatic carbocycle or the like; R9a and R10a are each independently halogen or the like; n is an integer from 1 to 5; m is an integer from 0 to 4; and p is an integer from 0 to 3, or a pharmaceutically acceptable salt thereof.

Abstract: A inertial sensor includes a substrate, a fixed portion that is fixed to the substrate, a movable portion is connected to the fixed portion, and is displaceable in an X axis direction, and a movable electrode that is supported at the movable portion, and a frame part includes a first edge that is located on one side of the X axis direction, and is disposed along a Y axis direction, and a second edge that is located on the other side of the X axis direction, and is disposed along the Y axis direction. The fixed portion is disposed further toward the second edge than the first edge, and the substrate includes a first projection that overlaps the first edge, and is disposed to be separated from the first edge, and a second projection that overlaps the second edge, and is disposed to be separated from the second edge.

Abstract: In an image provision apparatus (100), a decomposition unit (111) decomposes image data into pieces of unit image data (70). A storing unit (112) stores, in a memory unit (130), image management information (131) including each piece of unit image data (70) of the pieces of unit image data and position information. An acquisition unit (121) accepts a provision request (52). The provision request (52) includes range information representing a range of a partial image in the image. The acquisition unit (121) acquires a unit image data set (711) representing unit images each including at least part of the partial image from the image management information (131), based on the range information and the position information. A generation unit (122) generates the partial image (63) based on the unit image data set (711).