Abstract: Integrated active-matrix light emitting pixel arrays based displays and methods of fabricating the integrated displays are provided. An example method includes: forming multiple layers on a first substrate to form a light emitting structure, integrating the light emitting structure on the first substrate with a backplane device on a second substrate by connecting a first top layer of the light emitting structure with a second top layer of the backplane device, e.g., by using low temperature bonding, the backplane device including at least one backplane having pixel circuits, and after the integration, patterning the light emitting structure to form an array of light emitting elements each conductively coupled to respective pixel circuits to thereby form an array of active-matrix light emitting pixels. A pattern of different color phosphor or different size quantum dots materials can be deposited on the light emitting pixels to form an array of multi-color display pixels.

Abstract: Integrated active-matrix multi-color light emitting pixel arrays based displays and methods of fabricating the integrated displays are provided. An example integrated device includes a backplane device and different color light emitting diodes (LEDs) devices arranged in different height planar layers on the backplane device. The backplane device includes at least one backplane having a number of pixel circuits. Each LED device includes an array of LEDs each operable to emit light with a particular color and conductively coupled to respective pixel circuits in the backplane to form active-matrix LED sub-pixels. The different color LED sub-pixels form an array of active-matrix multi-color display pixels. Plug vias can be arranged in different planar layers to conductively couple upper-level LEDs to respective pixel circuits in respective regions over the backplane device. The plug vias can extend from an upper planar layer into a lower planar layer to fix the two planar layers together.

Abstract: Larger displays formed by multiple sub-displays, e.g., integrated light-emitting diode (LED) pixel array micro-displays, and methods of operating and making the larger displays are provided. An example larger display includes a plurality of sub-displays arranged on a display substrate. Each sub-display includes an array of light-emitting pixels formed on a first side of a substrate, each pixel including at least one light-emitting element, integrated circuits formed on a second side of the substrate, conductive electrodes penetrating through the substrate and coupling the array of light-emitting pixels to the integrated circuits, and a conductive grid array package, e.g., a ball grid array (BGA) package, formed on the second side of the substrate and conductively coupled to the integrated circuits. Interconnects are conductively coupled to the conductive grid array packages of the plurality of sub-displays to form the larger display.

Abstract: Methods of fabricating integrated active-matrix light emitting pixel array based displays are provided. The methods include: forming an array of light emitting elements on a first side of a substrate, forming an array of active-matrix light emitting pixels using the array of light emitting elements, each pixel including at least one light emitting element and at least one non-volatile memory coupled to the at least one light-emitting element, forming conductive interconnects penetrating through the substrate from a second side of the substrate to the first side, and forming one or more integrated circuits on the second side, the one or more integrated circuits being conductively coupled to the array of active-matrix light-emitting pixels through the conductive interconnects. The methods can further include forming an array of active-matrix multi-color display pixels by using the array of active-matrix light emitting pixels.

Abstract: Integrated light-emitting diode (LED) arrays based devices or systems and methods of forming the integrated LED arrays based devices or systems are provided. In one aspect, an integrated active-matrix LED display includes a silicon substrate including a first side and a second side, an array of active-matrix LED pixels formed on the first side, each LED pixel including at least one LED and at least one non-volatile memory coupled to the at least one LED, display drivers formed on the first side and coupled to the LED pixels, integrated circuits formed on the second side, and conductive electrodes penetrating through the silicon substrate and coupling the display drivers to the integrated circuits. The integrated circuits transmit image/video data to the display drivers via the conductive electrodes, and the display drivers select particular LED pixels and control the particular LED pixels to emit light based on the image/video data.

Abstract: Methods, systems, and apparatus, including steps of obtaining the source image having a plurality of modules, where a module corresponds to a smallest element that can be encoded in the source image; obtaining input data to be encoded; and encoding the input data in one or more modules of the plurality of modules of the source image. For each respective module of the one or more modules, the encoding includes determining, based on a corresponding value of the input data to be encoded in the respective module, a particular intensity level of multiple intensity levels associated with a particular color, where a number of the multiple intensity levels is greater than two; and encoding the particular color having the particular intensity level in the respective module of the source image.

Abstract: A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the first substrate to the second substrate and forming a mirror plate from a portion of the first substrate. The mirror plate has an upper surface and a lower surface. The method further includes forming a hinge coupled to the mirror plate and forming a reflective surface coupled to the upper surface of the mirror plate.

Abstract: Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

Abstract: A packaged die includes a substrate having an upper surface and a micro device on the upper surface and an encapsulation cover comprising one or more grooves on its lower surface. The lower surface of the encapsulation cover and the upper surface of the substrate are bonded together to form a plurality of air-tight closed-loop interfaces and encapsulate the micro device.

Abstract: A display device includes one or more light emitting diodes (LEDs) configured to emit light and a spatial light modulator comprising one or more tiltable micro mirrors each configured to receive the light emitted from the one or more LEDs and reflect the emitted light in two or more directions.

Abstract: A display system includes one or more rows of tiltable micro mirrors, each of which is configured to be selectively tilted to an “on” position to reflect incident light in an “on” direction and to be selectively tilted to an “off” position to reflect incident light in an “off” direction; and an optical projection system configured to project light reflected by the micro mirrors in the “on” direction to produce one or more first lines of image pixels along a first direction in a display image and to change the direction of the light reflected by the micro mirrors in the “on” direction to produce one or more second lines of image pixels in the display image. The one or more second lines of image pixels are substantially parallel to the one or more first lines of image pixels.

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower portion of the mirror plate. The mirror plate can tilt around a hinge component extending into the first cavity. The hinge component is supported by a stationary substrate. The tilt movement of the mirror plate can be stopped when the cantilever comes to contact with a stationary object.

Abstract: A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

Abstract: A wireless system for data and video communications includes a hybrid modem configured to receive a digital data signal and an analog video data signal from one or more communication channels and convert the digital data signal and the video signal to RF digital data, and a wireless router configured to transmit wireless signals to one or more electronic devices in response to the RF digital data.

Abstract: A method for fabricating a micro structure includes depositing a first layer of a first material over a substrate; patterning a first hard mask over the first layer; depositing a second layer of a second material over the first layer and the first hard mask; patterning a second hard mask over the second layer; and selectively removing the first material and the second material not covered by any of the first mask and the second mask to produce over the substrate the micro structure having a first structure portion having a first height and a second structure portion having a second height.

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a cavity having an opening on the lower surface; a substrate comprising an upper surface, a hinge support post in connection with the upper surface, and a hinge component supported by the hinge support post and in connection with the mirror plate; and a landing tip having a laterally extended upper portion and a vertically extended lower portion in connection with the substrate and the vertically extended lower portion. The laterally extended upper portion can contact the lower surface of the mirror plate to limit the rotation of the mirror plate. The hinge component extends into the cavity and can facilitate a rotation of the mirror plate.

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate portion, and a membrane over the second cavity. The modulator includes a substrate comprising an upper surface, a hinge support post in connection with the upper surface, a hinge component supported by the hinge support post and in connection with the mirror plate to facilitate a rotation of the mirror plate, and an upright landing tip in connection with the upper surface of the substrate. The hinge component is extends into the first cavity. The upright landing tip is configured to contact the membrane over the second cavity in the substrate portion of the mirror plate to stop the rotation of the mirror plate at a predetermined orientation.

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a substrate portion comprising a cavity having an opening on the lower surface, a substrate comprising an upper surface, a hinge support post in connection with the substrate, and a hinge component supported by the hinge support post and in connection with the mirror plate, and one or more landing tips configured to contact the lower surface of the mirror plate to limit rotation of the mirror plate. The hinge component includes a protrusion that is anchored in a hole in the top surface of the hinge support post and the hinge component is configured to extend into the cavity to facilitate rotation of the mirror plate.

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.