Patents by Inventor Sean D. Burns

Sean D. Burns has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Graded spin-on organic antireflective coating for photolithography
    Publication number: 20080008955
    Abstract: An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer.
    Type: Application
    Filed: June 23, 2006
    Publication date: January 10, 2008
    Applicant: International Business Machines Corporation
    Inventors: Colin J. Brodsky, Sean D. Burns, Dario L. Goldfarb, Michael Lercel, David R. Medeiros, Dirk Pfeiffer, Daniel P. Sanders, Steven A. Scheer, Libor Vyklicky