Abstract: A method of treating a substrate treats a substrate by using a substrate treating apparatus that includes a main supply line connected to a humidified gas supply line and a dry gas supply line, having a first region in which a first heater is installed, and a second region located downstream of the first region. The method includes a heating operation of heating the second region with the dry gas heated in the first region by supplying the dry gas into the main supply line in a state where the first heater is controlled to heat the first region; and a substrate treating operation of supplying the humidified gas into the main supply line after the heating operation and allowing the humidified gas to pass through the first region and the second region and to be supplied into the treatment space to treat the substrate disposed in the treatment space.

Abstract: Disclosed is a substrate processing method including: a substrate loading operation of loading a substrate into a processing space provided by a body; a heating operation of placing the substrate, which has been loaded into the processing space, on a heating chuck and heating the substrate; and an atmosphere changing operation of changing an atmosphere of the processing space, in which the atmosphere changing operation includes: a gas discharging operation of injecting atmosphere changing gas in a state where the substrate is located closer to a baffle than in the heating operation, in which the baffle is provided on a top side of the heating chuck to face the heating chuck and injects the atmosphere changing gas; and a substrate lowering operation of lowering and placing the substrate onto the heating chuck while maintaining the injection of the atmosphere changing gas.

Abstract: A method of training a memory device is provided. In first to third DCA training steps, a score for each of first to third DCA code combinations is calculated based on an eye window size of a data signal, and in response to a tie occurring among scores, a DCA code combination is selected based on the sum of an even-eye window minimum value and an odd-eye window minimum value of the data signal.

Abstract: A memory module includes a plurality of memory devices. Each of the plurality of memory devices includes a plurality of data input/output pads, a plurality of on-die termination (ODT) circuits each including one or more resistors, a plurality of transceiver circuits each including one or more transmission drivers and one or more reception buffers, and a plurality of equalizer circuits each including one or more inductors. Each of the plurality of equalizer circuits is connected to one of the plurality of data input/output pads, one of the plurality of ODT circuits, and one of the plurality of transceiver circuits. Each of the one or more transmission drivers drives a node of one of the plurality of data input/output pads. Inductances of the one or more inductors have individual values which are based on a driver strength of each of the one or more transmission drivers.

Abstract: Disclosed are an apparatus and a method for treating a substrate, and more particularly, an apparatus and a method for heat treating a substrate. The apparatus includes: a heating unit provided in the inner space, and providing a treatment space in which a heating process of the substrate is performed; a transfer plate positioned within the inner space, and movable between an inner position for loading the substrate into the treatment space or for unloading the substrate from the treatment space and an outer position provided outside the heating unit; and a gas injection unit positioned within the inner space, and for injecting atmosphere gas toward the substrate at the outer position.

Abstract: Disclosed are a substrate processing apparatus and method in which in a heat-treatment process such as a baking process, a surrounding humidity environment may be precisely controlled based on photoresist for extreme ultraviolet (EUV) applied on the substrate. The substrate processing apparatus includes a housing having a treatment space defined therein; a support unit for supporting, thereon, a substrate received in the treatment space; and a gas supply unit configured to alternately supply a first gas and a second gas into the treatment space in response to photoresist (PR) for extreme ultraviolet (EUV) applied onto the substrate.

Abstract: A memory device including a parity check circuit and a mask circuit may be provided. The parity check circuit may perform parity check on data sampled according to a data strobe signal, which does not include a post-amble. The mask circuit may generate a parity error signal based on results of the parity check, and output the parity error signal during a time period determined according to a burst length of the data.

Abstract: A semiconductor memory device includes first bumps positioned along a first direction; second bumps positioned in parallel to the first bumps along the first direction; first registers connected with the first bumps; and second registers connected with the second bumps. The first registers and the second registers are sequentially connected and form a shift register.

Abstract: A memory package includes a plurality of memory chips stacked on a package substrate. A logic chip is disposed between the plurality of memory chips and the package substrate. The logic chip is configured to control the plurality of memory chips through a plurality of vias passing through the plurality of memory chips. An intermediate chip is connected to the plurality of vias. The intermediate chip is disposed between the plurality of memory chips and the logic chip, and is configured to select at least a subset of the plurality of vias as a data transmission path between the logic chip and the plurality of memory chips, based on a data transmission rate of the logic chip.

Abstract: Disclosed are a method and a device for detecting a short circuit between adjacent micro-bumps. The method includes setting outputs of a pull-up driver and a pull-down driver of a data output circuit connected with a micro-bump to be suitable for a test type and determining whether a short circuit is generated.

Abstract: A semiconductor memory device includes first bumps positioned along a first direction; second bumps positioned in parallel to the first bumps along the first direction; first registers connected with the first bumps; and second registers connected with the second bumps. The first registers and the second registers are sequentially connected and form a shift register.

Abstract: A memory package includes a plurality of memory chips stacked on a package substrate. A logic chip is disposed between the plurality of memory chips and the package substrate. The logic chip is configured to control the plurality of memory chips through a plurality of vias passing through the plurality of memory chips. An intermediate chip is connected to the plurality of vias. The intermediate chip is disposed between the plurality of memory chips and the logic chip, and is configured to select at least a subset of the plurality of vias as a data transmission path between the logic chip and the plurality of memory chips, based on a data transmission rate of the logic chip.

Abstract: A memory device including a parity check circuit and a mask circuit may be provided. The parity check circuit may perform parity check on data sampled according to a data strobe signal, which does not include a post-amble. The mask circuit may generate a parity error signal based on results of the parity check, and output the parity error signal during a time period determined according to a burst length of the data.

Abstract: A memory device including a parity check circuit and a mask circuit may be provided. The parity check circuit may perform parity check on data sampled according to a data strobe signal, which does not include a post-amble. The mask circuit may generate a parity error signal based on results of the parity check, and output the parity error signal during a time period determined according to a burst length of the data.

Abstract: Disclosed are a method and a device for detecting a short circuit between adjacent micro-bumps. The method includes setting outputs of a pull-up driver and a pull-down driver of a data output circuit connected with a micro-bump to be suitable for a test type and determining whether a short circuit is generated.

Abstract: Disclosed are a method and a device for detecting a short circuit between adjacent micro-bumps. The method includes setting outputs of a pull-up driver and a pull-down driver of a data output circuit connected with a micro-bump to be suitable for a test type and determining whether a short circuit is generated.

Abstract: A delay circuit of a semiconductor memory device includes a delay chain, a first phase converter and a second phase converter. The delay chain is connected between an input terminal and an output terminal, includes 2N delay cells, and delays a first intermediate signal to generate a second intermediate signal. The first phase converter is connected to the input terminal, and provides the first intermediate signal to the delay chain, wherein the first intermediate signal is generated by inverting a phase of an input signal or by maintaining the phase of the input signal in response to a control signal. The second phase converter is connected to the output terminal, and generates an output signal by inverting a phase of the second intermediate signal or by maintaining the phase of the second intermediate signal in response to the control signal.

Abstract: An input-output circuit includes a reception circuit and a register circuit. The reception circuit operates in accordance with a normal write protocol commonly in a normal write mode and a test write mode. The reception circuit receives a plurality of input signals to generate a plurality of latch signals. The register circuit generates a plurality of test result signals based on the latch signals in the test write mode. The input-output circuit may perform the multiple-input shift register (MISR) function in accordance with the normal write path and the normal write protocol. The MISR function may be performed efficiently without consideration of additional timing adjustment for the test write operation because the MISR function is performed under the same timing condition as the normal write operation.

Abstract: A memory device including an interposer including a first plurality of paths and a second plurality of paths, a first memory die attached to a first surface of the interposer, the first memory die including a first physical layer connected to the first plurality of paths, the first physical layer being attached to a first surface of the interposer, and a second memory die attached to a second surface of the interposer, the second memory die including a second physical layer connected to the second plurality of paths, the second physical layer being attached to a second surface of the interposer, the second physical layer not interfering with the first physical layer in a plan view may be provided.

Abstract: Provided is a memory device configured to perform a calibration operation without having a ZQ pin. The memory device includes a calibration circuit configured to generate a pull-up calibration code and a pull-down calibration code which termination of a data input/output pad for impedance matching in the data input/output pad is controlled. The calibration circuit performs a first calibration operation for trimming first and second reference resistors based on an external resistor to be connected to a pad, and a second calibration operation for generating the pull-up calibration code and the pull-down calibration code based on the trimmed second reference resistor.