Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: A cooling assembly includes a first subassembly and a second subassembly. The first subassembly is coupled to a showerhead of a substrate processing system. The first subassembly including a plurality of passages proximate to and in thermal communication with the showerhead. The second subassembly is removably coupled to the first subassembly. The second subassembly includes a plurality of protrusions that align with the plurality of passages, respectively.

Abstract: Multiple single plenum and dual plenum showerhead designs are disclosed. In the designs, pillars are disposed in each plenum to increase solidity of the plenums to provide improved axial heat conduction through the showerheads. The heat conduction is further improved by providing solid and substantially conical backplates.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: Showerheads for semiconductor processing equipment are disclosed that include various features designed to promote thermal control of the showerhead in high-temperature applications.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: A faceplate of a showerhead has a bottom side that faces a plasma generation region and a top side that faces a plenum into which a process gas is supplied during operation of a substrate processing system. The faceplate includes apertures formed through the bottom side and openings formed through the top side. Each of the apertures is formed to extend through a portion of an overall thickness of the faceplate to intersect with at least one of the openings to form a corresponding flow path for process gas through the faceplate. Each of the apertures has a cross-section that has a hollow cathode discharge suppression dimension in at least one direction. Each of the openings has a cross-section that has a smallest cross-sectional dimension that is greater than the hollow cathode discharge suppression dimension.

Abstract: Embodiments of a touch-sensitive display device are disclosed herein. According to a first aspect, a touch-sensitive display device comprises an electrode matrix including transmit electrodes and receive electrodes; a conductive plane; and a controller configured to cause a transmit electrode driver to drive the transmit electrodes in a mutual capacitance mode. The controller is configured to cause the transmit electrodes, the receive electrodes, and the conductive plane to be connected to a common charging voltage during charge periods of a self-capacitance mode; to, during discharge periods of the self-capacitance mode that alternate with the charge periods, cause the transmit electrodes, the receive electrodes, and the conductive plane to be connected to a common reference voltage; and to, during the discharge periods, cause the transmit electrodes and the receive electrodes to be coupled to receive circuitry configured to measure self-capacitance of the transmit electrodes and the receive electrodes.

Abstract: A display device comprises a sensing subsystem configured to detect one or more conditions associated with touch input to the display device occurring via a contact of an input object at a surface of the display device. The display device further comprises a microphone system configured to receive sound, a logic machine, and a storage machine holding instructions. The instructions are executable by the logic machine to determine, based on the one or more conditions, a time of the contact; determine, based on at least the time of the contact, some characteristics of the contact; and generate an audio output via applying a selective attenuation to process sound received into the microphone system. The selective attenuation is selected based on the sonic characteristics and applied over a time interval beginning at the determined time of contact.

Abstract: A display device includes an array of display pixels having display pixel apertures that are periodic along two orthogonal directions, x and y, at spatial frequencies fx and fy, respectively. An array of electrodes is overlaid on the array of display pixel apertures. The array of electrodes is comprised of a metal mesh having openings that are periodic along a first direction u at an angle ?u relative to x, and along a second direction v at an angle ?v relative to y, and at spatial frequencies fu and fv. The array of electrodes is overlaid on the array of display pixels such that the parameter set {?u, fx, fu, ?v, fy, fv} satisfies specific geometric criteria in order to minimize perceptible moiré patterns.

Abstract: An array of electrodes is comprised of a plurality of electrodes. Each electrode extends along a first direction X, and is periodically arrayed along a second direction Y perpendicular to X at a pitch pe. Each electrode further comprises a continuous periodic metal mesh having a square unit cell of edge length pm, the square unit cell having axes displaced by an oblique angle ? from X and Y The array is configured such that ?=arctan (a/b) and pm=n*pe/(m*sqrt(a2+b2)), where a, b, m, and n are positive integers. In this way, the electrodes repeat with a finite repeat length, while rendering the common edges of the repeating units visually imperceptible by a user.

Abstract: Embodiments of a touch-sensitive display device are disclosed herein. According to a first aspect, a touch-sensitive display device comprises an electrode matrix including transmit electrodes and receive electrodes; a conductive plane; and a controller configured to cause a transmit electrode driver to drive the transmit electrodes in a mutual capacitance mode. The controller is configured to cause the transmit electrodes, the receive electrodes, and the conductive plane to be connected to a common charging voltage during charge periods of a self-capacitance mode; to, during discharge periods of the self-capacitance mode that alternate with the charge periods, cause the transmit electrodes, the receive electrodes, and the conductive plane to be connected to a common reference voltage; and to, during the discharge periods, cause the transmit electrodes and the receive electrodes to be coupled to receive circuitry configured to measure self-capacitance of the transmit electrodes and the receive electrodes.

Abstract: A display device comprises a sensing subsystem configured to detect one or more conditions associated with touch input to the display device occurring via a contact of an input object at a surface of the display device. The display device further comprises a microphone system configured to receive sound, a logic machine, and a storage machine holding instructions. The instructions are executable by the logic machine to determine, based on the one or more conditions, a time of the contact; determine based on at least the time of the contact, sonic characteristics of the contact; and generate an audio output via applying a selective attenuation to process sound received into the microphone system. The selective attenuation is selected based on the sonic characteristics and applied over a time interval beginning at the determined time of contact.

Abstract: An electrode matrix comprises two orthogonal periodic arrays of mesh electrodes, in which each array comprises an opaque, electrically conductive periodic mesh divided by gaps into a plurality of electrodes. The meshes of the two arrays use an identical rhombus-shaped unit cell, with the unit cell of the first array arranged interstitially to that of the second array. The lengths of the diagonals of the unit cell are chosen to simultaneously minimize the visibility of moiré interactions with a particular display device, and to provide a geometric relationship between the electrode boundaries and the mesh that exactly repeats over a small-integer number of electrodes.

Abstract: Electrode matrices for capacitive touch-sensing are provided. An electrode matrix may include a plurality of electrodes separated by gaps. Each electrode may include a plurality of spaced apart conductors electrically connected at opposed ends by respective tie structures. The conductors of each electrode may be electrically bridged at intervals by a plurality of jumpers. The electrode matrix may further include a plurality of pseudo jumpers positioned within the gaps and configured to be non-conductive across their entire lengths.

Abstract: A display device includes an array of display pixels having display pixel apertures that are periodic along two orthogonal directions, x and y, at spatial frequencies fx and fy, respectively. An array of electrodes is overlaid on the array of display pixel apertures. The array of electrodes is comprised of a metal mesh having openings that are periodic along a first direction u at an angle ?u relative to x, and along a second direction v at an angle ?v relative to y, and at spatial frequencies fu and fv. The array of electrodes is overlaid on the array of display pixels such that the parameter set {?u, fx, fu, ?v, fy, fv} satisfies specific geometric criteria in order to minimize perceptible moiré patterns.

Abstract: A display device includes an array of display pixels having display pixel apertures that are periodic along two orthogonal directions, x and y, at spatial frequencies fx and fy, respectively. An array of electrodes is overlaid on the array of display pixel apertures. The array of electrodes is comprised of a metal mesh having openings that are periodic along a first direction u at an angle ?u relative to x, and along a second direction v at an angle ?v relative to y, and at spatial frequencies fu and fv. The array of electrodes is overlaid on the array of display pixels such that the parameter set {?u, fx, fu, ?v, fy, fv} satisfies specific geometric criteria in order to minimize perceptible moiré patterns.