Abstract: A method of fabricating micro mechanical moving member and metal interconnects thereof. A first metal interconnect pattern and a second metal interconnect pattern disposed thereon are formed on a substrate by plating processes. Subsequently, an inter-metal dielectric layer is formed on the substrate, the first metal interconnect pattern and the second metal interconnect pattern. The inter-metal dielectric layer is then planarized and the second metal interconnect pattern is exposed. After that, at least one micro mechanical moving member electrically connected to the second metal interconnect pattern is formed on the inter-metal dielectric layer by plating techniques.

Abstract: The invention discloses an interposer used for connecting a plurality of chips. The interposer includes a connective substrate and at least a through via disposed in the connective substrate. The connective substrate has a first surface and a second surface. The through via acts as a connector, and is electrically connected to the first surface and the second surface. The first surface and the second surface are electrically connected to at least a first chip and a second chip respectively. In addition, the first chip and the second chip are electrically connected by the through via.

Abstract: A method of edge bevel rinse. First, a wafer having a coating material layer disposed thereon is provided. A light beam is optically projected on the wafer to form a reference pattern. The reference pattern defines a central region, and a bevel region surrounding the central region on the surface of the wafer. Subsequently, the coating material layer positioned in the bevel region is removed according to the reference pattern.

Abstract: A substrate including a plurality of contact pads is provided. Thereafter, a photosensitive dielectric layer is formed on a surface of the substrate. Subsequently, an exposure-and-development process is preformed to partially remove the photosensitive dielectric layer so as to form a plurality of openings. The openings at least expose the contact pads, and the sidewall of each opening is inclined outwardly.

Abstract: An rotor and stator structure of a motor is provided. The rotor structure includes a rotation axis and a magnet encircling the rotation axis. The magnet is magnetized radially or axially. The stator structure includes a sleeve, a first ring positioned on one opening of the sleeve, and a second ring positioned on the other opening of the sleeve. N pieces of first salients and N pieces of second salients are spacedly and coplanarly extended from the first ring and the second ring respectively, and the position of each piece of the first salients corresponds to that of each piece of the second salients.

Abstract: An rotor and stator structure of a motor is provided. The rotor structure includes a rotation axis and a magnet encircling the rotation axis. The magnet is magnetized radially or axially. The stator structure includes a sleeve, a first ring positioned on one opening of the sleeve, and a second ring positioned on the other opening of the sleeve. N pieces of first salients and N pieces of second salients are spacedly and coplanarly extended from the first ring and the second ring respectively, and the position of each piece of the first salients corresponds to that of each piece of the second salients.