Patents by Inventor Shien-Yang Wu

Shien-Yang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8686536
    Abstract: An embodiment is a fuse structure. In accordance with an embodiment, a fuse structure comprises an anode, a cathode, a fuse link interposed between the anode and the cathode, and cathode connectors coupled to the cathode. The cathode connectors are each equivalent to or larger than about two times a minimum feature size of a contact that couples to an active device.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: April 1, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shien-Yang Wu, Wei-Chan Kung
  • Patent number: 8629050
    Abstract: An electrical fuse and a method of forming the same are presented. A first-layer conductive line is formed over a base material. A via is formed over the first-layer conductive line. The via preferably comprises a barrier layer and a conductive material. A second-layer conductive line is formed over the via. A first external pad is formed coupling to the first-layer conductive line. A second external pad is formed coupling to the second-layer conductive line. The via, the first conductive line and the second conductive line are adapted to be an electrical fuse. The electrical fuse can be burned out by applying a current. The vertical structure of the preferred embodiment is suitable to be formed in any layer.
    Type: Grant
    Filed: April 10, 2012
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kong-Beng Thei, Chung Long Cheng, Chung-Shi Liu, Harry-Hak-Lay Chuang, Shien-Yang Wu, Shi-Bai Chen
  • Publication number: 20130105895
    Abstract: A fuse device and method for fabricating the fuse device is disclosed. An exemplary fuse device includes a first contact and a second contact coupled with a metal-semiconductor alloy layer, wherein the metal-semiconductor alloy layer extends continuously between the first contact and the second contact. The metal-semiconductor alloy layer is disposed over an epitaxial layer that is disposed over a fin structure of a substrate.
    Type: Application
    Filed: October 27, 2011
    Publication date: May 2, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Minchang Liang, Shien-Yang Wu, Wei-Chang Kung
  • Publication number: 20120196434
    Abstract: An electrical fuse and a method of forming the same are presented. A first-layer conductive line is formed over a base material. A via is formed over the first-layer conductive line. The via preferably comprises a barrier layer and a conductive material. A second-layer conductive line is formed over the via. A first external pad is formed coupling to the first-layer conductive line. A second external pad is formed coupling to the second-layer conductive line. The via, the first conductive line and the second conductive line are adapted to be an electrical fuse. The electrical fuse can be burned out by applying a current. The vertical structure of the preferred embodiment is suitable to be formed in any layer.
    Type: Application
    Filed: April 10, 2012
    Publication date: August 2, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kong-Beng Thei, Chung Long Cheng, Chung-Shi Liu, Harry Chuang, Shien-Yang Wu, Shi-Bai Chen
  • Patent number: 8174091
    Abstract: An electrical fuse and a method of forming the same are presented. A first-layer conductive line is formed over a base material. A via is formed over the first-layer conductive line. The via preferably comprises a barrier layer and a conductive material. A second-layer conductive line is formed over the via. A first external pad is formed coupling to the first-layer conductive line. A second external pad is formed coupling to the second-layer conductive line. The via, the first conductive line and the second conductive line are adapted to be an electrical fuse. The electrical fuse can be burned out by applying a current. The vertical structure of the preferred embodiment is suitable to be formed in any layer.
    Type: Grant
    Filed: July 15, 2009
    Date of Patent: May 8, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kong-Beng Thei, Chung Long Cheng, Chung-Shi Liu, Harry Chuang, Shien-Yang Wu, Shi-Bai Chen
  • Patent number: 7952142
    Abstract: MOSFET gate structures comprising multiple width offset spacers are provided. A first and a second gate structure are formed on a semiconductor substrate. A pair of first offset spacers are formed adjacent either side of the first gate structure. Each of the first offset spacers comprises a first silicon oxide layer with a first dielectric layer overlying. A pair of second offset spacers are formed adjacent either side of the second gate structure. Each of the second offset spacers comprises a second silicon oxide layer with a second dielectric layer overlying. Ion implanted doped regions are formed in the semiconductor substrate adjacent the first and second offset spacers respectively to form a first and second MOSFET device. A maximum width of each of the first offset spacers is different from that of the second offset spacers. The first silicon oxide layer is thinner than the second silicon oxide layer.
    Type: Grant
    Filed: October 17, 2008
    Date of Patent: May 31, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Shien-Yang Wu
  • Publication number: 20110101493
    Abstract: An embodiment is a fuse structure. In accordance with an embodiment, a fuse structure comprises an anode, a cathode, a fuse link interposed between the anode and the cathode, and cathode connectors coupled to the cathode. The cathode connectors are each equivalent to or larger than about two times a minimum feature size of a contact that couples to an active device.
    Type: Application
    Filed: April 30, 2010
    Publication date: May 5, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shien-Yang Wu, Wei-Chan Kung
  • Patent number: 7898028
    Abstract: A process for fabricating a MOSFET device featuring a channel region comprised with a silicon-germanium component is provided. The process features employ an angled ion implantation procedure to place germanium ions in a region of a semiconductor substrate underlying a conductive gate structure. The presence of raised silicon shapes used as a diffusion source for a subsequent heavily-doped source/drain region, the presence of a conductive gate structure, and the removal of dummy insulator previously located on the conductive gate structure allow the angled implantation procedure to place germanium ions in a portion of the semiconductor substrate to be used for the MOSFET channel region. An anneal procedure results in the formation of the desired silicon-germanium component in the portion of semiconductor substrate to be used for the MOSFET channel region.
    Type: Grant
    Filed: August 23, 2007
    Date of Patent: March 1, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sun-Jay Chang, Shien-Yang Wu
  • Patent number: 7892895
    Abstract: System and method for providing an electrical fuse having a p-n junction diode. A preferred embodiment comprises a cathode, an anode, and one or more links formed between the cathode and the anode. The cathode and the portion of the cathode adjoining the link are doped with a first impurity, preferably a p-type impurity. The anode and the portion of the link adjoining the anode are doped with a second impurity, preferably an n-type impurity. The junction of the first impurity and the second impurity in the link forms a p-n junction diode. A conductive layer, such as a silicide layer, is formed over the p-n junction diodes. In an alternative embodiment, a plurality of p-n junction diodes may be formed in each link. One or more contacts may be formed to provide electrical contact to the cathode and the anode.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: February 22, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shien-Yang Wu, Shi-Bai Chen
  • Publication number: 20100213569
    Abstract: An integrated circuit includes a fuse over a substrate. The fuse has a first end, a second end, and a central portion between the first end and the second end. A first dummy pattern is disposed adjacent to each side of the central portion of the fuse.
    Type: Application
    Filed: December 15, 2009
    Publication date: August 26, 2010
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shien-Yang WU, Jye-Yen Cheng, Wei-Chan Kung
  • Patent number: 7782073
    Abstract: A testline structure made for integrated circuit tests is presented. The structure includes an array of testline pads formed in the scribe line area or integrated circuit die area on a semiconductor substrate, a plurality of test devices formed under the pads area, and a select circuit selectively connecting one of the test devices. The testline structure of this invention enables access to a large number of test devices through the same number of pads as on a conventional testline and can be employed to conduct parametric, reliability, and functional tests on the same. A source measurement unit (SMU) in a conventional integrated circuit tester is employed to sense and force predetermined test conditions on the test device terminals and conduct accurate Kelvin tests on the selected device. A method of using this testline structure is also presented.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: August 24, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tseng Chin Lo, Kuo-Tsai Li, Shien-Yang Wu
  • Patent number: 7678655
    Abstract: A method for forming a field effect transistor device employs a conformal spacer layer formed upon a gate electrode. The gate electrode is employed as a mask for forming a lightly doped extension region within the semiconductor substrate and the gate electrode and conformal spacer layer are employed as a mask for forming a source/drain region within the semiconductor substrate. An anisotropically etched shaped spacer material layer is formed upon the conformal spacer layer and isotropically etched to enhance exposure of the source/drain region prior to forming a silicide layer thereupon.
    Type: Grant
    Filed: July 28, 2006
    Date of Patent: March 16, 2010
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung Der Su, Ju-Wang Hsu, Yi-Chun Huang, Shien-Yang Wu, Yung-Shun Chen, Tung-Heng Shie, Yuan-Hung Chiu, Jyh-Huei Chen, Jhon Jhy Liaw
  • Publication number: 20090273055
    Abstract: An electrical fuse and a method of forming the same are presented. A first-layer conductive line is formed over a base material. A via is formed over the first-layer conductive line. The via preferably comprises a barrier layer and a conductive material. A second-layer conductive line is formed over the via. A first external pad is formed coupling to the first-layer conductive line. A second external pad is formed coupling to the second-layer conductive line. The via, the first conductive line and the second conductive line are adapted to be an electrical fuse. The electrical fuse can be burned out by applying a current. The vertical structure of the preferred embodiment is suitable to be formed in any layer.
    Type: Application
    Filed: July 15, 2009
    Publication date: November 5, 2009
    Inventors: Kong-Beng Thei, Chung Long Cheng, Chung-Shi Liu, Harry Chuang, Shien-Yang Wu, Shi-Bai Chen
  • Publication number: 20090039445
    Abstract: MOSFET gate structures comprising multiple width offset spacers are provided. A first and a second gate structure are formed on a semiconductor substrate. A pair of first offset spacers are formed adjacent either side of the first gate structure. Each of the first offset spacers comprises a first silicon oxide layer with a first dielectric layer overlying. A pair of second offset spacers are formed adjacent either side of the second gate structure. Each of the second offset spacers comprises a second silicon oxide layer with a second dielectric layer overlying. Ion implanted doped regions are formed in the semiconductor substrate adjacent the first and second offset spacers respectively to form a first and second MOSFET device. A maximum width of each of the first offset spacers is different from that of the second offset spacers. The first silicon oxide layer is thinner than the second silicon oxide layer.
    Type: Application
    Filed: October 17, 2008
    Publication date: February 12, 2009
    Inventor: Shien-Yang WU
  • Patent number: 7456066
    Abstract: MOSFET gate structures comprising multiple width offset spacers are provided. A first and a second gate structure are formed on a semiconductor substrate. A pair of first offset spacers are formed adjacent either side of the first gate structure. Each of the first offset spacers comprises a first silicon oxide layer with a first dielectric layer overlying. A pair of second offset spacers are formed adjacent either side of the second gate structure. Each of the second offset spacers comprises a second silicon oxide layer with a second dielectric layer overlying. Ion implanted doped regions are formed in the semiconductor substrate adjacent the first and second offset spacers respectively to form a first and second MOSFET device. A maximum width of each of the first offset spacers is different from that of the second offset spacers. The first silicon oxide layer is thinner than the second silicon oxide layer.
    Type: Grant
    Filed: November 3, 2006
    Date of Patent: November 25, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Shien-Yang Wu
  • Publication number: 20080244475
    Abstract: A network based integrated circuit testline generating system and method of using the same is described. The system includes a user interface for generating and submitting requests which specify types and configurations of needed testlines for device parametric test. A testline generator receives the requests and creates a layout data base which includes layout information of needed testlines.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Inventors: Tseng Chin Lo, Kuo Tsai Li, Shien-Yang Wu
  • Publication number: 20080238453
    Abstract: A testline structure made for integrated circuit tests is presented. The structure includes an array of testline pads formed in the scribe line area or integrated circuit die area on a semiconductor substrate, a plurality of test devices formed under the pads area, and a select circuit selectively connecting one of the test devices. The testline structure of this invention enables access to a large number of test devices through the same number of pads as on a conventional testline and can be employed to conduct parametric, reliability, and functional tests on the same. A source measurement unit (SMU) in a conventional integrated circuit tester is employed to sense and force predetermined test conditions on the test device terminals and conduct accurate Kelvin tests on the selected device. A method of using this testline structure is also presented.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Inventors: Tseng Chin Lo, Kuo-Tsai Li, Shien-Yang Wu
  • Publication number: 20080122011
    Abstract: MOSFET gate structures comprising multiple width offset spacers are provided. A first and a second gate structure are formed on a semiconductor substrate. A pair of first offset spacers are formed adjacent either side of the first gate structure. Each of the first offset spacers comprises a first silicon oxide layer with a first dielectric layer overlying. A pair of second offset spacers are formed adjacent either side of the second gate structure. Each of the second offset spacers comprises a second silicon oxide layer with a second dielectric layer overlying. Ion implanted doped regions are formed in the semiconductor substrate adjacent the first and second offset spacers respectively to form a first and second MOSFET device. A maximum width of each of the first offset spacers is different from that of the second offset spacers. The first silicon oxide layer is thinner than the second silicon oxide layer.
    Type: Application
    Filed: November 3, 2006
    Publication date: May 29, 2008
    Inventor: Shien-Yang Wu
  • Patent number: 7332791
    Abstract: A method to form a programmable resistor device in an integrated circuit device is achieved. The method comprises depositing a semiconductor layer overlying a substrate. The semiconductor layer is patterned to form a plurality of lines. The lines are electrically parallel between a first terminal and a second terminal. Any of the lines may be blown open by a current forced from the first terminal to the second terminal. A metal-semiconductor alloy is selectively formed overlying a first group of the lines but not overlying a second group of the lines. A method to program the programmable resistor device is described.
    Type: Grant
    Filed: September 9, 2005
    Date of Patent: February 19, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Shien-Yang Wu
  • Publication number: 20080026518
    Abstract: A method for forming a field effect transistor device employs a conformal spacer layer formed upon a gate electrode. The gate electrode is employed as a mask for forming a lightly doped extension region within the semiconductor substrate and the gate electrode and conformal spacer layer are employed as a mask for forming a source/drain region within the semiconductor substrate. An anisotropically etched shaped spacer material layer is formed upon the conformal spacer layer and isotropically etched to enhance exposure of the source/drain region prior to forming a silicide layer thereupon.
    Type: Application
    Filed: July 28, 2006
    Publication date: January 31, 2008
    Inventors: Hung Der Su, Ju-Wang Hsu, Yi-Chun Huang, Shien-Yang Wu, Yung-Shun Chen, Tung-Heng Shie, Yuan-Hung Chiu, Jyh-Huei Chen, Jhon Jhy Liaw