Abstract: A cleaning device includes a cleaning member that includes a cleaning portion that cleans a light transmission member, which has a substantially elongated shape and which transmits light, and a support portion that supports the cleaning portion and a wall portion that is disposed on one end side of the light transmission member in a longitudinal direction of the light transmission member and that has a surface that is formed along a direction that intersects the longitudinal direction of the light transmission member. The cleaning member and the wall portion each have a configuration in which when an end of the cleaning member makes contact with the wall portion and is pressed, the support portion is bent in a convex manner toward a side opposite to a side on which the light transmission member is disposed.

Abstract: A removal mechanism includes a removing member, an accommodation section, a receiver, and a cooling path. The removing member rubs against an extraneous-matter-adhered member, to which extraneous matter is adhered, so as to remove the extraneous matter therefrom. The accommodation section accommodates therein the extraneous matter removed by the removing member. The receiver receives, at a lower side of the accommodation section, the extraneous matter spilling out and dropping from the accommodation section. The cooling path allows gas so flow therethrough so as to cool the accommodation section from outside thereof. The cooling path is spatially isolated from a passage chamber through which the extraneous matter dropping from the accommodation section toward the receiver passes, an accommodation chamber for the extraneous matter in the accommodation section, and a chamber above the receiver that receives the extraneous matter.

Abstract: A gas purification device includes an inflow port provided in an upper part of the gas purification device in a gravitational direction so that gas flows therein, a removing member that removes powder contained in the gas when the gas passes through the removing member, the removing member being disposed at a position such as not to overlap with the inflow port when viewed from above in the gravitational direction, and an outflow port provided in a lower part of the gas purification device in the gravitational direction so that the gas flows out therefrom after passing through the removing member.

Abstract: An object of the present invention is to provide a method for pattern measurement and a charged particle radiation device in which a pattern formed by using a DSA technique can be very precisely measured and inspected. According to an aspect for achieving the object, a method for pattern measurement or a charged particle radiation device for realizing the measurement is proposed as follows. A charged particle is radiated to a polymer compound used for a self-organization lithography technique, and a specific polymer is considerably contracted as compared to the other polymer among multiple polymers forming the polymer compound. Thereafter, dimensions between multiple edges of the other polymer are measured, based on a signal obtained by scanning a region including the other polymer with the charged particle beam.

Abstract: A drawer member that is capable of being drawn out from an image forming apparatus body and that includes a fixing unit that heats and fixes an image onto a recording medium, a first flow path that is formed around the fixing unit and that causes air that is heated by heat, which is discharged from the fixing unit, to circulate, and a second flow path that is formed adjacent to the first flow path on a side opposite to the fixing unit and in which air having a temperature lower than a temperature of air, which circulates in the first flow path, circulates.

Abstract: A cleaning device includes a cleaning member that includes a cleaning portion that cleans a light transmission member, which has a substantially elongated shape and which transmits light, and a support portion that supports the cleaning portion and a wall portion that is disposed on one end side of the light transmission member in a longitudinal direction of the light transmission member and that has a surface that is formed along a direction that intersects the longitudinal direction of the light transmission member. The cleaning member and the wall portion each have a configuration in which when an end of the cleaning member makes contact with the wall portion and is pressed, the support portion is bent in a convex manner toward a side opposite to a side on which the light transmission member is disposed.

Abstract: A drawer member that is capable of being drawn out from an image forming apparatus body and that includes a fixing unit that heats and fixes an image onto a recording medium, a first flow path that is formed around the fixing unit and that causes air that is heated by heat, which is discharged from the fixing unit, to circulate, and a second flow path that is formed adjacent to the first flow path on a side opposite to the fixing unit and in which air having a temperature lower than a temperature of air, which circulates in the first flow path, circulates.

Abstract: A removal mechanism includes a removing member, an accommodation section, a receiver, and a cooling path. The removing member rubs against an extraneous-matter-adhered member, to which extraneous matter is adhered, so as to remove the extraneous matter therefrom. The accommodation section accommodates therein the extraneous matter removed by the removing member. The receiver receives, at a lower side of the accommodation section, the extraneous matter spilling out and dropping from the accommodation section. The cooling path allows gas so flow therethrough so as to cool the accommodation section from outside thereof. The cooling path is spatially isolated from a passage chamber through which the extraneous matter dropping from the accommodation section toward the receiver passes, an accommodation chamber for the extraneous matter in the accommodation section, and a chamber above the receiver that receives the extraneous matter.

Abstract: An apparatus includes: an element that receives subject light from a subject to generate image data; a section that generates a recording image to be recorded on a recording medium from the image data when a first mode is set; a section that generates a second display image, which allows display of a live-view image, from the image data when a second mode is set, and that generates a first display image, which allows display of an image identical to the recording image, from the image data when the first mode is set; a section that sequentially displays the first display image or the second display image; a section that detects a specific state of the apparatus that obstructs recording of an imaging object onto the recording image; and a section that controls switching between the first mode and the second mode on the basis of the detection results.

Abstract: An apparatus includes: an element that receives subject light from a subject to generate image data; a section that generates a recording image to be recorded on a recording medium from the image data when a first mode is set; a section that generates a second display image, which allows display of a live-view image, from the image data when a second mode is set, and that generates a first display image, which allows display of an image identical to the recording image, from the image data when the first mode is set; a section that sequentially displays the first display image or the second display image; a section that detects a specific state of the apparatus that obstructs recording of an imaging object onto the recording image; and a section that controls switching between the first mode and the second mode on the basis of the detection results.

Abstract: In recent years, in association with the miniaturization and high integration of semiconductor manufacturing processes, there have been arising many cases where observation target portions are densely located. In such a case, if observation is performed using a conventional pre-charge technology, scanning with an electron beam in pre-charging are repeatedly executed, therefore the charge potential on the surface of a specimen exceeds the dielectric breakdown voltage. As a result, dielectric breakdown arises in areas where scanning with an electron beam are repeatedly executed. An object of the present invention is to provide a defect observation method that can reduce the risk of dielectric breakdown, and a charged particle beam apparatus that utilizes the method. In the present invention, when a specimen is observed with the use of a technology relevant to pre-charging, after executing a piece of control processing, plural images are photographed.

Abstract: An apparatus includes: an element that receives subject light from a subject to generate image data; a section that generates a recording image to be recorded on a recording medium from the image data when a first mode is set; a section that generates a second display image, which allows display of a live-view image, from the image data when a second mode is set, and that generates a first display image, which allows display of an image identical to the recording image, from the image data when the first mode is set; a section that sequentially displays the first display image or the second display image; a section that detects a specific state of the apparatus that obstructs recording of an imaging object onto the recording image; and a section that controls switching between the first mode and the second mode on the basis of the detection results.

Abstract: In related art, when a location to be analyzed is selected from inspection data, a relatively highly critical defect among entire defects is not selected as a defect to be analyzed. Further, when a mark is placed in a fixed position associated with a defect, the mark affects the defect itself depending on the shape and size of the defect, which is problematic in the following analysis made in an analysis apparatus. Moreover, in the case of a wafer with no pattern, a defect invisible to a SEM cannot be marked. To select a highly critical defect as a defect to be analyzed, an automatic classification result from a review SEM is used to select a defect to be analyzed. Further, to avoid an effect on a defect itself, a mark is placed in a position associated with the defect with the distance from the defect to the marking position changed on a defect basis.

Abstract: An apparatus includes: an element that receives subject light from a subject to generate image data; a section that generates a recording image to be recorded on a recording medium from the image data when a first mode is set; a section that generates a second display image, which allows display of a live-view image, from the image data when a second mode is set, and that generates a first display image, which allows display of an image identical to the recording image, from the image data when the first mode is set; a section that sequentially displays the first display image or the second display image; a section that detects a specific state of the apparatus that obstructs recording of an imaging object onto the recording image; and a section that controls switching between the first mode and the second mode on the basis of the detection results.

Abstract: In recent years, in association with the miniaturization and high integration of semiconductor manufacturing processes, there have been arising many cases where observation target portions are densely located. In such a case, if observation is performed using a conventional pre-charge technology, scanning with an electron beam in pre-charging are repeatedly executed, therefore the charge potential on the surface of a specimen exceeds the dielectric breakdown voltage. As a result, dielectric breakdown arises in areas where scanning with an electron beam are repeatedly executed. An object of the present invention is to provide a defect observation method that can reduce the risk of dielectric breakdown, and a charged particle beam apparatus that utilizes the method. In the present invention, when a specimen is observed with the use of a technology relevant to pre-charging, after executing a piece of control processing, plural images are photographed.

Abstract: An apparatus includes: an element that receives subject light from a subject to generate image data; a section that generates a recording image to be recorded on a recording medium from the image data when a first mode is set; a section that generates a second display image, which allows display of a live-view image, from the image data when a second mode is set, and that generates a first display image, which allows display of an image identical to the recording image, from the image data when the first mode is set; a section that sequentially displays the first display image or the second display image; a section that detects a specific state of the apparatus that obstructs recording of an imaging object onto the recording image; and a section that controls switching between the first mode and the second mode on the basis of the detection results.

Abstract: A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.

Abstract: A first gate opens obliquely downward, and maintains the posture, rendering the slope angle of the bottom surface thereof steeper than that of the bottom surface of the second gate. Thus, the bottom surface of the second gate forms a gentle slope sliding surface, and the bottom surface of the first gate forms a steep slope sliding surface. Then articles drop following the shape of a parabola toward the bottom surface of the first gate on the steep slope side, with momentum gained from sliding down the bottom surface of the second gate on the gentle slope side, and then change the sliding trajectory inward upon bumping into the bottom surface of the first gate. The articles then drop following the shape of a parabola toward the center area of a dispersal table, with momentum gained from sliding down the bottom surface of the first gate.

Abstract: A first gate opens obliquely downward, and maintains the posture, rendering the slope angle of the bottom surface thereof steeper than that of the bottom surface of the second gate. Thus, the bottom surface of the second gate forms a gentle slope sliding surface, and the bottom surface of the first gate forms a steep slope sliding surface. Then articles drop following the shape of a parabola toward the bottom surface of the first gate on the steep slope side, with momentum gained from sliding down the bottom surface of the second gate on the gentle slope side, and then change the sliding trajectory inward upon bumping into the bottom surface of the first gate. The articles then drop following the shape of a parabola toward the center area of a dispersal table, with momentum gained from sliding down the bottom surface of the first gate.

Abstract: A charged particle beam device of the present invention, which can correct astigmatism, off-axis aberration and out-of-focus state simultaneously at high speed, is provided with an electrostatic lens between an objective lens and a sample, which lens generates an electric field on a trajectory of a charged particle beam. The electrostatic lens is divided into a plurality of electrodes, and a voltage can be applied to the electrodes independently. By adjusting this voltage, any one of the astigmatism, the off-axis aberration and the out-of-focus state of the objective lens is corrected.