Patents by Inventor Selvaraj Palanisamy Chinnathambi

Selvaraj Palanisamy Chinnathambi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITION AND METHOD FOR POLISHING NICKEL-PHOSPHOROUS-COATED ALUMINUM HARD DISKS
    Publication number: 20090173717
    Abstract: The invention provides a chemical-mechanical polishing composition consisting essentially of flumed alumina, alpha alumina, silica, a nonionic surfactant, an additive compound selected from the group consisting of glycine, alanine, iminodiacetic acid, and maleic acid, hydrogen peroxide, and water. The invention further provides a method of chemically-mechanically polishing a substrate comprising contacting a substrate with a polishing pad and the chemical-mechanical polishing composition, moving the polishing pad and the polishing composition relative to the substrate, and abrading at least a portion of the substrate to polish the substrate.
    Type: Application
    Filed: January 8, 2008
    Publication date: July 9, 2009
    Applicant: Cabot Microelectronics Corporation
    Inventors: Selvaraj Palanisamy Chinnathambi, Ping-Ha Yeung, Brian Reiss