Patents by Inventor Shih-Wen Liu

Shih-Wen Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955338
    Abstract: A method includes providing a substrate having a surface such that a first hard mask layer is formed over the surface and a second hard mask layer is formed over the first hard mask layer, forming a first pattern in the second hard mask layer, where the first pattern includes a first mandrel oriented lengthwise in a first direction and a second mandrel oriented lengthwise in a second direction different from the first direction, and where the first mandrel has a top surface, a first sidewall, and a second sidewall opposite to the first sidewall, and depositing a material towards the first mandrel and the second mandrel such that a layer of the material is formed on the top surface and the first sidewall but not the second sidewall of the first mandrel.
    Type: Grant
    Filed: January 30, 2023
    Date of Patent: April 9, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Ru-Gun Liu, Chin-Hsiang Lin, Yu-Tien Shen
  • Publication number: 20240087896
    Abstract: Methods of forming line-end extensions and devices having line-end extensions are provided. In some embodiments, a method includes forming a patterned photoresist on a first region of a hard mask layer. A line-end extension region is formed in the hard mask layer. The line-end extension region extends laterally outward from an end of the first region of the hard mask layer. The line-end extension region may be formed by changing a physical property of the hard mask layer at the line-end extension region.
    Type: Application
    Filed: November 21, 2023
    Publication date: March 14, 2024
    Inventors: Chih-Min HSIAO, Chien-Wen LAI, Ru-Gun LIU, Chih-Ming LAI, Shih-Ming CHANG, Yung-Sung YEN, Yu-Chen CHANG
  • Patent number: 11920157
    Abstract: Applications of butylidenephthalide (BP), comprising the use of BP in providing a kit for promoting differentiation of stem cells into brown adipose cells, and the use of BP in preparing a medicament, wherein the medicament is used for inhibiting the accumulation of white adipose cells, promoting the conversion of white adipose cells into brown adipose cells, inhibiting weight gain and/or reducing the content of triglycerides, glucose, and total cholesterol in blood.
    Type: Grant
    Filed: September 15, 2022
    Date of Patent: March 5, 2024
    Assignee: NATIONAL DONG HWA UNIVERSITY
    Inventors: Tzyy-Wen Chiou, Shinn-Zong Lin, Horng-Jyh Harn, Hong-Lin Su, Shih-Ping Liu, Kang-Yun Lu, Jeanne Hsieh
  • Patent number: 11244832
    Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and a metal gate structure formed over the substrate. The semiconductor structure further includes a sealing layer comprising an inner sidewall and an outermost sidewall. In addition, the inner sidewall is in direct contact with the metal gate structure and the outermost sidewall is away from the metal gate structure. The semiconductor structure further includes a mask structure formed over the metal gate structure. In addition, the mask structure has a straight sidewall over the metal gate structure and a sloped sidewall extending from the inner sidewall of the sealing layer and passing over the outmost sidewall of the sealing layer.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: February 8, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Ying Lin, Mei-Yun Wang, Hsien-Cheng Wang, Fu-Kai Yang, Shih-Wen Liu, Hsiao-Chiu Hsu
  • Publication number: 20200388498
    Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and a metal gate structure formed over the substrate. The semiconductor structure further includes a sealing layer comprising an inner sidewall and an outermost sidewall. In addition, the inner sidewall is in direct contact with the metal gate structure and the outermost sidewall is away from the metal gate structure. The semiconductor structure further includes a mask structure formed over the metal gate structure. In addition, the mask structure has a straight sidewall over the metal gate structure and a sloped sidewall extending from the inner sidewall of the sealing layer and passing over the outmost sidewall of the sealing layer.
    Type: Application
    Filed: July 27, 2020
    Publication date: December 10, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Ying LIN, Mei-Yun WANG, Hsien-Cheng WANG, Fu-Kai YANG, Shih-Wen LIU, Hsiao-Chiu HSU
  • Patent number: 10790197
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: September 29, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 10727068
    Abstract: Semiconductor structures and methods for forming the same are provided. The method includes forming a dummy gate structure and forming a spacer on a lower portion of a sidewall of the dummy gate structure and exposing an upper portion of the sidewall of the dummy gate structure. The method further includes forming a dielectric layer covering the upper portion of the sidewall of the dummy gate structure exposed by the spacer and removing the dummy gate structure to form a tube-shaped trench. The method further includes removing a portion of the dielectric layer to form a cone-shaped trench and forming a gate structure in a bottom portion of the tube-shaped trench. The method further includes forming a hard mask structure in the cone-shaped trench and an upper portion of the tube-shaped trench, and an interface between the hard mask structure and the dielectric layer overlaps the spacer.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: July 28, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Ying Lin, Mei-Yun Wang, Hsien-Cheng Wang, Fu-Kai Yang, Shih-Wen Liu, Hsiao-Chiu Hsu
  • Publication number: 20200118884
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: December 16, 2019
    Publication date: April 16, 2020
    Inventors: I-Wen WU, Hsien-Cheng WANG, Mei-Yun WANG, Shih-Wen LIU, Chao-Hsun WANG, Yun LEE
  • Publication number: 20200051821
    Abstract: Semiconductor structures and methods for forming the same are provided. The method includes forming a dummy gate structure and forming a spacer on a lower portion of a sidewall of the dummy gate structure and exposing an upper portion of the sidewall of the dummy gate structure. The method further includes forming a dielectric layer covering the upper portion of the sidewall of the dummy gate structure exposed by the spacer and removing the dummy gate structure to form a tube-shaped trench. The method further includes removing a portion of the dielectric layer to form a cone-shaped trench and forming a gate structure in a bottom portion of the tube-shaped trench. The method further includes forming a hard mask structure in the cone-shaped trench and an upper portion of the tube-shaped trench, and an interface between the hard mask structure and the dielectric layer overlaps the spacer.
    Type: Application
    Filed: October 8, 2019
    Publication date: February 13, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Ying LIN, Mei-Yun WANG, Hsien-Cheng WANG, Fu-Kai YANG, Shih-Wen LIU, Hsiao-Chiu HSU
  • Patent number: 10510614
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 10468257
    Abstract: Semiconductor device structures and methods for forming the same are provided. The method for forming a semiconductor device structure includes forming a dummy gate structure over a substrate and forming a dielectric layer over the substrate around the dummy gate structure. The method for forming a semiconductor device structure further includes removing the dummy gate structure and removing a portion of the dielectric layer to form a funnel shaped trench. The method for forming a semiconductor device structure further includes forming a gate structure in a bottom portion of the funnel shaped trench and filling a hard mask material in a top portion of the funnel shaped trench to form a funnel shaped hard mask structure.
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: November 5, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Ying Lin, Mei-Yun Wang, Hsien-Cheng Wang, Fu-Kai Yang, Shih-Wen Liu, Audrey Hsiao-Chiu Hsu
  • Publication number: 20190252265
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: April 29, 2019
    Publication date: August 15, 2019
    Inventors: I-Wen WU, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 10276448
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Patent number: 10276437
    Abstract: A method of forming a contact structure of a gate structure is provided. In the method, an oxidation layer and a first sidewall layer disposed between a first metal gate and a second metal gate are etched to expose an underlying silicon substrate. A silicide portion defined by a contact profile is deposited in the exposed portion of the silicon substrate. A second sidewall layer substantially covers the first sidewall layer and at least partially covering the silicide portion is formed after depositing the silicide portion. A metal glue layer is deposited around the first metal gate and the second metal gate defining a trench above the silicide portion. A metal plug is deposited within the trench.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Audrey Hsiao-Chiu Hsu, Fu-Kai Yang, Mei-Yun Wang, Hsien-Cheng Wang, Shih-Wen Liu, Hsin-Ying Lin
  • Publication number: 20190057906
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: October 22, 2018
    Publication date: February 21, 2019
    Inventors: I-Wen WU, Hsien-Cheng WANG, Mei-Yun WANG, Shih-Wen LIU, Chao-Hsun WANG, Yun LEE
  • Patent number: 10163703
    Abstract: A method for forming a self-aligned contact is provided. In an embodiment, a metal gate is formed on a substrate, and a gate spacer is formed adjacent the metal gate. A conductive plug is formed over the substrate, with the gate spacer disposed between the metal gate and the conductive plug. The metal gate and the conductive plug are recessed. A first dielectric layer is deposited over the gate spacer, over the metal gate, over the conductive plug, and along sidewalls of the metal gate. A first opening is formed in the first dielectric layer exposing the metal gate, and a second opening is formed in the first dielectric layer exposing the conductive plug. The first opening and the second opening are filled with a first conductive material.
    Type: Grant
    Filed: June 12, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Chao-Hsun Wang, Shih-Wen Liu, Fu-Kai Yang, Hsien-Cheng Wang, Mei-Yun Wang
  • Patent number: 10109530
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Publication number: 20180012807
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Application
    Filed: September 1, 2017
    Publication date: January 11, 2018
    Inventors: I-Wen WU, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee
  • Publication number: 20170278751
    Abstract: Self-aligned contacts are provided. In an embodiment the self-aligned contacts are formed by partially removing a first dielectric material from adjacent to a gate electrode and fully removing a second dielectric material from adjacent to the gate electrode. A conductive material is deposited into the regions of the removed first dielectric material and the second dielectric material, and the conductive material and metal gates are recessed below a spacer. A dielectric layer is deposited over the recessed conductive material and the recessed metal gates, and the self-aligned contacts are formed through the dielectric layer.
    Type: Application
    Filed: June 12, 2017
    Publication date: September 28, 2017
    Inventors: Chao-Hsun Wang, Shih-Wen Liu, Fu-Kai Yang, Hsien-Cheng Wang, Mei-Yun Wang
  • Patent number: 9754838
    Abstract: A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: September 5, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: I-Wen Wu, Hsien-Cheng Wang, Mei-Yun Wang, Shih-Wen Liu, Chao-Hsun Wang, Yun Lee