Patents by Inventor Shih Cheng

Shih Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240355907
    Abstract: A device includes: a stack of semiconductor channels; a gate structure wrapping around the semiconductor channels; a source/drain region abutting the semiconductor channels; a source/drain contact on the source/drain region; and a gate spacer between the source/drain contact and the gate structure. The gate spacer includes: a first spacer layer in contact with the gate structure; and a second spacer layer between the first spacer layer and the source/drain contact, the second spacer layer having a first portion on the stack and a second portion on the first portion, the second portion being thinner than the first portion.
    Type: Application
    Filed: August 25, 2023
    Publication date: October 24, 2024
    Inventors: Shih-Cheng CHEN, Jung-Hung CHANG, Chien Ning YAO, Tsung-Han CHUANG, Kuo-Cheng CHIANG
  • Publication number: 20240355901
    Abstract: A method for forming a semiconductor device structure includes forming a fin structure, and the fin structure has multiple sacrificial layers and multiple semiconductor layers laid out alternately. The method also includes forming a gate stack wrapped around the fin structure and forming a spacer layer extending along sidewalls of the fin structure and the gate stack. The method further includes partially removing the fin structure and the spacer layer to form a recess exposing side surfaces of the semiconductor layers and the sacrificial layers. A remaining portion of the spacer layer forms a gate spacer. In addition, the method includes forming an inner spacer layer along a sidewall and a bottom of the recess and partially removing the inner spacer layer using an isotropic etching process. Remaining portions of the inner spacer layers form multiple inner spacers. The method includes forming an epitaxial structure in the recess.
    Type: Application
    Filed: April 18, 2023
    Publication date: October 24, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jung-Hung CHANG, Shih-Cheng CHEN, Chih-Hao WANG, Chia-Cheng TSAI, Kuo-Cheng CHIANG, Zhi-Chang LIN, Chien-Ning YAO, Tsung-Han CHUANG
  • Publication number: 20240355908
    Abstract: A device includes a substrate, a first nanostructure channel above the substrate and a second nanostructure channel between the first nanostructure channel and the substrate. An inner spacer is between the first nanostructure channel and the second nanostructure channel. A gate structure abuts the first nanostructure channel, the second nanostructure channel and the inner spacer. A liner layer is between the inner spacer and the gate structure.
    Type: Application
    Filed: June 28, 2024
    Publication date: October 24, 2024
    Inventors: Tsung-Han CHUANG, Zhi-Chang LIN, Shih-Cheng CHEN, Jung-Hung CHANG, Chien Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Patent number: 12117864
    Abstract: An interface device and a signal transceiving method thereof are provided. The interface device includes a master circuit and a slave circuit. The slave circuit includes a second receiver, a clock generator, a sampler, and a comparator. The first receiver and second receiver respectively receive input data and a clock signal from the master circuit. The clock generator delays the clock signal according to a delay value to generate a delayed clock signal, and generates a plurality of sampling signals according to the delayed clock signal. The sampler samples the input data according to the sampling signals to generate a plurality of sampling results. The comparator compares the sampling results to generate a comparison result. The clock generator adjusts the delay value according to the comparison result.
    Type: Grant
    Filed: September 23, 2022
    Date of Patent: October 15, 2024
    Assignees: Global Unichip Corporation, Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bi-Yang Li, Igor Elkanovich, Hung-Yi Chang, Shih-Cheng Kao
  • Patent number: 12119270
    Abstract: A method includes forming an epitaxy semiconductor layer over a semiconductor substrate, and etching the epitaxy semiconductor layer and the semiconductor substrate to form a semiconductor strip, which includes an upper portion acting as a mandrel, and a lower portion under the mandrel. The upper portion is a remaining portion of the epitaxy semiconductor layer, and the lower portion is a remaining portion of the semiconductor substrate. The method further includes growing a first semiconductor fin starting from a first sidewall of the mandrel, growing a second semiconductor fin starting from a second sidewall of the mandrel. The first sidewall and the second sidewall are opposite sidewalls of the mandrel. A first transistor is formed based on the first semiconductor fin. A second transistor is formed based on the second semiconductor fin.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: October 15, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Pei-Hsun Wang, Shih-Cheng Chen, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20240336210
    Abstract: An automotive decorative panel includes a decorative film, a touch icon component, and a light source system. The decorative film has an optical density between 0.2 and 2.0 and includes a substrate and a decorative layer disposed on the substrate. The touch icon component is disposed under the decorative film and includes a light-shielding pattern layer having an optical density between 3.5 and 6.0, a light diffusion layer disposed under the light-shielding pattern layer, and a touch layer. The light-shielding pattern layer has a pattern area that is light-permeable and a peripheral area that is light-impermeable. The touch layer is disposed on a side of the light-shielding pattern layer or between the decorative film and the light-shielding pattern layer. The light source system is disposed on a side of the touch icon component and configured to emit light toward the touch icon component.
    Type: Application
    Filed: April 6, 2023
    Publication date: October 10, 2024
    Inventors: Ding Gui Zeng, Le Le Su, Chung Chieh Wu, Yun Chien Lo, Chun Yong Zhang, Tai-Shih Cheng
  • Publication number: 20240332189
    Abstract: A method for fabricating an interconnect structure is disclosed. A substrate with a first dielectric layer is provided. A first conductor is formed in the first dielectric layer. A second dielectric layer is formed on the first dielectric layer. A trench is formed in the second dielectric layer to expose the top surface of the first conductor. An annealing process is performed on the top surface of the first conductor. The annealing process includes the conditions of a temperature of 400-450° C., duration less than 5 minutes, and gaseous atmosphere comprising hydrogen and nitrogen.
    Type: Application
    Filed: April 20, 2023
    Publication date: October 3, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Cheng Chen, Ko-Wei Lin, Ying-Wei Yen, Chun-Ling Lin, Po-Jen Chuang
  • Patent number: 12107332
    Abstract: Provided is an electromagnetic wave reflectarray, including a first substrate, a second substrate, first wires and second wires respectively arranged on the first substrate and the second substrate along a first direction and a second direction, antenna electrodes and tuning electrodes respectively arranged into first electrode strings and second electrode strings electrically connected to the first wires and the second wires on the first substrate and the second substrate along the first direction, and a liquid crystal layer disposed between the first substrate and the second substrate. The tuning electrodes completely cover the orthographic projections of the antenna electrodes on the second substrate.
    Type: Grant
    Filed: August 11, 2022
    Date of Patent: October 1, 2024
    Assignee: TMY Technology Inc.
    Inventors: Su-Wei Chang, Sheng-Fuh Chang, Chia-Chan Chang, Shih-Cheng Lin, Yuan-Chun Lin
  • Patent number: 12107169
    Abstract: A semiconductor device according to the present disclosure includes a stack of first channel members, a stack of second channel members disposed directly over the stack of first channel members, a bottom source/drain feature in contact with the stack of the first channel members, a separation layer disposed over the bottom source/drain feature, a top source/drain feature in contact with the stack of second channel members and disposed over the separation layer, and a frontside contact that extends through the top source/drain feature and the separation layer to be electrically coupled to the bottom source/drain feature.
    Type: Grant
    Filed: July 10, 2023
    Date of Patent: October 1, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Chien Ning Yao, Kuo-Cheng Chiang, Chih-Hao Wang
  • Publication number: 20240313118
    Abstract: The present disclosure provides a semiconductor device that includes a semiconductor fin disposed over a substrate, an isolation structure at least partially surrounding the fin, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin, where an extended portion of the epitaxial S/D feature extends over the isolation structure, and a silicide layer disposed on the epitaxial S/D feature, where the silicide layer covers top, bottom, sidewall, front, and back surfaces of the extended portion of the S/D feature.
    Type: Application
    Filed: May 24, 2024
    Publication date: September 19, 2024
    Inventors: Pei-Hsun Wang, Chih-Chao Chou, Shih-Cheng Chen, Jung-Hung Chang, Jui-Chien Huang, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20240304687
    Abstract: A semiconductor device and a method of fabricating the semiconductor device are disclosed. The method includes forming a polysilicon structure on a substrate, depositing a first spacer layer on the polysilicon structure, depositing a second spacer layer on the first spacer layer, forming a S/D region on the substrate, removing the second spacer layer, depositing a third spacer layer on the first spacer layer and on the S/D region, depositing an ESL on the third spacer layer, depositing an ILD layer on the etch stop layer, and replacing the polysilicon structure with a gate structure surrounding the nanostructured layer.
    Type: Application
    Filed: August 11, 2023
    Publication date: September 12, 2024
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien Ning Yao, Chia-Hao Chang, Shih-Cheng Chen, Chih-Hao Wang, Chia-Cheng Tsai, Kuo-Cheng Chiang, Zhi-Chang Lin, Jung-Hung Chang, Tsung-Han Chuang
  • Patent number: 12087079
    Abstract: A display apparatus and an fingerprint sensing method thereof are provided. A display panel of the display apparatus has a pixel circuit array, an in-display touch sensor array, and an in-display fingerprint sensor array. A driving circuit drives the in-display fingerprint sensor array to read a fingerprint image. A current display frame period is divided into a plurality of unit periods, each of the unit periods includes at least one fingerprint sensing period and one or both of a display driving period and a touch sensing period. The driving circuit resets a current fingerprint sensor in the in-display fingerprint sensor array during a first fingerprint sensing period among these fingerprint sensing periods of the first display frame period. The driving circuit reads a sensing result of the current fingerprint sensor during a second fingerprint sensing period succeeding to the first fingerprint sensing period.
    Type: Grant
    Filed: November 16, 2023
    Date of Patent: September 10, 2024
    Assignee: Novatek Microelectronics Corp.
    Inventors: Cho-Hsuan Jhang, Chao-Yu Meng, Shih-Cheng Chen, Chih-Peng Hsia
  • Publication number: 20240297083
    Abstract: A semiconductor device includes a first epitaxial feature disposed in a first device region of the semiconductor device, a second epitaxial feature disposed in a second device region of the semiconductor device, a first silicide layer disposed on the first epitaxial feature, a second silicide layer disposed on the second epitaxial feature, a metal layer disposed on the first silicide layer, a first contact plug landing on the metal layer, and a second contact plug landing on the second silicide layer. The metal layer and the second silicide layer each include a first metal element. The first silicide layer includes a second metal element different from the first metal element.
    Type: Application
    Filed: May 13, 2024
    Publication date: September 5, 2024
    Inventors: Shih-Cheng Chen, Chun-Hsiung Lin, Chih-Hao Wang
  • Patent number: 12074107
    Abstract: A method of forming a semiconductor device includes forming a conductive feature and a first punch stop layer, where the conductive feature has a first top surface, and where the first punch stop layer has a second top surface that is substantially level with the first top surface. The method further includes forming a resistive element over the first punch stop layer. The method further includes etching through a first portion of the resistive element to form a first trench that exposes both the second top surface of the first punch stop layer and a first sidewall surface of the resistive element. The method further includes forming a first conductive via within the first trench, where the first conductive via contacts the first sidewall surface of the resistive element.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: August 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hong-Wei Chan, Yung-Shih Cheng, Wen-Sheh Huang
  • Patent number: 12074204
    Abstract: A method for forming a semiconductor structure is provided. The method includes forming a fin structure over a substrate. The fin structure includes a protection layer and alternating first and second semiconductor layers over the protection layer. The method also includes etching the fin structure to form a source/drain recess, forming a sacrificial contact in the source/drain recess, forming a source/drain feature over the sacrificial contact in the source/drain recess, removing the first semiconductor layers of the fin structure, thereby forming a plurality of nanostructures, forming a gate stack wrapping around the nanostructures, removing the substrate thereby exposing the protection layer and the sacrificial contact and replacing the sacrificial contact with a contact plug.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: August 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jung-Hung Chang, Lo Heng Chang, Zhi-Chang Lin, Shih-Cheng Chen, Chien-Ning Yao, Kuo-Cheng Chiang, Chih-Hao Wang
  • Publication number: 20240282838
    Abstract: A device includes: a stack of nanostructures; a gate structure that wraps around the nanostructures; an isolation region between the stack of nanostructures and another stack of nanostructures adjacent thereto along a first direction; a source/drain region that abuts at least one of the nanostructures; and a spacer layer that is on sidewalls of the gate structure and on sidewalls of the source/drain region, the spacer layer covering an area between the source/drain region and a neighboring source/drain region of another transistor along the first direction.
    Type: Application
    Filed: June 28, 2023
    Publication date: August 22, 2024
    Inventors: Jung-Hung CHANG, Tsung-Han CHUANG, Fu-Cheng CHANG, Shih-Cheng CHEN, Chia-Cheng TSAI, Kuo-Cheng CHIANG
  • Patent number: 12062721
    Abstract: A semiconductor device according to the present disclosure includes an active region including a channel region and a source/drain region adjacent the channel region, a vertical stack of channel members over the channel region, a gate structure over and around the vertical stack of channel members, a bottom dielectric feature over the source/drain region, a source/drain feature over the bottom dielectric feature, and a germanium layer disposed between the bottom dielectric feature and the source/drain region.
    Type: Grant
    Filed: February 7, 2022
    Date of Patent: August 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Cheng Chen, Kuo-Cheng Chiang, Zhi-Chang Lin
  • Patent number: 12057401
    Abstract: A semiconductor device including a substrate having a NMOS region and a PMOS region; a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate; a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region; a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region; a first contact plug landing on the second source/drain region adjacent to one side of the metal gate; a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and a third contact plug landing directly on a portion of the metal gate on the PMOS region and between the first contact plug and the second contact plug.
    Type: Grant
    Filed: July 27, 2023
    Date of Patent: August 6, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Cheng Chen, Li-Hsuan Ho, Tsuo-Wen Lu, Shih-Hao Liang, Tsung-Hsun Wu, Po-Jen Chuang, Chi-Mao Hsu
  • Publication number: 20240258258
    Abstract: A substrate or IC chip is connected with a second substrate or IC chip. This entails disposing electrically conductive balls on electrical bonding pads of a surface of the substrate or IC chip to form a ball grid array (BGA) disposed on the surface of the substrate or IC chip, and electrically and mechanically connecting the surface of the substrate or IC chip to the second substrate or IC chip using the BGA. An underfill material may be disposed on the surface of the substrate or IC chip around bonds between the balls and the electrical bonding pads. There may be at least two different types of electrically conductive balls in the BGA, such as solder balls and copper-based balls.
    Type: Application
    Filed: January 31, 2023
    Publication date: August 1, 2024
    Inventors: Shih-Cheng Chang, Yao-Chun Chuang
  • Patent number: 12051736
    Abstract: A device includes a substrate, a first nanostructure channel above the substrate and a second nanostructure channel between the first nanostructure channel and the substrate. An inner spacer is between the first nanostructure channel and the second nanostructure channel. A gate structure abuts the first nanostructure channel, the second nanostructure channel and the inner spacer. A liner layer is between the inner spacer and the gate structure.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: July 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Han Chuang, Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Chien Ning Yao, Kuo-Cheng Chiang, Chih-Hao Wang