Patents by Inventor Satya Narayan

Satya Narayan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming a high density semiconductor device
    Patent number: 6204112
    Abstract: A method for forming an integrated circuit device, and the product thereby produced, are disclosed. The disclosed method includes the steps of obtaining a substrate with a patterned gate conductor and cap insulator, forming a dielectric masking layer having at least one opening, and, using the opening in the dielectric masking layer as a mask, forming a trench capacitor which is self-aligned to the cap insulator edge. The method is particularly useful for a producing a DRAM device having a dense array region with self-aligned deep trench storage capacitors connected by buried straps.
    Type: Grant
    Filed: January 22, 1999
    Date of Patent: March 20, 2001
    Assignee: International Business Machines Corporation
    Inventors: Ashima Bhattacharyya Chakravarti, Satya Narayan Chakravarti, James G. Ryan
  • Process for forming a high density semiconductor device
    Patent number: 5909044
    Abstract: A method for forming an integrated circuit device, and the product thereby produced, are disclosed. The disclosed method includes the steps of obtaining a substrate with a patterned gate conductor and cap insulator, forming a dielectric masking layer having at least one opening, and, using the opening in the dielectric masking layer as a mask, forming a trench capacitor which is self-aligned to the cap insulator edge. The method is particularly useful for producing a DRAM device having a dense array region with self-aligned deep trench storage capacitors connected by buried straps.
    Type: Grant
    Filed: July 18, 1997
    Date of Patent: June 1, 1999
    Assignee: International Business Machines Corporation
    Inventors: Ashima Bhattacharyya Chakravarti, Satya Narayan Chakravarti, James G. Ryan