Abstract: A typical sentence having a specific typical characteristic in the sentence is divided. A division target typical sentence is divided on the basis of a small clause definition. The sentence is divided where positions suitable for dividing the typical sentence based on the structure are expressed by a user. A small clause string including small clauses that serve as independent sentences is created after the division. The small clause string is compared to the structure patterns, and a structure pattern that is determined to match the small clause string is selected as a result of the typical sentence division.

Abstract: A translation memory system enabling the user to not only narrow down the view range of search result, but also view a surrounding context of a retrieved text. Stored parallel texts include sentence-class and segment-class parallel texts. Parallel texts relevant to a given input text are retrieved and subjected to calculation of match rates with respect to the input text. A downward link is then added to each retrieved sentence-class parallel text, while an upward link is added to each retrieved segment-class parallel text. A search result screen shows a best matching parallel text with an expand button and/or a shrink button. The expand button causes the current parallel text to be replaced with an upper-class parallel text pointed at by a corresponding upward link. The shrink button causes the current parallel text to be replaced with a lower-class parallel text pointed at by a corresponding downward link.

Abstract: An apparatus supports input of a translation text that corresponds to an original text, using a database in which original words in a first language and translation words respectively corresponding to the original words in a second language are associated. The apparatus includes an acquiring unit, a retrieving unit, a receiving unit, an extracting unit, and a displaying unit. The acquiring unit acquires plural original words by decomposing the original text. The retrieving unit retrieves translation words that are associated, in the database, with the acquired original words. The receiving unit receives input of a character string in the second language. The extracting unit extracts, from the retrieved translation words, translation words that match with and relate to the character string in the second language, as candidates. The displaying unit displays the candidates on a display.

Abstract: A part of a semiconductor-manufacturing apparatus is made of aluminum or an aluminum alloy having a surface coated with a ceramic coating, other than an anodic oxide coating, having a thickness of 10 ?m or more.

Abstract: A confirmation link edition unit receives a confirmation link specified by a user. A paragraph correlation unit respectively divides an English text and a Japanese text into a plurality of paragraphs according to the specified confirmation link. A segment correlation calculation unit correlates an English segment to a Japanese segment for each paragraph. A correlation edition unit provides a user the correspondence obtained by the segment correlation calculation unit, and edits the correspondence according to a correction instruction from the user if any.

Abstract: A method of self-cleaning a plasma reactor upon depositing a carbon-based film on a substrate a pre-selected number of times, includes: (i) exciting oxygen gas and/or nitrogen oxide gas to generate a plasma; and (ii) exposing to the plasma a carbon-based film accumulated on an upper electrode provided in the reactor and a carbon-based film accumulated on an inner wall of the reactor.

Abstract: A translator support device consists of a display device, an input device, and a main body to which these devices are connected. The main body has a CPU, a DRAM, a MD, and a HDD built-in. A translator support software is installed in the HDD. The translator support software consists of a program group and a data group that operate a computer as a device to support a translator. The translator support software includes a machine translation module, a dictionary database, a translation-memory-retrieval module, and a translation example database. When a translated phrase displayed on the display device is corrected, the translator support device retrieves units that include the correction portion from the database, reflects the correction to each of all the retrieved units.

Abstract: When it accepts an input sentence, the present apparatus divides the input sentence into substrings through morpheme analysis and obtains a candidate word group for translation of the substrings from a machine translation dictionary. It then obtains information on occurrence of each candidate word in the candidate word group within a bilingual example sentence database and calculates their priorities based on the occurrence information. Then, it grants priority as translation to each of the candidate words to generate a prioritized candidate word group and sorts the candidate words in descending order of priority for output.

Abstract: An interface unit issues input/output instructions regarding an input of a translation target sentence, an output of a translated sentence, and a translation control. A machine translating apparatus translates a document in a certain language into a document in another language. A translation memory device translates a sentence by searching an original/translation database in which sentences in a certain language and original/translation sentences in another language corresponding thereto have been accumulated. A data compatible processing unit makes original/translation information translated by the machine translating apparatus and original/translation information translated by the translation memory device common, thereby enabling them to be fetched mutually as original/translation information.

Abstract: An apparatus for cleaning a CVD apparatus that can efficiently remove a by-product such as SiO2 or Si3N4 stuck and deposited onto the surface of an internal wall, an electrode, or the like in a reaction chamber in a film forming process, and a method for cleaning a CVD apparatus. A control monitors luminous intensity data of an F radical in a reaction chamber by optical emission spectroscopy and compares the data with calibrated prestored luminous intensity data, and ends cleaning after a predetermined time passes from reaching a luminous intensity saturation point. Furthermore, concentration data of SiF4 in a gas discharged from the reaction chamber are monitored by a Fourier transform infrared spectrometry and compared with prestored concentration data of SiF4 to decide that the predetermined time has passed when a predetermined cleaning end point concentration is reached, thereby ending the cleaning.

Abstract: There is provided a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is stuck and deposited onto the surface of an internal wall, an electrode or the like in a CVD chamber in a film forming process, and furthermore, executing cleaning having a small damage over an upper electrode and a counter electrode stage (a lower electrode) and manufacturing a thin film of high quality, and a CVD apparatus cleaning method using the same. In a CVD apparatus cleaning method of introducing a cleaning gas to carry out plasma cleaning over an inside of a CVD chamber after forming a deposited film on a surface of a substrate, a frequency of an RF to be applied to an RF electrode is switched into a first frequency to be applied for forming a film and a second frequency to be applied when executing the plasma cleaning.

Abstract: A plurality of metal wire layers consisting of a first metal wire layer and a second metal wire layer are formed on a semiconductor substrate. A fluorinated silicate glass film serving as an interlayer metal dielectric film is formed between the first and second metal wire layers. A silicon nitride film serving as a protective insulation film is formed on the fluorinated silicate glass film layer. An adhesive layer made of, for example, a P-SiO film, P-SiON film, or PE-SiO film, is formed between the fluorinated silicate glass film and the silicon nitride film.

Abstract: A confirmation link edition unit receives a confirmation link specified by a user. A paragraph correlation unit respectively divides an English text and a Japanese text into a plurality of paragraphs according to the specified confirmation link. A segment correlation calculation unit correlates an English segment to a Japanese segment for each paragraph. A correlation edition unit provides a user the correspondence obtained by the segment correlation calculation unit, and edits the correspondence according to a correction instruction from the user if any.

Abstract: A plurality of metal wire layers consisting of a first metal wire layer and a second metal wire layer are formed on a semiconductor substrate. A fluorinated silicate glass film serving as an interlayer metal dielectric film is formed between the first and second metal wire layers. A silicon nitride film serving as a protective insulation film is formed on the fluorinated silicate glass film layer. An adhesive layer made of, for example, a P—SiO film, P—SiON film, or PE-SiO film, is formed between the fluorinated silicate glass film and the silicon nitride film.

Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step. Furthermore, it is an object to provide a cleaning method in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced. An energy is applied to a fluorine compound to react the fluorine compound, thereby generating a fluorine gas component and a component other than the fluorine gas component. Furthermore, the fluorine gas component and the component other than the fluorine gas component which are generated are separated from each other so that the fluorine gas component is separated and refined.

Abstract: A translation support device for supporting a process of translating an original sentence in a language into another language, comprising a partial expression setting unit, a dummy head setting unit, an original sentence replacement unit, a translated sentence obtaining unit, and a translated sentence replacement unit.

Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber and the side wall of a piping of an exhaust path or the like at a film forming step, in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming can also be lessened and a cost can also be reduced.

Abstract: It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step, in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced.

Abstract: This system comprises a translation unit translating an inputted original sentence by selecting each translation word one by one from a plurality of translation words corresponding to each word composing the sentence and combining the selected translation words, a voice recognition unit selecting a translation word matching inputted pronunciation from a plurality of translation words that correspond to the word and have not been selected by the translation unit, and outputting the selected translation word as a result of the voice recognition, and a correction unit correcting the sentence translated by the translation unit, using the translation word outputted from the voice recognition unit.

Abstract: An interconnection is formed on a semiconductor substrate having a semiconductor element formed thereon. Next, a passivation film is formed on the semiconductor substrate including the interconnection. Further, a polyimide film, which is served as a buffer coating film, is formed on the passivation film. Further, the polyimide film is patterned. Next, the passivation film is subject to etching while the patterned polyimide film is taken as a mask. Next, a hardened layer, which is formed on the surface of the polyimide film as a result of etching, is removed through ashing process. Next, the semiconductor substrate after ashing process is cured so as to transform the polyimide film into imide.