Abstract: A method and purge gas assembly for supplying or distributing flow of purge gas into a substrate container is provided. The purge gas assembly includes a gas distributor comprising at least one outlet and a purge module comprising an inlet for receiving a flow of purge gas, a check valve, and an outlet. A combination of the gas distributor and purge module form a chamber. The chamber is configured to supply the purge gas to the at least one outlet of the gas distributor.

Abstract: A substrate container that includes a shell, a connector, and a gas distributing device. The connector is connected to an opening provided on a side wall of the shell, in which the connector includes a base portion having an inlet and an outlet and a connector body having a first end and a second end. The first end of the connector body is rotatably connected with the outlet of the base portion, and second end of the connector body is connected to the opening of the shell. The gas distributing device connector includes a first end and a second end, in which the first end of the gas distributing device connector is connected with the second end of the connector body and a second end of the gas distributing device connector is configured to connect with a gas distributing device.

Abstract: A method and purge flow distribution module for controlling flow of purge gas into a substrate container is provided. The purge flow distribution module includes a purge module comprising an inlet for receiving a flow of purge gas, a check valve for regulating a flow direction of the purge gas, a filter, and a filter retainer. A diffuser retainer and a diffusion device can be attached to the filter retainer. The purge module can provide a portion of a flow to the diffusion device and a second portion of the flow can leave the purge module. The purge module can be installed into a housing to define a chamber. The chamber can receive the second portion of the flow and direct the second portion of the flow to another diffusion device.

Abstract: A module retainer is provided that can be rotatably attached to a purge module. The module retainer includes one or more engagement features configured to be inserted through openings provided in a substrate container and to engage tabs when rotated following insertion through the openings. The module retainer can be rotatable with respect to the purge module such that rotation between the insertion position and the retention position can be performed without affecting an orientation of the purge module.

Abstract: Brackets are provided on an interior of a substrate container to receive and retain a diffusion device. The brackets include an receiver having a first internal cross-sectional area and a retention region having a second internal cross-sectional area, with the first internal cross-sectional area being larger than the second internal cross-sectional area. The bracket can include a second receiver on an opposite end of the bracket from the first receiver, such that the bracket can be inverted for use on either side of the substrate container. The brackets can receive diffusion devices when the diffusion devices are inserted from an exterior of the substrate container.

Abstract: A substrate container includes a shell and a door for an opening of the shell. The shell includes one or more first latch sockets and one or more second latch sockets. The door includes a first locking mechanism that includes a first latch with first latch tip insertable into the one or more first latch sockets and a second latch with a second latch tip extendable into the second latch sockets. A width of the one or more first latch sockets blocks the second latch tip from being inserted into the one or more first latch sockets. A door for a substrate container includes a door housing and a first locking mechanism disposed in the door housing. A method of closing a substrate container includes inserting a door into an opening of the substrate container and adjusting a first locking mechanism of the door.

Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.

Abstract: A method and purge flow distribution module for controlling flow of purge gas into a substrate container is provided. The purge flow distribution module includes a purge module comprising an inlet for receiving a flow of purge gas, a check valve for regulating a flow direction of the purge gas, and an outlet for supplying the purge gas, and a chamber surrounding at least an outlet of the purge module. The chamber includes a first opening for directing a first flow path to at least one rear gas distributing device for distributing a first portion of the purge gas in a rear portion of the substrate container and a second opening for a second flow path to at least one front gas distributing device for distributing a second portion of the purge gas to a front portion of the substrate container.

Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

Abstract: Described are wafer containers adapted to store or transport semiconductor wafers in a clean environment, including containers that include a purge gas delivery device, as well as methods for purging the environment within the container.

Abstract: A pod for transporting reticles includes an inner cover and an inner base plate. The inner base plate cooperates with the cover to establish a space for mounting a reticle. The inner base plate includes a hole having a perimeter and first and second flanges extending inward from the perimeter. A window assembly is mounted in the hole. The window assembly includes a transparent plate, a seal and a retainer. The seal contacts the outer or side planar surface of the transparent plate and the perimeter of the hole to seal an interface between the window assembly and the hole. The retainer contacts the second flange to retain the seal and transparent plate within the hole.

Abstract: A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributing devices configured to distribute the stream of purge gas into the interior space. A supply line is also included that is connected to the inlet and configured to divide the supply of purge gas to the network of separate gas distributing devices. A method of purging an open substrate container includes supplying a stream of purge gas to an inlet of a purge flow distribution system and dividing the purge gas to supply a network of separate gas distributing devices to distribute the stream of purge gas into the interior space.

Abstract: Methods of installing a purge fluid conditioning element into an interior space of a semiconductor substrate carrying container are described. The purge fluid conditioning element is installed from outside the semiconductor substrate carrying container through a port formed in one of the walls of the container, where the port is sized to permit the purge fluid conditioning element to be inserted into the interior space of the container by installing the purge fluid conditioning element through the port. The wall may be a bottom wall of the container or another wall of the container. The described methods eliminate the need to install the purge fluid conditioning element from the inside of the container which can cause human contamination of the interior environment of the container.

Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

Abstract: Substrate containers include purge flow distribution systems. The purge flow distribution systems can divide one or more input flows of purge gas to a plurality of gas distribution surfaces of a network of gas distribution devices. Methods of controlling purge can include configuring the substrate containers to provide determined purge gas flow rates at each of the gas distribution surfaces. The configuration can be performed using flow controls of the purge flow distribution systems. The purge gas flow rates can be determined based on purge performance parameters. A controller can direct the operation of the purge flow distribution systems. The controller and the substrate container can be combined in a substrate container purging system.

Abstract: A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributing devices configured to distribute the stream of purge gas into the interior space. A supply line is also included that is connected to the inlet and configured to divide the supply of purge gas to the network of separate gas distributing devices. A method of purging an open substrate container includes supplying a stream of purge gas to an inlet of a purge flow distribution system and dividing the purge gas to supply a network of separate gas distributing devices to distribute the stream of purge gas into the interior space.

Abstract: A front opening unified pod includes a housing and a purge port in the housing. The purge port includes a filter membrane and a purge filter support. The purge filter support includes an outer ring structure and a support frame working. The support framework extends from the outer ring structure The outer ring structure includes a plurality of supports that provide a support surface for the filter membrane. One or more of the supports respectively increase in thickness from a thickness for the upper support surface. A purge filter support includes an outer ring structure, and one or more openings, a support framework that extends from the outer ring structure. The support framework includes a supports that provide a support surface configured to contact and support a filter membrane. One or more supports each increase in thickness from a first thickness of the upper support surface.

Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

Abstract: A substrate container including a plate, a shell, a connector, and a seal, where the connector is threaded and secured via a nut, and the seal contacts each of the shell, plate, and connector. The plate has a recess accommodating an end of the connector and the nut. Field-serviceable, removable purge modules including check valves may be used with the substrate container, and may be secured to the substrate container in the recess in the plate. Filters may be secured to the connector or included in the purge modules. These filters may have diameters larger than an internal diameter of the connector.

Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.