Patents by Inventor Seok-Pyo Song

Seok-Pyo Song has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming flowable dielectric layer in semiconductor device
    Publication number: 20050020093
    Abstract: The method for forming a flowable dielectric layer is employed to use a barrier layer on sidewalls of patterned flowable dielectrics, thereby preventing a bridge phenomenon between adjacent contact plugs.
    Type: Application
    Filed: December 19, 2003
    Publication date: January 27, 2005
    Inventors: Sang-Tae Ahn, Dong-Sun Sheen, Seok-Pyo Song