Abstract: Provided is an inspection system capable of estimating electric characteristics of a sample with high accuracy regardless of an initial charging state of a wafer. The inspection system includes a charged particle beam device and a computer system, and inspects the electric characteristics of the sample. The inspection system evaluates initial charging of an inspection region including inspection patterns based on reference data indicating a secondary charged particle signal from a reference pattern corresponding to a plurality of pulse conditions. The reference pattern has the same electric characteristics as the inspection pattern and initial charging therein caused by electric charges that are not emitted according to a discharge time constant of the sample is negligible. The reference pattern is obtained by irradiating the reference pattern with a pulse charged particle beam under a plurality of pulse conditions.

Abstract: The present disclosure proposes a system for detecting a foreign material adhering to or a scratch formed on a bevel at an edge of a semiconductor wafer in order to detect the foreign material or defect on the bevel without using a reference image and including a learning device (905) that outputs information on the foreign material adhering to or the scratch formed on the bevel as a learning result, in which the learning device performs learning in advance by using image data acquired by an image acquisition tool and the information on the foreign material or the scratch on the bevel included in the image data, and the foreign material or the scratch is detected by inputting the image data obtained by the image acquisition tool to the learning device (refer to FIG. 9).

Abstract: An object of the present disclosure is to provide a defect classification device capable of easily grasping an appropriate recipe update timing of an imaging device when classification accuracy for classifying defects existing on a semiconductor wafer is decreased. The defect classification device according to the present disclosure calculates classification accuracy by further acquiring a result of a manual classification for defects spanning a plurality of classification spaces as a result of an automatic classification, and comparing the result of the automatic classification with the result of the manual classification (see FIG. 5).

Abstract: An information processing device includes a processor configured to: acquire renewable power generation information from a renewable energy power generation server; acquire at least one of hydrogen power generation information from a hydrogen power generation server and fuel cell information; acquire grid power generation information from a grid power generation server; acquire electric power information from each of a plurality of consumer facilities in a predetermined area, the electric power information being regarding an amount of electric power consumed by the consumer facility; and generate proposal information including information on a type of electric power supplied to a predetermined consumer facility based on at least one of the renewable power generation information, the hydrogen power generation information, and the fuel cell information, the grid power generation information, and a plurality of pieces of the electric power information, and output the proposal information to the predetermined con

Abstract: This inspection system 100 comprises: an electron source 102 which irradiates a sample 200 with an inspection beam; a detector 105 which detects secondary electrons obtained by irradiating the sample 200 with the inspection beam and outputs a detection signal; a laser device 107 which emits an action laser that changes the amount of secondary electrons; an electron gun 106 which emits an action electron beam that changes the amount of secondary electrons; and a computer system 140 which generates an image of the sample 200 on the basis of the detection signal.

Abstract: Provided is a technique and the like capable of specifying irradiation areas or irradiation positions of a beam and a light as clearly as possible. A charged particle beam apparatus 1 includes: a position adjustment mark 10 provided on a stage 6 and irradiated with a beam b1 and a light a1; and a mechanism setting an irradiation position of the beam b1 and an irradiation position of the light a1 with respect to the stage 6 and changing a relative positional relationship including a distance between the irradiation position of the light a1 and the stage 6.

Abstract: A control device controls a contact probe in synchronization with a pulse-controlled light having a predetermined wavelength, a measurement instrument measures a characteristic of a sample to be inspected or an analysis sample, and a circuit constant or a defect structure of the sample to be inspected is estimated based on a circuit model created by an electric characteristic analysis device configured to generate the circuit model based on a value measured by the measurement instrument and a detection signal of secondary electrons detected by the charged particle beam device.

Abstract: A semiconductor inspection device 1 having a first measurement mode and a second measurement mode includes: an electron optical system configured to irradiate a sample with an electron beam; an optical system configured to irradiate the sample with light; an electron detector configured to detect a signal electron; a photodetector 29 configured to detect signal light; a control unit 11 configured to control the electron optical system and the optical system such that an electron beam and light are emitted under a first irradiation condition in the first measurement mode, and to control the electron optical system and the optical system such that an electron beam and light are emitted under a second irradiation condition in the second measurement mode; and a computer configured to process a detection signal from the electron detector or the photodetector.

Abstract: A battery device is provided with: an exterior body having two outer side walls; at least one battery cell group that is arranged between the two outer side walls of the exterior body and that is composed of a plurality of laminated battery cells; a first temperature-adjusting medium flow path that is provided in at least one of the two outer side walls of the exterior body and in which a temperature-adjusting medium capable of exchanging heat with the battery cells via the outer side wall flows; and a holding mechanism that brings the battery cell group into contact with the outer side wall so that heat can be exchanged and that holds the battery cell group in the exterior body by applying, to the battery cell group in the exterior body, a pressing force in a direction towards the outer side wall having the first temperature-adjusting medium flow path.

Abstract: A charged particle optical system scans a sample with a pulsed charged particle beam and detects secondary charged particles; and a scan image is formed. Control is carried out so that a deflection signal for deflecting the charged particle beam in a first direction, a first timing for pulsed irradiation, a second timing for pulsed irradiation, and a third timing for detection of the secondary charged particles are synchronized. When the deflection amount of the charged particle beam in the time period of the first timing corresponds to the coordinates of n pixels in the scan image, the same line is scanned m times (m < n) while shifting the first timing with respect to the deflection signal so that a location irradiated with the charged particle beam by each scanning has different pixel coordinates. The pixel values at pixel coordinates where a signal is defective are restored.

Abstract: Cell groups are electrically connected by effectively using the space within a housing. A housing of a battery pack has therewithin a partition wall which projects in a projecting direction. A first cell group has a plurality of battery cells on one side of the partition wall. A second cell group has a plurality of battery cells on another side. A first terminal block projects from a side of the first cell group toward a side of the second cell group more to a side in the projecting direction than the partition wall. A second terminal block projects from a side of the second cell group toward a side of the first cell group. A coupling bus bar has one end arranged on the first terminal block and another end arranged on the second terminal block, thereby electrically connecting the first cell group and second cell group.

Abstract: A configuration is provided so as to enable efficient fixing of cell groups to a housing of a battery pack. A housing of a battery pack has inside thereof a partition wall which extends in an extending direction and projects in a projecting direction. A cell group has a plurality of battery cells side-by-side in the extending direction one a side of the partition wall. Paste is filled into a gap between the partition wall and the cell group. The partition wall has an injection channel. The injection channel has an injection port for injecting the paste, and an inlet which communicates with the injection port and opens to the gap.

Abstract: There is provided a charged particle beam apparatus that can reduce the processing time. A charged particle beam apparatus includes: an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens; an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field; a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and a control unit that controls the excitation control unit and the electrostatic field control unit. The control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample.

Abstract: Provided is a vehicle battery device in which components are reduced, a compact configuration can be achieved, and connection with the outside can be easily performed. A vehicle battery device includes: a battery cell mounting part accommodating a battery cell group constituted by a plurality of laminated battery cells; and an interface box integrating connection functions between the battery cell mounting part and the outside, wherein the battery cell mounting part is connected to at least one of two opposing side surfaces in an outer surface of the interface box, and has an end plate on an end surface opposite an end surface connected to the interface box; and the battery cell group of the battery cell mounting part is compressed and sandwiched between the side surface of the interface box and the end plate in a lamination direction of the battery cells.

Abstract: As a technology for an observation device and an inspection device, a technology capable of reducing a work effort related to generation of a recipe including alignment information is provided. An observation device 1 includes an observation unit 103 that obtains an image for observing a sample 101 on a stage 102. A computer system 2 of the observation device 1 acquires the image from the observation unit 103, specifies a period of a pattern-formed unit region repeatedly formed on a surface of the sample 101 from the image, and generates a recipe including observation or inspection alignment positions of the sample 101 using the specified period.

Abstract: A charged particle beam device according to the present invention changes a signal amount of emitted charged particles by irradiating the sample with light due to irradiation under a plurality of light irradiation conditions, and determines at least any one of a material of the sample or a shape of the sample according to the changed signal amount.

Abstract: This end end plate securing structure comprises a battery case capable of housing a plurality of battery cells in a stacked state, and an end plate for pressing the plurality of battery cells in a stacking direction, and holds the plurality of battery cells in the battery case by securing the end plate to the battery case. The end plate has a recessed groove that is provided in an end surface, a securing member that is disposed in the recessed groove to be projectable from and retractable into the end surface, and a biasing member that is disposed in the recessed groove and biases the securing member in a projection direction. The battery case has an engagement part that engages with the securing member. The end plate is secured to the battery case by engagement of the securing member of the end plate with the engagement part.

Abstract: There is provided a charged particle beam apparatus that can reduce the processing time. A charged particle beam apparatus includes: an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens; an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field; a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and a control unit that controls the excitation control unit and the electrostatic field control unit. The control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample.

Abstract: A vehicle battery device includes: a battery cell mounting part accommodating a battery cell group constituted by a plurality of laminated battery cells and having a temperature control solution passage along a lamination direction of the battery cells; and an interface box, wherein the battery cell mounting part is connected to at least one of two side surfaces of the interface box; the interface box has, on any outer surface other than the side surface connected with the battery cell mounting part, a power interface part transmitting and receiving electricity and a temperature control solution interface part transmitting and receiving a temperature control solution; the battery cell group is electrically connected to the power interface part; and the temperature control solution passage is connected to the temperature control solution interface part so as to be capable of circulating the temperature control solution.

Abstract: A battery device is provided with: an exterior body having two outer side walls; at least one battery cell group that is arranged between the two outer side walls of the exterior body and that is composed of a plurality of laminated battery cells; a first temperature-adjusting medium flow path that is provided in at least one of the two outer side walls of the exterior body and in which a temperature-adjusting medium capable of exchanging heat with the battery cells via the outer side wall flows; and a holding mechanism that brings the battery cell group into contact with the outer side wall so that heat can be exchanged and that holds the battery cell group in the exterior body by applying, to the battery cell group in the exterior body, a pressing force in a direction towards the outer side wall having the first temperature-adjusting medium flow path.