Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

Abstract: Methods for fabricating semiconductor devices are provided including forming a stacked structure including a first mold layer and a second mold layer on a substrate; forming a first photoresist pattern on the stacked structure; etching the second mold layer using the first photoresist pattern as a mask; forming a second photoresist pattern by etching a portion of the first photoresist pattern; measuring a first fringe signal generated by an interference phenomenon between first reflected lights reflected from the first photoresist pattern; forming a stepped structure by etching the second mold layer and the first mold layer which is exposed, using the second photoresist pattern as a mask; measuring a second fringe signal generated by an interference phenomenon between second reflected lights reflected from the second mold layer; calculating a third fringe signal by summing the first fringe signal and the second fringe signal; calculating and a first etch rate of an upper surface of the first photoresist patte

Abstract: The present disclosure relates to an optical sheet having improved optical properties and minimized surface spots. According to one aspect of the present disclosure, provided is an optical sheet comprising: a first prism sheet which has a plurality of prisms parallel in a first direction formed on one surface thereof; and a diffusion sheet which is positioned at the surface side into which light of the first prism sheet is incident and has a plurality of protrusions formed on the surface facing the first prism sheet.

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

Abstract: Disclosed herein are a microwave probe capable of precisely detecting a plasma state in a plasma process, a plasma monitoring system including the probe, and a method of fabricating a semiconductor device using the system. The microwave probe includes a body extending in one direction and a head which is connected to one end of the body and has a flat plate shape. In addition, in the plasma process, the microwave probe is non-invasively coupled to a chamber such that a surface of the head contacts an outer surface of a viewport of the chamber, and the microwave probe applies a microwave into the chamber through the head and receives signals generated inside the chamber through the head.

Abstract: Disclosed herein are a microwave probe capable of precisely detecting a plasma state in a plasma process, a plasma monitoring system including the probe, and a method of fabricating a semiconductor device using the system. The microwave probe includes a body extending in one direction and a head which is connected to one end of the body and has a flat plate shape. In addition, in the plasma process, the microwave probe is non-invasively coupled to a chamber such that a surface of the head contacts an outer surface of a viewport of the chamber, and the microwave probe applies a microwave into the chamber through the head and receives signals generated inside the chamber through the head.

Abstract: Disclosed herein are a microwave probe capable of precisely detecting a plasma state in a plasma process, a plasma monitoring system including the probe, and a method of fabricating a semiconductor device using the system. The microwave probe includes a body extending in one direction and a head which is connected to one end of the body and has a flat plate shape. In addition, in the plasma process, the microwave probe is non-invasively coupled to a chamber such that a surface of the head contacts an outer surface of a viewport of the chamber, and the microwave probe applies a microwave into the chamber through the head and receives signals generated inside the chamber through the head.

Abstract: The present invention relates to a system for generating a vision image from the viewpoint of an agent in an augmented reality environment, a method thereof, and a recording medium in which a program for implementing the method is recorded. The invention provides a vision image information storage system comprising: a vision image generator which extracts visual objects from an augmented reality environment based on a predetermined agent, and generates a vision image from the viewpoint of the agent; and an information storage unit which evaluates the objects included in the generated vision image based on a predetermined purpose, and stores information on the evaluated objects.

Abstract: The present invention concerns an enhanced-image generation system and method which responds adaptively to changes in conditions in real space or virtual space. The enhanced-image generation system according to the present invention comprises: a conditions-judging unit for judging conditions on the basis of conditions data associated with actual objects and conditions data associated with virtual objects; an operational-parameter generating unit for generating operational parameters for a responsive agent in accordance with the judged conditions; and an enhanced-image generating unit for generating an enhanced image through the use of agent operational parameters and an image relating to an actual object.

Abstract: The present disclosure provides an augmented reality mobile communication device and a method and system thereof, which can provide digital content items to individual users by reflecting a user preference associated with user circumstances in the provision of augmented reality. The augmented reality mobile communication device includes: a context inference unit that receives sensory information and predicts a user context regarding a user of a mobile communication device based on the sensory information; a transmission unit that transmits user context data to a server; a receiving unit that receives a personalized content item from the server, the personalized content item being generated based on user profile data and user preference data corresponding to user context data; and an augmented reality content renderer that overlays the received personalized content item on an image captured by a camera.

Abstract: The present invention relates to a system for generating a vision image from the viewpoint of an agent in an augmented reality environment, a method thereof, and a recording medium in which a program for implementing the method is recorded. The invention provides a vision image information storage system comprising: a vision image generator which extracts visual objects from an augmented reality environment based on a predetermined agent, and generates a vision image from the viewpoint of the agent; and an information storage unit which evaluates the objects included in the generated vision image based on a predetermined purpose, and stores information on the evaluated objects.

Abstract: The invention provides an anion-deficient lithium transition-metal phosphate as an electrode-active material, which is represented by the chemical formula Li1?xM(PO4)1?y (0?x?0.15, 0?y?0.05). The invention provides a method for preparing said Li1?xM(PO4)1?y, which comprises preparing a precursor of lithium transition-metal phosphate; mixing said precursor with water under reaction conditions of 200˜700 and 180˜550 bar to produce an anion-deficient lithium transition-metal phosphate; and calcining, or granulating and calcining the resultant compound. The invention also provides electrochemical devices employing said Li1?xM(PO4)1?y as an electrode-active material.

Abstract: The present invention concerns an enhanced-image generation system and method which responds adaptively to changes in conditions in real space or virtual space. The enhanced-image generation system according to the present invention comprises: a conditions-judging unit for judging conditions on the basis of conditions data associated with actual objects and conditions data associated with virtual objects; an operational-parameter generating unit for generating operational parameters for a responsive agent in accordance with the judged conditions; and an enhanced-image generating unit for generating an enhanced image through the use of agent operational parameters and an image relating to an actual object.

Abstract: An unburied hydraulic door hinge system for automatically closing a door is directly mounted on a bottom corner of a door. Since the unburied hydraulic hinge system can be installed on the bottom corner of the door, it does not damage the aesthetic appearance of a transparent glass door such as a reinforced glass door, and is very easy to install and repair because it is not buried. From the maintenance point of view, the worker can easily gain access thereto because the split-type mounting plates can be quickly and easily separated. A hydraulic cylinder and a rotating drive mechanism, having a simplified structure and operation, not only improve the durability and lifespan of the hydraulic hinge system but also provide the possibility of mass production as well as production cost saving. Consequently, the hydraulic door hinge system has high economical efficiency.