Abstract: A nanowire device having a plurality of internal spacers and a method for forming said internal spacers are disclosed. In an embodiment, a semiconductor device comprises a nanowire stack disposed above a substrate, the nanowire stack having a plurality of vertically-stacked nanowires, a gate structure wrapped around each of the plurality of nanowires, defining a channel region of the device, the gate structure having gate sidewalls, a pair of source/drain regions on opposite sides of the channel region; and an internal spacer on a portion of the gate sidewall between two adjacent nanowires, internal to the nanowire stack. In an embodiment, the internal spacers are formed by depositing spacer material in dimples etched adjacent to the channel region. In an embodiment, the dimples are etched through the channel region. In another embodiment, the dimples are etched through the source/drain region.

Abstract: A nanowire device having a plurality of internal spacers and a method for forming said internal spacers are disclosed. In an embodiment, a semiconductor device comprises a nanowire stack disposed above a substrate, the nanowire stack having a plurality of vertically-stacked nanowires, a gate structure wrapped around each of the plurality of nanowires, defining a channel region of the device, the gate structure having gate sidewalls, a pair of source/drain regions on opposite sides of the channel region; and an internal spacer on a portion of the gate sidewall between two adjacent nanowires, internal to the nanowire stack. In an embodiment, the internal spacers are formed by depositing spacer material in dimples etched adjacent to the channel region. In an embodiment, the dimples are etched through the channel region. In another embodiment, the dimples are etched through the source/drain region.

Abstract: A semiconductor device may include a substrate; a plurality of semiconductor pillars disposed over the substrate and arranged in a first direction and a second direction crossing the first direction; an insulating layer pattern disposed between the substrate and the semiconductor pillars and extending in the second direction; a first conductive line disposed between the insulating layer pattern and the semiconductor pillars and extending in the second direction; a second conductive line formed over sidewalls of the semiconductor pillars and extending in the first direction; and a storage node disposed over each of the semiconductor pillars.

Abstract: A memory device includes a memory cell array including a plurality of memory cells; a peripheral circuit configured to perform a recovery operation of applying a recovery voltage to the memory cells for increasing a residual polarization of the memory cells and configured to perform a normal operation of applying a driving voltage to the memory cells for reading data from the memory cells or writing data into the memory cells; and a control logic configured to control, when powered up, the peripheral circuit to perform the recovery operation and then perform the normal operation.

Abstract: Described is an apparatus which comprises: a first layer comprising a semiconductor; a second layer comprising an insulating material, the second layer adjacent to the first layer; a third layer comprising a high-k insulating material, the third layer adjacent to the second layer; a fourth layer comprising a ferroelectric material, the fourth layer adjacent to the third layer; and a fifth layer comprising a high-k insulating material, the fifth layer adjacent to the fourth layer.

Abstract: A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor.

Abstract: Nanowire structures having wrap-around contacts are described. For example, a nanowire semiconductor device includes a nanowire disposed above a substrate. A channel region is disposed in the nanowire. The channel region has a length and a perimeter orthogonal to the length. A gate electrode stack surrounds the entire perimeter of the channel region. A pair of source and drain regions is disposed in the nanowire, on either side of the channel region. Each of the source and drain regions has a perimeter orthogonal to the length of the channel region. A first contact completely surrounds the perimeter of the source region. A second contact completely surrounds the perimeter of the drain region.

Abstract: Field effect transistors having a ferroelectric or antiferroelectric gate dielectric structure are described. In an example, an integrated circuit structure includes a semiconductor channel structure includes a monocrystalline material. A gate dielectric is over the semiconductor channel structure. The gate dielectric includes a ferroelectric or antiferroelectric polycrystalline material layer. A gate electrode has a conductive layer on the ferroelectric or antiferroelectric polycrystalline material layer, the conductive layer including a metal. A first source or drain structure is at a first side of the gate electrode. A second source or drain structure is at a second side of the gate electrode opposite the first side.

Abstract: Embodiments include an embedded dynamic random access memory (DRAM) device, a method of forming an embedded DRAM device, and a memory device. An embedded DRAM device includes a dielectric having a logic area and a memory area, and a trace and a via disposed in the logic area of dielectric. The embedded DRAM device further includes ferroelectric capacitors disposed in the memory area of dielectric, where each ferroelectric capacitor includes a first electrode, a ferroelectric layer, and a second electrode, and where the ferroelectric layer surrounds the first electrode of each ferroelectric capacitor and extends along a top surface of the dielectric in the memory area. The embedded DRAM device includes an etch stop layer above the dielectric. The second etch stop in the logic area may have a z-height that is approximately equal to a z-height of a top surface of the second etch stop in the memory area.

Abstract: A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor.

Abstract: Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.

Abstract: Vertical integration schemes and circuit elements architectures for area scaling of semiconductor devices are described. In an example, an inverter structure includes a semiconductor fin separated vertically into an upper region and a lower region. A first plurality of gate structures is included for controlling the upper region of the semiconductor fin. A second plurality of gate structures is included for controlling the lower region of the semiconductor fin. The second plurality of gate structures has a conductivity type opposite the conductivity type of the first plurality of gate structures.

Abstract: An integrated circuit structure comprises a substrate. An antiferroelectric gate oxide is above the substrate, the antiferroelectric gate oxide comprising a perovskite material. A gate electrode is over at least a portion of the gate oxide.

Abstract: Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.

Abstract: Vertical integration schemes and circuit elements architectures for area scaling of semiconductor devices are described. In an example, an inverter structure includes a semiconductor fin separated vertically into an upper region and a lower region. A first plurality of gate structures is included for controlling the upper region of the semiconductor fin. A second plurality of gate structures is included for controlling the lower region of the semiconductor fin. The second plurality of gate structures has a conductivity type opposite the conductivity type of the first plurality of gate structures.

Abstract: Described herein are ferroelectric (FE) memory cells that include transistors having gates with FE capacitors integrated therein. An example memory cell includes a transistor having a semiconductor channel material, a gate dielectric over the semiconductor material, a first conductor material over the gate dielectric, a FE material over the first conductor material, and a second conductor material over the FE material. The first and second conductor materials form, respectively, first and second capacitor electrodes of a capacitor, where the first and second capacitor electrodes are separated by the FE material (hence, a “FE capacitor”). Separating a FE material from a semiconductor channel material of a transistor with a layer of a gate dielectric and a layer of a first conductor material eliminates the FE-semiconductor interface that may cause endurance issues in some other FE memory cells.

Abstract: A method including forming a non-planar conducting channel of a multi-gate device on a substrate, the channel including a height dimension defined from a base at a surface of the substrate; modifying less than an entire portion of the channel; and forming a gate stack on the channel, the gate stack including a dielectric material and a gate electrode. An apparatus including a non-planar multi-gate device on a substrate including a channel including a height dimension defining a conducting portion and an oxidized portion and a gate stack disposed on the channel, the gate stack including a dielectric material and a gate electrode.

Abstract: A nanowire device having a plurality of internal spacers and a method for forming said internal spacers are disclosed. In an embodiment, a semiconductor device comprises a nanowire stack disposed above a substrate, the nanowire stack having a plurality of vertically-stacked nanowires, a gate structure wrapped around each of the plurality of nanowires, defining a channel region of the device, the gate structure having gate sidewalls, a pair of source/drain regions on opposite sides of the channel region; and an internal spacer on a portion of the gate sidewall between two adjacent nanowires, internal to the nanowire stack. In an embodiment, the internal spacers are formed by depositing spacer material in dimples etched adjacent to the channel region. In an embodiment, the dimples are etched through the channel region. In another embodiment, the dimples are etched through the source/drain region.

Abstract: A method including forming a fin of a nonplanar device on a substrate, the fin including a second layer between a first layer and a third layer; replacing the second layer with a dielectric material; and forming a gate stack on a channel region of the fin. An apparatus including a first multigate device on a substrate including a fin including a conducting layer on a dielectric layer, a gate stack disposed on the conducting layer in a channel region of the fin, and a source and a drain formed in the fin, and a second multigate device on the substrate including a fin including a first conducting layer and a second conducting layer separated by a dielectric layer, a gate stack disposed the first conducting layer and the second conducting layer in a channel region of the fin, and a source and a drain formed in the fin.

Abstract: Embodiments include a memory array and a method of forming the memory array. A memory array includes a first dielectric over first metal traces, where first metal traces extend along a first direction, second metal traces on the first dielectric, where second metal traces extend along a second direction perpendicular to the first direction, and third metal traces on the second dielectric, where third metal traces extend along the first direction. The memory array includes a ferroelectric capacitor positioned in a trench having sidewalls and bottom surface, where the trench has a depth defined from a top surface of first metal trace to the top surface of third metal trace. The memory array further includes an insulating sidewall, a first electrode, a ferroelectric, and a second electrode disposed in the trench, where the trench has a rectangular cylinder shape defined by the first, second, and third metal traces.