Patents by Inventor Scott E. Sills

Scott E. Sills has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220254896
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a transistor including a source contact, a drain contact, and a channel region including an oxide semiconductor material as the channel material. At least one of the drain contact or the source contact includes a conductive material, such as ruthenium, to reduce the Schottky effects at the interface with the channel material.
    Type: Application
    Filed: April 28, 2022
    Publication date: August 11, 2022
    Inventors: Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Scott E. Sills
  • Publication number: 20220238658
    Abstract: Some embodiments include an integrated assembly having a gate material, an insulative material adjacent the gate material, and a semiconductor oxide adjacent the insulative material. The semiconductor oxide has a channel region proximate the gate material and spaced from the gate material by the insulative material. An electric field along the gate material induces carrier flow within the channel region, with the carrier flow being along a first direction. The semiconductor oxide includes a grain boundary having a portion which extends along a second direction that crosses the first direction of the carrier flow. In some embodiments, the semiconductor oxide has a grain boundary which extends along the first direction and which is offset from the insulative material by an intervening portion of the semiconductor oxide. The carrier flow is within the intervening region and substantially parallel to the grain boundary. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: April 13, 2022
    Publication date: July 28, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Yi Fang Lee, Isamu Asano, Ramanathan Gandhi, Scott E. Sills
  • Patent number: 11398571
    Abstract: A device comprises vertically oriented transistors. The device comprises a pillar comprising at least one oxide semiconductor material, the pillar wider in a first lateral direction at an upper portion thereof than at a lower portion thereof, a gate dielectric material over sidewalls of the pillar and extending in the first lateral direction, and at least one gate electrode adjacent to at least a portion of the gate dielectric material. Related devices, electronic systems, and methods are also disclosed.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: July 26, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Scott E. Sills
  • Patent number: 11393978
    Abstract: An array of cross point memory cells comprises spaced first lines which cross spaced second lines. Two memory cells are individually between one of two immediately adjacent of the second lines and a same single one of the first lines.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: July 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Durai Vishak Nirmal Ramaswamy, Alessandro Calderoni
  • Patent number: 11393920
    Abstract: Some embodiments include an integrated assembly having a conductive structure, an annular structure extending through the conductive structure, and an active-material-structure lining an interior periphery of the annular structure. The annular structure includes dielectric material. The active-material-structure includes two-dimensional-material. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: July 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: David K. Hwang, John F. Kaeding, Richard J. Hill, Scott E. Sills
  • Publication number: 20220223602
    Abstract: Systems, methods, and apparatuses are provided for epitaxial single crystalline silicon growth for a horizontal access device. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes selectively removing first portions of the semiconductor material from the second vertical openings to form horizontal openings with a remaining second portion of the semiconductor material at a distal end of the horizontal openings from the second vertical openings, and epitaxially growing single crystalline silicon within the horizontal openings from the distal end of the horizontal openings toward the second vertical openings to fill the horizontal openings.
    Type: Application
    Filed: March 28, 2022
    Publication date: July 14, 2022
    Inventors: Armin Saeedi Vahdat, Gurtej S. Sandhu, Scott E. Sills, Si-Woo Lee, John A. Smythe, III
  • Publication number: 20220189952
    Abstract: A semiconductor device includes a stack structure comprising decks. Each deck of the stack structure comprises a memory element level comprising memory elements and control logic level in electrical communication with the memory element level, the control logic level comprising a first subdeck structure comprising a first number of transistors comprising a P-type channel region or an N-type channel region and a second subdeck structure comprising a second number of transistors comprising the other of the P-type channel region or the N-type channel region overlying the first subdeck structure. Related semiconductor devices and methods of forming the semiconductor devices are disclosed.
    Type: Application
    Filed: January 5, 2022
    Publication date: June 16, 2022
    Inventors: Kurt D. Beigel, Scott E. Sills
  • Patent number: 11353206
    Abstract: A solid state lighting (SSL) with a solid state emitter (SSE) having thermally conductive projections extending into an air channel, and methods of making and using such SSLs. The thermally conductive projections can be fins, posts, or other structures configured to transfer heat into a fluid medium, such as air. The projections can be electrical contacts between the SSE and a power source. The air channel can be oriented generally vertically such that air in the channel warmed by the SSE flows upward through the channel.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: June 7, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Patent number: 11335788
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a transistor including a source contact, a drain contact, and a channel region including an oxide semiconductor material as the channel material. At least one of the drain contact or the source contact includes a conductive material, such as ruthenium, to reduce the Schottky effects at the interface with the channel material.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: May 17, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Scott E. Sills
  • Patent number: 11335775
    Abstract: Some embodiments include a transistor having an active region containing semiconductor material. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The active region has a first region, a third region offset from the first region, and a second region between the first and third regions. A gating structure is operatively adjacent to the second region. A first carrier-concentration-gradient is within the first region, and a second carrier-concentration-gradient is within the third region. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: May 17, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Srinivas Pulugurtha, Jaydip Guha, Scott E. Sills, Yi Fang Lee
  • Patent number: 11329133
    Abstract: Some embodiments include an integrated assembly having a gate material, an insulative material adjacent the gate material, and a semiconductor oxide adjacent the insulative material. The semiconductor oxide has a channel region proximate the gate material and spaced from the gate material by the insulative material. An electric field along the gate material induces carrier flow within the channel region, with the carrier flow being along a first direction. The semiconductor oxide includes a grain boundary having a portion which extends along a second direction that crosses the first direction of the carrier flow. In some embodiments, the semiconductor oxide has a grain boundary which extends along the first direction and which is offset from the insulative material by an intervening portion of the semiconductor oxide. The carrier flow is within the intervening region and substantially parallel to the grain boundary. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: May 10, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yi Fang Lee, Isamu Asano, Ramanathan Gandhi, Scott E. Sills
  • Patent number: 11329051
    Abstract: Systems, methods and apparatus are provided for a three-node access device in vertical three-dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial material to form a vertical stack. Forming a plurality of first vertical openings to form elongated vertical, pillar columns with sidewalls in the vertical stack. Conformally depositing a gate dielectric in the plurality of first vertical openings. Forming a conductive material on the gate dielectric. Removing portions of the conductive material to form a plurality of separate, vertical access lines. Repairing a first side of the gate dielectric exposed where the conductive material was removed. Forming a second vertical opening to expose sidewalls adjacent a first region of the sacrificial material.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: May 10, 2022
    Assignee: Micron Technology, Inc.
    Inventors: John A. Smythe, III, Gurtej S. Sandhu, Armin Saeedi Vahdat, Si-Woo Lee, Scott E. Sills
  • Publication number: 20220109008
    Abstract: Some embodiments include an integrated assembly which includes a base structure. The base structure includes a series of conductive structures which extend along a first direction. The conductive structures have steps which alternate with recessed regions along the first direction. Pillars of semiconductor material are over the steps. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The semiconductor material may be semiconductor oxide in some applications. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: October 2, 2020
    Publication date: April 7, 2022
    Inventors: Scott E. Sills, Yi Fang Lee, Kevin J. Torek
  • Publication number: 20220102539
    Abstract: Some embodiments include an integrated assembly having a conductive structure, an annular structure extending through the conductive structure, and an active-material-structure lining an interior periphery of the annular structure. The annular structure includes dielectric material. The active-material-structure includes two-dimensional-material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: Micron Technology, Inc.
    Inventors: David K. Hwang, John F. Kaeding, Richard J. Hill, Scott E. Sills
  • Publication number: 20220102384
    Abstract: Systems, methods, and apparatuses are provided for epitaxial single crystalline silicon growth for memory arrays. One example method includes forming logic circuitry on a silicon substrate in a first working surface and depositing an isolation material on the first working surface to encapsulate the logic circuitry and to form a second working surface above the first working surface. Further, the example method includes etching the isolation material to form a vertical opening through the isolation material and epitaxially growing single crystalline silicon from the silicon substrate and horizontally on the second working surface in a first, a second, and a third direction to cover the second working surface. The example method further includes removing a portion of the epitaxially grown single crystalline silicon to partition distinct and separate third working surface areas in which to form memory cell components and forming storage nodes above the memory cell components.
    Type: Application
    Filed: September 2, 2021
    Publication date: March 31, 2022
    Inventors: Glen H. Walters, John A. Smythe III, Scott E. Sills, John F. Kaeding
  • Publication number: 20220102356
    Abstract: Systems, methods, and apparatuses are provided for epitaxial single crystalline silicon growth for a horizontal access device. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes selectively removing first portions of the semiconductor material from the second vertical openings to form horizontal openings with a remaining second portion of the semiconductor material at a distal end of the horizontal openings from the second vertical openings, and epitaxially growing single crystalline silicon within the horizontal openings from the distal end of the horizontal openings toward the second vertical openings to fill the horizontal openings.
    Type: Application
    Filed: September 29, 2020
    Publication date: March 31, 2022
    Inventors: Armin Saeedi Vahdat, Gurtej S. Sandhu, Scott E. Sills, Si-Woo Lee, John A. Smythe III
  • Patent number: 11289491
    Abstract: Systems, methods, and apparatuses are provided for epitaxial single crystalline silicon growth for a horizontal access device. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes selectively removing first portions of the semiconductor material from the second vertical openings to form horizontal openings with a remaining second portion of the semiconductor material at a distal end of the horizontal openings from the second vertical openings, and epitaxially growing single crystalline silicon within the horizontal openings from the distal end of the horizontal openings toward the second vertical openings to fill the horizontal openings.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, Gurtej S. Sandhu, Scott E. Sills, Si-Woo Lee, John A. Smythe, III
  • Publication number: 20220077149
    Abstract: A two transistor-one capacitor memory cell comprises first and second transistors laterally displaced relative one another. A capacitor is above the first and second transistors. The capacitor comprises a conductive first capacitor node directly above and electrically coupled to a first node of the first transistor. A conductive second capacitor node is directly above the first and second transistors and is electrically coupled to a first node of the second transistor. A capacitor insulator is between the first and second capacitor nodes. The second capacitor node comprises an elevationally-extending conductive pillar directly above the first node of the second transistor. The conductive pillar has an elevationally outer portion that is of four-sided diamond shape in horizontal cross-section. Other memory cells, including arrays of memory cells are disclosed as are methods.
    Type: Application
    Filed: November 16, 2021
    Publication date: March 10, 2022
    Applicant: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Publication number: 20220077000
    Abstract: Some embodiments include an assembly having a CMOS tier. The CMOS tier includes a PMOS deck and an NMOS deck, with the decks being vertically offset relative to one another. The PMOS deck has p-channel transistors which are substantially identical to one another, and the NMOS deck has n-channel transistors which are substantially identical to one another. An insulative region is between the PMOS deck and the NMOS deck. The CMOS tier has one or more circuit components which include one or more of the n-channel transistors coupled with one or more of the p-channel transistors through one or more conductive interconnects extending through the insulative region. Some embodiments include methods of forming assemblies to comprise one or more CMOS tiers.
    Type: Application
    Filed: November 22, 2021
    Publication date: March 10, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Scott E. Sills, Kurt D. Beigel
  • Publication number: 20220069082
    Abstract: Some embodiments include a transistor having an active region containing semiconductor material. The semiconductor material includes at least one element selected from Group 13 of the periodic table in combination with at least one element selected from Group 16 of the periodic table. The active region has a first region, a third region offset from the first region, and a second region between the first and third regions. A gating structure is operatively adjacent to the second region. A first carrier-concentration-gradient is within the first region, and a second carrier-concentration-gradient is within the third region. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: November 19, 2020
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Srinivas Pulugurtha, Jaydip Guha, Scott E. Sills, Yi Fang Lee