Patents by Inventor Shih Hsien Huang

Shih Hsien Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190067343
    Abstract: A photosensor device and the method of making the same are provided. In one embodiment, the device includes at least one pixel cell. The at least one pixel cell includes a substrate formed from a semiconductor material, and includes first and second photosensor regions. The first photosensor region is disposed in the substrate and includes a first dopant of a first conductivity type. The second photosensor region is disposed above the first photosensor region and includes a second dopant of a second conductivity type. The second photosensor region can have an increase in dopant concentration from an outer edge to a center portion therein.
    Type: Application
    Filed: August 30, 2017
    Publication date: February 28, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Chan CHEN, Yueh-Chuan LEE, Ta-Hsin CHEN, Shih-Hsien HUANG, Chih-Huang LI
  • Patent number: 10177231
    Abstract: A semiconductor device comprises a semiconductor substrate and a semiconductor fin. The semiconductor substrate has an upper surface and a recess extending downwards into the semiconductor substrate from the upper surface. The semiconductor fin is disposed in the recess and extends upwards beyond the upper surface, wherein the semiconductor fin is directly in contact with semiconductor substrate, so as to form at least one semiconductor hetero-interface on a sidewall of the recess.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: January 8, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chien-Hung Chen, Shih-Hsien Huang, Yu-Ru Yang, Huai-Tzu Chiang, Hao-Ming Lee, Sheng-Hao Lin, Cheng-Tzung Tsai, Chun-Yuan Wu
  • Publication number: 20180323256
    Abstract: Provided is a FinFET including a substrate, at least one fin and at least one gate. A portion of the at least one fin is embedded in the substrate. The at least one fin includes, from bottom to top, a seed layer, a stress relaxation layer and a channel layer. The at least one gate is across the at least one fin. A method of forming a FinFET is further provided.
    Type: Application
    Filed: July 19, 2018
    Publication date: November 8, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Huai-Tzu Chiang, Sheng-Hao Lin, Hao-Ming Lee, Yu-Ru Yang, Shih-Hsien Huang, Chien-Hung Chen, Chun-Yuan Wu, Cheng-Tzung Tsai
  • Patent number: 10068963
    Abstract: Provided is a FinFET including a substrate, at least one fin and at least one gate. A portion of the at least one fin is embedded in the substrate. The at least one fin includes, from bottom to top, a seed layer, a stress relaxation layer and a channel layer. The at least one gate is across the at least one fin. A method of forming a FinFET is further provided.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: September 4, 2018
    Assignee: United Microelectronics Corp.
    Inventors: Huai-Tzu Chiang, Sheng-Hao Lin, Hao-Ming Lee, Yu-Ru Yang, Shih-Hsien Huang, Chien-Hung Chen, Chun-Yuan Wu, Cheng-Tzung Tsai
  • Patent number: 10068995
    Abstract: In a method of fabricating a field effect transistor, a fin structure made of a first semiconductor material is formed so that the fin structure protrudes from an isolation insulating layer disposed over a substrate. A gate structure is formed over a part of the fin structure, thereby defining a channel region, a source region and a drain region in the fin structure. After the gate structure is formed, laser annealing is performed on the fin structure.
    Type: Grant
    Filed: July 14, 2016
    Date of Patent: September 4, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fang-Liang Lu, CheeWee Liu, Chi-Wen Liu, Shih-Hsien Huang, I-Hsieh Wong
  • Publication number: 20180053826
    Abstract: A semiconductor device comprises a semiconductor substrate and a semiconductor fin. The semiconductor substrate has an upper surface and a recess extending downwards into the semiconductor substrate from the upper surface. The semiconductor fin is disposed in the recess and extends upwards beyond the upper surface, wherein the semiconductor fin is directly in contact with semiconductor substrate, so as to form at least one semiconductor hetero-interface on a sidewall of the recess.
    Type: Application
    Filed: October 30, 2017
    Publication date: February 22, 2018
    Inventors: Chien-Hung Chen, Shih-Hsien Huang, Yu-Ru Yang, Huai-Tzu Chiang, Hao-Ming Lee, Sheng-Hao Lin, Cheng-Tzung Tsai, Chun-Yuan Wu
  • Publication number: 20180033887
    Abstract: The integrated circuit includes a gate structure over a substrate. The integrated circuit further includes a first silicon-containing material structure in a recess adjacent to the gate structure. The first silicon-containing material structure includes a first layer having an uppermost surface below a top surface of the substrate and a bottommost surface in contact with the substrate. The first silicon-containing material structure further includes a second layer over the first layer, wherein an entirety of the second layer is co-planar with or above the top surface of the substrate. A first region of the second layer closer to the gate structure is thicker than a second region of the second layer farther from the gate structure. Thickness is measured in a direction perpendicular to the top surface of the substrate.
    Type: Application
    Filed: October 6, 2017
    Publication date: February 1, 2018
    Inventors: Shih-Hsien HUANG, Yi-Fang PAI, Chien-Chang SU
  • Publication number: 20180019326
    Abstract: In a method of fabricating a field effect transistor, a fin structure made of a first semiconductor material is formed so that the fin structure protrudes from an isolation insulating layer disposed over a substrate. A gate structure is formed over a part of the fin structure, thereby defining a channel region, a source region and a drain region in the fin structure. After the gate structure is formed, laser annealing is performed on the fin structure.
    Type: Application
    Filed: July 14, 2016
    Publication date: January 18, 2018
    Inventors: Fang-Liang LU, CheeWee LIU, Chi-Wen LIU, Shih-Hsien HUANG, I-Hsieh WONG
  • Patent number: 9837493
    Abstract: A semiconductor device comprises a semiconductor substrate and a semiconductor fin. The semiconductor substrate has an upper surface and a recess extending downwards into the semiconductor substrate from the upper surface. The semiconductor fin is disposed in the recess and extends upwards beyond the upper surface, wherein the semiconductor fin is directly in contact with semiconductor substrate, so as to form at least one semiconductor hetero-interface on a sidewall of the recess.
    Type: Grant
    Filed: November 13, 2015
    Date of Patent: December 5, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chien-Hung Chen, Shih-Hsien Huang, Yu-Ru Yang, Huai-Tzu Chiang, Hao-Ming Lee, Sheng-Hao Lin, Cheng-Tzung Tsai, Chun-Yuan Wu
  • Patent number: 9786780
    Abstract: An integrated circuit includes a gate structure over a substrate. A silicon-containing material structure is in each of recesses that are adjacent to the gate structure. The silicon-containing material structure has a first region and a second region, the second region is closer to the gate structure than the first region, and the first region is thicker than the second region.
    Type: Grant
    Filed: June 24, 2014
    Date of Patent: October 10, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hsien Huang, Yi-Fang Pai, Chien-Chang Su
  • Publication number: 20170278968
    Abstract: A semiconductor device includes a fin extending along a first direction over a substrate, and a gate structure extending in a second direction overlying the fin. The gate structure includes a gate dielectric layer overlying the fin, a gate electrode overlying the gate dielectric layer, and insulating gate sidewalls on opposing lateral surfaces of the gate electrode extending along the second direction. A source/drain region is formed in the fin in a region adjacent the gate electrode structure, and a stressor layer is between the source/drain region and the semiconductor substrate. The stressor layer includes GeSn or SiGeSn containing 1019 atoms cm? or less of a dopant, and a portion of the fin under the gate structure is a channel region.
    Type: Application
    Filed: September 27, 2016
    Publication date: September 28, 2017
    Inventors: Huang-Siang LAN, CheeWee LIU, Chi-Wen LIU, Shih-Hsien HUANG, I-Hsieh WONG, Hung-Yu YEH, Chung-En TSAI
  • Patent number: 9741852
    Abstract: A manufacturing method of a semiconductor structure is provided. The manufacturing method of the semiconductor structure includes the following steps: providing a substrate; forming a gate structure on the substrate; forming a recess in the substrate at a lateral side of the gate structure; performing a pre-bake process at a temperature of 740-840° C. and under a pressure of equal to or higher than 150 torr; and forming an epitaxial buffer layer in the recess.
    Type: Grant
    Filed: August 5, 2015
    Date of Patent: August 22, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Hsien Huang, Tsang-Hsuan Wang, James Tsai
  • Publication number: 20170200721
    Abstract: A semiconductor device includes a substrate, a first well formed in the substrate, a second well formed in the substrate, a first fin formed on the first well, and a second fin formed on the second well. The first well includes a first conductivity type, the second well includes a second conductivity type, and the first conductivity type and the second conductivity type are complementary to each other. The substrate includes a first semiconductor material. The first fin and the second fin include the first semiconductor material and a second semiconductor material. A lattice constant of the second semiconductor material is larger than a lattice constant of the first semiconductor material. The first semiconductor material in the first fin includes a first concentration, the first semiconductor material in the second fin includes a second concentration, and the second concentration is larger than the first concentration.
    Type: Application
    Filed: February 17, 2016
    Publication date: July 13, 2017
    Inventors: Chien-Hung Chen, Shih-Hsien Huang, Yu-Ru Yang, Chia-Hsun Tseng, Cheng-Tzung Tsai, Chun-Yuan Wu
  • Publication number: 20170117414
    Abstract: A semiconductor structure including a semiconductor substrate and at least a fin structure formed thereon. The semiconductor substrate includes a first semiconductor material. The fin structure includes a first epitaxial layer and a second epitaxial layer formed between the first epitaxial layer and the semiconductor substrate. The first epitaxial layer includes the first semiconductor material and a second semiconductor material. A lattice constant of the second semiconductor material is different from a lattice constant of the first semiconductor material. The second epitaxial layer includes the first semiconductor material and the second semiconductor material. The second epitaxial layer further includes conductive dopants.
    Type: Application
    Filed: November 16, 2015
    Publication date: April 27, 2017
    Inventors: Shih-Hsien Huang, Chien-Hung Chen, Chun-Yuan Wu, Kun-Hsin Chen, Tien-I Wu, Yu-Ru Yang, Huai-Tzu Chiang
  • Publication number: 20170104070
    Abstract: A semiconductor device comprises a semiconductor substrate and a semiconductor fin. The semiconductor substrate has an upper surface and a recess extending downwards into the semiconductor substrate from the upper surface. The semiconductor fin is disposed in the recess and extends upwards beyond the upper surface, wherein the semiconductor fin is directly in contact with semiconductor substrate, so as to form at least one semiconductor hetero-interface on a sidewall of the recess.
    Type: Application
    Filed: November 13, 2015
    Publication date: April 13, 2017
    Inventors: Chien-Hung Chen, Shih-Hsien Huang, Yu-Ru Yang, Huai-Tzu Chiang, Hao-Ming Lee, Sheng-Hao Lin, Cheng-Tzung Tsai, Chun-Yuan Wu
  • Publication number: 20170098692
    Abstract: Provided is a FinFET including a substrate, at least one fin and at least one gate. A portion of the at least one fin is embedded in the substrate. The at least one fin includes, from bottom to top, a seed layer, a stress relaxation layer and a channel layer. The at least one gate is across the at least one fin. A method of forming a FinFET is further provided.
    Type: Application
    Filed: November 9, 2015
    Publication date: April 6, 2017
    Inventors: Huai-Tzu Chiang, Sheng-Hao Lin, Hao-Ming Lee, Yu-Ru Yang, Shih-Hsien Huang, Chien-Hung Chen, Chun-Yuan Wu, Cheng-Tzung Tsai
  • Patent number: 9590041
    Abstract: A semiconductor structure includes a semiconductor substrate, a dielectric structure formed on the semiconductor substrate and including at least a recess formed therein, a fin formed in the recess, and a dislocation region formed in the fin. The semiconductor substrate includes a first semiconductor material. The fin includes the first semiconductor material and a second semiconductor material. A lattice constant of the second semiconductor material is different from a lattice constant of the first semiconductor material. A topmost portion of the dislocation region is higher than an opening of the recess.
    Type: Grant
    Filed: December 6, 2015
    Date of Patent: March 7, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yu-Ru Yang, Huai-Tzu Chiang, Sheng-Hao Lin, Shih-Hsien Huang, Chien-Hung Chen, Chun-Yuan Wu, Cheng-Tzung Tsai
  • Patent number: 9586286
    Abstract: The invention provides an apparatus for fabricating a periodic micro-pattern by laser beams. The apparatus includes an ultrafast laser light source configured to generate an output laser beam. A diffraction optical element is configured to divide the output laser beam into a plurality of diffractive laser beams. A confocal system is configured to focus the plurality of diffractive laser beams on a focal point, so that the plurality of diffractive laser beams produces an interference light beam with interference phenomena. The interference light beam ablates a surface of an element to fabricate a periodic micro-pattern on the surface of the element. The confocal system includes a first lens, a second lens and a light shielding mask. The plurality of diffractive laser beams passes through the first lens, the light shielding mask and the second lens in sequence.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: March 7, 2017
    Assignee: Lextar Electronics Corporation
    Inventors: Shih-Hsien Huang, Shih-Hao Wang, Po-Yuan Huang
  • Publication number: 20170040454
    Abstract: A manufacturing method of a semiconductor structure is provided. The manufacturing method of the semiconductor structure includes the following steps: providing a substrate; forming a gate structure on the substrate; forming a recess in the substrate at a lateral side of the gate structure; performing a pre-bake process at a temperature of 740-840° C. and under a pressure of equal to or higher than 150 torr; and forming an epitaxial buffer layer in the recess.
    Type: Application
    Filed: August 5, 2015
    Publication date: February 9, 2017
    Inventors: Shih-Hsien Huang, Tsang-Hsuan Wang, James Tsai
  • Patent number: 9502621
    Abstract: The present invention includes a safety indication structure a high energy invisible light light emitting structure and two potential applying layers. The high energy invisible light light emitting structure includes a high energy invisible light light emitting layer that receives a forward to emit invisible light, and a P-type semiconductor layer and an N-type semiconductor layer respectively disposed at two sides of the high energy invisible light light emitting layer. The two potential applying layers are respectively in contact with the P-type semiconductor layer and the N-type semiconductor layer. The safety indication structure includes a photoluminescent light emitting layer disposed on the high energy invisible light light emitting structure. When the high energy invisible light light emitting structure emits invisible light, the photoluminescent light emitting layer absorbs and converts the invisible light to visible light, which serves as a signal warning for danger to ensure user safety.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: November 22, 2016
    Assignee: HIGH POWER OPTO, INC.
    Inventors: Fu-Bang Chen, Shih-Hsien Huang, Wei-Yu Yen, Yen-Chin Wang, Kuo-Hsin Huang