Patents by Inventor Sheng Ta Lee

Sheng Ta Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micro-electro-mechanical system device and method for making same
    Publication number: 20090273043
    Abstract: According to the present invention, a micro-electro-mechanical system (MEMS) device comprises: a thin film structure including at least a metal layer and a protection layer deposited in any order; and a protrusion connected under the thin film structure. A preferred thin film structure includes at least a lower protection layer, a metal layer and an upper protection layer. The MEMS device for example is a capacitive MEMS acoustical sensor.
    Type: Application
    Filed: July 8, 2008
    Publication date: November 5, 2009
    Inventors: Sheng Ta Lee, Chuan Wei Wang