Patents by Inventor Shahriar Mostarshed

Shahriar Mostarshed has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7951422
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors, as well as us of patterned substrates to grow oriented nanowires. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Grant
    Filed: December 20, 2006
    Date of Patent: May 31, 2011
    Assignee: Nanosys, Inc.
    Inventors: Yaoling Pan, Xiangfeng Duan, Robert S. Dubrow, Jay Goldman, Shahriar Mostarshed, Chunming Niu, Linda T. Romano, David P. Stumbo, Alice Fischer-Colbrie, Vijendra Sahi, Virginia Robbins
  • Patent number: 7871870
    Abstract: Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate.
    Type: Grant
    Filed: February 9, 2010
    Date of Patent: January 18, 2011
    Assignee: Nanosys, Inc.
    Inventors: Shahriar Mostarshed, Jian Chen, Francisco A. Leon, Yaoling Pan, Linda T. Romano
  • Publication number: 20100167512
    Abstract: Methods of doping nanostructures, such as nanowires, are disclosed. The methods provide a variety of approaches for improving existing methods of doping nanostructures. The embodiments include the use of a sacrificial layer to promote uniform dopant distribution within a nanostructure during post-nanostructure synthesis doping. In another embodiment, a high temperature environment is used to anneal nanostructure damage when high energy ion implantation is used. In another embodiment rapid thermal annealing is used to drive dopants from a dopant layer on a nanostructure into the nanostructure. In another embodiment a method for doping nanowires on a plastic substrate is provided that includes depositing a dielectric stack on a plastic substrate to protect the plastic substrate from damage during the doping process.
    Type: Application
    Filed: March 9, 2010
    Publication date: July 1, 2010
    Applicant: NANOSYS, INC.
    Inventors: Yaoling Pan, Jian Chen, Francisco Leon, Shahriar Mostarshed, Linda T. Romano, Vijendra Sahi, David P. Stumbo
  • Publication number: 20100144103
    Abstract: Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate.
    Type: Application
    Filed: February 9, 2010
    Publication date: June 10, 2010
    Applicant: NANOSYS, INC.
    Inventors: Shahriar Mostarshed, Jian Chen, Francisco Leon, Yaoling Pan, Linda T. Romano
  • Patent number: 7701014
    Abstract: Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate.
    Type: Grant
    Filed: October 2, 2008
    Date of Patent: April 20, 2010
    Assignee: Nanosys, Inc.
    Inventors: Shahriar Mostarshed, Jian Chen, Francisco Leon, Yaoling Pan, Linda T. Romano
  • Patent number: 7666791
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrificial growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Grant
    Filed: August 15, 2007
    Date of Patent: February 23, 2010
    Assignee: Nanosys, Inc.
    Inventors: Shahriar Mostarshed, Linda T. Romano
  • Patent number: 7576550
    Abstract: A parametric test system is for testing devices in dice in a semiconductor wafer, each die having a plurality of pads for electrically connecting to the device in the die. A tester of the system has a plurality of input/output lines for providing and receiving electrical signals during a device test. Multiplexer circuitry of the test system includes a plurality of networks of automated switches. The multiplexer circuitry is configured to receive electrical signals on the input lines from the tester and to provide the electrical signals to a wafer prober, wherein the multiplexer circuitry is configured to restrict how the electrical signals can be provided to the networks of automated switches. As a result of the multiplexer being configured to restrict how the electrical signals can be provided to the networks of automated switches, the configuration of the networks of automated switches can be simplified.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: August 18, 2009
    Assignee: Qualitau, Inc.
    Inventors: Shahriar Mostarshed, Michael L. Anderson
  • Patent number: 7560366
    Abstract: The present invention provides processes for producing horizontal nanowires that are separate and oriented and allow for processing directly on a substrate material. The nanowires grow horizontally by suppressing vertical growth from a nucleating particle, such as a metal film. The present invention also provides for horizontal nanowire growth from nucleating particles on the edges of nanometer-sized steps. Following processing, the nanowires can be removed from the substrate and transferred to other substrates. The present invention also provides for nanowires produced by these processes and electronic devices comprising these nanowires. The present invention also provides for nanowire growth apparatus that provide horizontal nanowires, and processes for producing nanowire devices.
    Type: Grant
    Filed: December 1, 2005
    Date of Patent: July 14, 2009
    Assignee: Nanosys, Inc.
    Inventors: Linda T. Romano, Shahriar Mostarshed
  • Patent number: 7511517
    Abstract: A semi-automatic multiplexing system for automated semiconductor wafer testing employs a jumper block for each device type in the semiconductor wafer to be tested, each jumper block having inputs for receiving a test input/output line, a plurality of block contacts corresponding to pads of a device to be tested, and manually set connectors or jumper cables for selectively interconnecting jumper block inputs to block contacts. A multiplexer is then used for selectively connecting tester input/output lines to the jumper blocks, thereby reducing the number of relays required for connecting test signals to the devices in the semiconductor wafer.
    Type: Grant
    Filed: November 8, 2005
    Date of Patent: March 31, 2009
    Assignee: QualiTau, Inc.
    Inventors: Shahriar Mostarshed, Michael L. Anderson
  • Publication number: 20090050974
    Abstract: Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate.
    Type: Application
    Filed: October 2, 2008
    Publication date: February 26, 2009
    Applicant: NANOSYS, INC.
    Inventors: Shahriar Mostarshed, Jian Chen, Francisco Leon, Yaoling Pan, Linda T. Romano
  • Patent number: 7473943
    Abstract: Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: January 6, 2009
    Assignee: Nanosys, Inc.
    Inventors: Shahriar Mostarshed, Jian Chen, Francisco Leon, Yaoling Pan, Linda T. Romano
  • Publication number: 20080238451
    Abstract: A parametric test system is for testing devices in dice in a semiconductor wafer, each die having a plurality of pads for electrically connecting to the device in the die. A tester of the system has a plurality of input/output lines for providing and receiving electrical signals during a device test. Multiplexer circuitry of the test system includes a plurality of networks of automated switches. The multiplexer circuitry is configured to receive electrical signals on the input lines from the tester and to provide the electrical signals to a wafer prober, wherein the multiplexer circuitry is configured to restrict how the electrical signals can be provided to the networks of automated switches. As a result of the multiplexer being configured to restrict how the electrical signals can be provided to the networks of automated switches, the configuration of the networks of automated switches can be simplified.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Applicant: QUALITAU, INC.
    Inventors: Shahriar Mostarshed, Michael L. Anderson
  • Publication number: 20080072818
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrificial growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Application
    Filed: August 15, 2007
    Publication date: March 27, 2008
    Applicant: NANOSYS, INC.
    Inventors: Shahriar Mostarshed, Linda Romano
  • Publication number: 20080038520
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors, as well as us of patterned substrates to grow oriented nanowires. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Application
    Filed: December 20, 2006
    Publication date: February 14, 2008
    Applicant: NANOSYS, Inc.
    Inventors: Yaoling Pan, Xiangfeng Duan, Robert Dubrow, Jay Goldman, Shahriar Mostarshed, Chunming Niu, Linda Romano, David Stumbo, Alice Fischer-Colbrie, Vijendra Sahi, Virginia Robbins
  • Patent number: 7273732
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Grant
    Filed: July 21, 2006
    Date of Patent: September 25, 2007
    Assignee: Nanosys, Inc.
    Inventors: Yaoling Pan, Xiangfeng Duan, Robert S. Dubrow, Jay L. Goldman, Shahriar Mostarshed, Chunming Niu, Linda T. Romano, Dave Stumbo
  • Publication number: 20070103176
    Abstract: A semi-automatic multiplexing system for automated semiconductor wafer testing employs a jumper block for each device type in the semiconductor wafer to be tested, each jumper block having inputs for receiving a test input/output line, a plurality of block contacts corresponding to pads of a device to be tested, and manually set connectors or jumper cables for selectively interconnecting jumper block inputs to block contacts. A multiplexer is then used for selectively connecting tester input/output lines to the jumper blocks, thereby reducing the number of relays required for connecting test signals to the devices in the semiconductor wafer.
    Type: Application
    Filed: November 8, 2005
    Publication date: May 10, 2007
    Inventors: Shahriar Mostarshed, Michael Anderson
  • Publication number: 20060255481
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Application
    Filed: July 21, 2006
    Publication date: November 16, 2006
    Applicant: Nanosys, Inc.
    Inventors: Yaoling Pan, Xiangfeng Duan, Robert Dubrow, Jay Goldman, Shahriar Mostarshed, Chunming Niu, Linda Romano, Dave Stumbo
  • Patent number: 7126361
    Abstract: A probe card is vertically mounted generally perpendicular to a wafer undergoing life tests in a heated environment to limit exposure of the probe card to heat from the wafer chuck. The probe card and probe head assembly are mounted on a support rail which has one or more channels for the flow of cool air to a probe head assembly and the probe card, while it shields the flex cable from the hot chuck. The cool air flow disrupts convective hot air flow upwards from the heated chuck to the probe card and probe head and facilitates cooling of the probe card and probe head.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: October 24, 2006
    Assignee: Qualitau, Inc.
    Inventors: Michael L. Anderson, Edward A. McCloud, Shahriar Mostarshed, Michael A. Casolo
  • Patent number: 7105428
    Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
    Type: Grant
    Filed: April 29, 2005
    Date of Patent: September 12, 2006
    Assignee: Nanosys, Inc.
    Inventors: Yaoling Pan, Xiangfeng Duan, Robert S. Dubrow, Jay L. Goldman, Shahriar Mostarshed, Chunming Niu, Linda T. Romano, Dave Stumbo
  • Publication number: 20060081886
    Abstract: Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate.
    Type: Application
    Filed: September 22, 2005
    Publication date: April 20, 2006
    Applicant: Nanosys, Inc.
    Inventors: Shahriar Mostarshed, Jian Chen, Francisco Leon, Yaoling Pan, Linda Romano