Patents by Inventor Shih-Yao Lin
Shih-Yao Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250151306Abstract: A semiconductor device and method for fabricating a semiconductor device includes etch selectivity tuning to enlarge epitaxy process windows. Through modification of etching processes and careful selection of materials, improvements in semiconductor device yield and performance can be delivered. Etch selectivity is controlled by using dilute gas, using assistive etch chemicals, controlling a magnitude of bias power used in the etching process, and controlling an amount of passivation gas used in the etching process, among other approaches. A recess is formed in a dummy fin in a region of the semiconductor where epitaxial growth occurs to further enlarge the epitaxy process window.Type: ApplicationFiled: January 10, 2025Publication date: May 8, 2025Applicant: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Shih-Yao Lin, Te-Yung Liu, Chih-Han Lin
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Patent number: 12290565Abstract: Provided herein are methods of treating or preventing a T-cell mediated inflammatory disease or cancer in a subject in need thereof comprising administering to the subject a therapeutically effective amount of an antibody that specifically binds to human PSGL-1 in combination with a Janus kinase (JAK) inhibitor. In some embodiments, the T-cell mediated inflammatory disease is GVHD, e.g., acute GVHD or chronic GVHD.Type: GrantFiled: November 16, 2022Date of Patent: May 6, 2025Assignee: AltruBio Inc.Inventors: Shih-Yao Lin, Feng-Lin Chiang, You-Chia Yeh
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Patent number: 12294023Abstract: A device includes a fin protruding from a semiconductor substrate; a gate stack over and along a sidewall of the fin; a gate spacer along a sidewall of the gate stack and along the sidewall of the fin; an epitaxial source/drain region in the fin and adjacent the gate spacer; and a corner spacer between the gate stack and the gate spacer, wherein the corner spacer extends along the sidewall of the fin, wherein a first region between the gate stack and the sidewall of the fin is free of the corner spacer, wherein a second region between the gate stack and the gate spacer is free of the corner spacer.Type: GrantFiled: August 9, 2022Date of Patent: May 6, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Ping Chen, Kuei-Yu Kao, Shih-Yao Lin, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
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Publication number: 20250142884Abstract: A semiconductor device includes a plurality of semiconductor layers vertically separated from one another. Each of the plurality of semiconductor layers extends along a first lateral direction. The semiconductor device includes a gate structure that extends along a second lateral direction and comprises at least a lower portion that wraps around each of the plurality of semiconductor layers. The lower portion of the gate structure comprises a plurality of first gate sections that are laterally aligned with the plurality of semiconductor layers, respectively, and wherein each of the plurality of first gate sections has ends that each extend along the second lateral direction and present a first curvature-based profile.Type: ApplicationFiled: December 30, 2024Publication date: May 1, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Yao Lin, Chih-Han Lin, Hsiao Wen Lee
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Patent number: 12288812Abstract: A cyclic process including an etching process, a passivation process, and a pumping out process is provided to prevent over etching of the sacrificial gate electrode, particularly when near a high-k dielectric feature. The cyclic process solves the problems of failed gate electrode layer at an end of channel region and enlarges filling windows for replacement gate structures, thus improving channel control. Compared to state-of-art solutions, embodiments of the present disclosure also enlarge volume of source/drain regions, thus improving device performance.Type: GrantFiled: June 2, 2022Date of Patent: April 29, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuei-Yu Kao, Shih-Yao Lin, Chen-Ping Chen, Chih-Chung Chiu, Ke-Chia Tseng, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
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Patent number: 12284139Abstract: A duplex Bluetooth transmission tire pressure system is provided. The duplex Bluetooth transmission tire pressure system includes a host, a plural of Bluetooth tire pressure detectors and a plural of vehicle transceivers; the host is electrically connected to the plural of vehicle transceivers; the plural of vehicle transceivers and the plural of Bluetooth tire pressure detectors are Bluetooth duplex packet transmitted. The plural of Bluetooth tire pressure detectors includes a locating program and a tire condition program. The host commands the vehicle transceiver to transmit a Bluetooth controlling packet to the plural of Bluetooth tire pressure detectors to operate or stop the locating program and limit the tire condition program.Type: GrantFiled: July 27, 2022Date of Patent: April 22, 2025Inventor: Shih-Yao Lin
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Publication number: 20250120151Abstract: A method of fabricating a semiconductor structure includes forming a recess in an active channel structure by removing a portion thereof, filling the recess with a dielectric material, forming a cladding layer adjacent the active channel structure but not adjacent the dielectric material, and forming a gate structure comprising a first gate structure and a second gate structure around the active channel structure. A width of the dielectric material in the recess is greater than a width of the first gate structure and a width of the second gate structure.Type: ApplicationFiled: December 16, 2024Publication date: April 10, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: KUEI-YU KAO, Shih-Yao LIN, Chen-Ping Chen, Chih-Han Lin, MING-CHING CHANG, CHAO-CHENG CHEN
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Publication number: 20250120167Abstract: A semiconductor device includes a plurality of semiconductor layers vertically separated from one another, a gate structure that comprises a lower portion and an upper portion, a gate spacer that extends along a sidewall of the upper portion of the gate structure and has a bottom surface, and an etch stop layer extends between the portion of the bottom surface of the gate spacer and the top surface of the topmost semiconductor layer.Type: ApplicationFiled: December 16, 2024Publication date: April 10, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuei-Yu Kao, Chao-Cheng Chen, Chih-Han Lin, Chen-Ping Chen, Ming-Ching Chang, Shih-Yao Lin, Chih-Chung Chiu
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Publication number: 20250113576Abstract: Embodiments of the present disclosure provide semiconductor device structures and methods of forming the same. The structure includes a source/drain region disposed over a substrate, a gate electrode layer disposed over the substrate, a first gate spacer disposed between the gate electrode layer and the source/drain region, and a dielectric spacer disposed between the gate electrode layer and the source/drain region. A first portion of the dielectric spacer is in contact with a first portion of the first gate spacer. The structure further includes a sacrificial layer disposed between a second portion of the first gate spacer and a second portion of the dielectric spacer.Type: ApplicationFiled: September 29, 2023Publication date: April 3, 2025Inventors: Kuei-Yu KAO, Shih-Yao LIN, Chih-Chung CHIU, Chen-Chin LIAO, Chun-Yu LIN, Min-Chiao LIN, Yung-Chi CHANG, Li-Jung KUO
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Patent number: 12266715Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming semiconductor fins on a substrate. A first dummy gate is formed over the semiconductor fins. A recess is formed in the first dummy gate, and the recess is disposed between the semiconductor fins. A dummy fin material is formed in the recess. A portion of the dummy fin material is removed to expose an upper surface of the first dummy gate and to form a dummy fin. A second dummy gate is formed on the exposed upper surface of the first dummy gate.Type: GrantFiled: August 10, 2023Date of Patent: April 1, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Yao Lin, Chen-Ping Chen, Kuei-Yu Kao, Hsiao Wen Lee, Chih-Han Lin
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Publication number: 20250107207Abstract: A semiconductor structure includes a semiconductor substrate; fin active regions protruded above the semiconductor substrate; and a gate stack disposed on the fin active regions; wherein the gate stack includes a high-k dielectric material layer, and various metal layers disposed on the high-k dielectric material layer. The gate stack has an uneven profile in a sectional view with a first dimension D1 at a top surface, a second dimension D2 at a bottom surface, and a third dimension D3 at a location between the top surface and the bottom surface, and wherein each of D1 and D2 is greater than D3.Type: ApplicationFiled: December 9, 2024Publication date: March 27, 2025Inventors: Chi-Sheng LAI, Wei-Chung SUN, Yu-Bey WU, Yuan-Ching PENG, Yu-Shan LU, Li-Ting CHEN, Shih-Yao LIN, Yu-Fan PENG, Kuei-Yu KAO, Chih-Han LIN, Jing Yi YAN, Pei-Yi LIU
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Patent number: 12261172Abstract: A method of fabricating a semiconductor device is described. A substrate is provided. A plurality of fins is formed extending from the substrate, the fins including a first group of active fins arranged in an active region, and including an inactive fin having at least a portion in an inactive region, the active fins separated by first trench regions between adjacent of the active regions, the inactive fin separated from its closest active fin by a second trench region, the second trench region having a greater width than that of a trench region of the first trench regions. A dummy fin is formed on the isolation dielectric in the second trench region, the dummy fin disposed between the first group of active fins and the inactive fin. A dummy gate is formed over the fins. The gate isolation structure is disposed between the dummy fin and the inactive fin and separates regions of the dummy gate.Type: GrantFiled: August 28, 2021Date of Patent: March 25, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ya-Yi Tsai, Shih-Yao Lin, Chi-Hsiang Chang, Wei-Han Chen, Shu-Yuan Ku
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Patent number: 12261213Abstract: A method includes simultaneously forming a first dummy gate stack and a second dummy gate stack on a first portion and a second portion of a protruding fin, simultaneously removing a first gate electrode of the first dummy gate stack and a second gate electrode of the second dummy gate stack to form a first trench and a second trench, respectively, forming an etching mask, wherein the etching mask fills the first trench and the second trench, patterning the etching mask to remove the etching mask from the first trench, removing a first dummy gate dielectric of the first dummy gate stack, with the etching mask protecting a second dummy gate dielectric of the second dummy gate stack from being removed, and forming a first replacement gate stack and a second replacement gate stack in the first trench and the second trench, respectively.Type: GrantFiled: July 25, 2022Date of Patent: March 25, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin
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Patent number: 12261170Abstract: A semiconductor device includes a plurality of first stack structures formed in a first area of a substrate, wherein the plurality of first stack structures are configured to form a plurality of first transistors that operate under a first voltage level. The semiconductor device includes a plurality of second stack structures formed in a second area of the substrate, wherein the plurality of second stack structures are configured to form a plurality of second transistors that operate under a second voltage level greater than the first voltage level. The semiconductor device includes a first isolation structure disposed between neighboring ones of the plurality of first stack structures and has a first height. The semiconductor device includes a second isolation structure disposed between neighboring ones of the plurality of second stack structures and has a second height. The first height is greater than the second height.Type: GrantFiled: June 29, 2023Date of Patent: March 25, 2025Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Shih-Yao Lin, Hsiao Wen Lee, Yu-Shan Cheng, Ming-Ching Chang
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Publication number: 20250092151Abstract: Provided herein are tetravalent antibodies that specifically bind to human PSGL-1. Unlike bivalent antibodies, these tetravalent antibodies contain a dimer of two monomers, with each monomer comprising two light chain variable (VL) domains and two heavy chain variable (VH) domains. This format allows for cross-linker/FcR-expressing cell-independent tetravalent antibodies against PSGL-1 that show enhanced efficacy as compared to bivalent PSGL-1 antibodies. These tetravalent antibodies can be used in a variety of diagnostic and therapeutic methods, including without limitation treating T-cell mediated inflammatory diseases, transplantations, and transfusions.Type: ApplicationFiled: November 26, 2024Publication date: March 20, 2025Inventors: Rong-Hwa LIN, Shih-Yao LIN, Yu-Ying TSAI
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Publication number: 20250089328Abstract: Semiconductor devices and methods for forming the semiconductor devices using a cap layer are provided. The semiconductor devices include a plurality of semiconductor layers vertically separated from one another, a gate structure that comprises a lower portion and an upper portion, wherein the lower portion wraps around each of the plurality of semiconductor layers, and a gate spacer that extends along a sidewall of the upper portion of the gate structure. In some examples, a gap dimension measured between the gate spacer and an adjacent one of the plurality of semiconductor layers is sufficiently small such that the gate structure does not contact the source/drain structures. In some examples, the gate spacer and an adjacent one of the one or more semiconductor layers of the fin structure are separated by a cap layer.Type: ApplicationFiled: September 8, 2023Publication date: March 13, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuei-Yu Kao, Shih-Yao Lin, Chiung-Yu Cho, Chih-Han Lin, Ming-Ching Chang
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Publication number: 20250081532Abstract: A semiconductor device includes an active gate structure extending along a first lateral direction. The semiconductor device includes an inactive gate structure also extending along the first lateral direction. The semiconductor device includes a first epitaxial structure disposed between the active gate structure and the inactive gate structure along a second lateral direction perpendicular to the first lateral direction. The active gate structure wraps around each of a plurality of channel layers that extend along the second direction, and the inactive gate structure straddles a semiconductor cladding layer that continuously extends along a first sidewall of the first epitaxial structure and across the plurality of channel layers.Type: ApplicationFiled: November 20, 2024Publication date: March 6, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Yao Lin, Hsiao Wen Lee, Ming-Ching Chang
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Publication number: 20250081587Abstract: A semiconductor device includes a channel structure, extending along a first lateral direction, that is disposed over a substrate. The semiconductor device includes a gate structure, extending along a second lateral direction perpendicular to the first lateral direction, that straddles the channel structure. The semiconductor device includes an epitaxial structure, coupled to the channel structure, that is disposed next to the gate structure. The semiconductor device includes a first gate spacer and a second gate spacer each comprising a first portion disposed between the gate structure and the epitaxial structure along the first lateral direction. The semiconductor device includes an air gap interposed between the first portion of the first gate spacer and the first portion of the second gate spacer. The air gap exposes a second portion of the first gate spacer that extends in the first lateral direction.Type: ApplicationFiled: November 14, 2024Publication date: March 6, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Yao Lin, Hsiao Wen Lee, Yu-Shan Cheng, Ming-Ching Chang
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Patent number: 12242788Abstract: A method includes providing a placing layout of the integrated circuit; generating a routed layout including a layout region with a systematic design rule check (DRC) violation; and performing a loop when the DRC the systematic DRC violation exists. The loop includes: generating an adjusted routing layout of the integrated circuit by adjusting the layout region with the systematic DRC violation according to a target placement recipe; extracting features of the placing layout to obtain extracted data; extracting features of the layout region with the systematic DRC violation to obtain extracted routing data; generating a plurality of aggregated-cluster models based upon the extracted data and the extracted routing data; selecting a target aggregated-cluster model from the plurality of aggregated-cluster models by comparing the extracted data to the plurality of aggregated-cluster models; and selecting the target placement recipe from a plurality of placement recipes to generate the adjusted routing layout.Type: GrantFiled: May 31, 2023Date of Patent: March 4, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shih-Yao Lin, Yi-Lin Chuang, Yin-An Chen, Shih Feng Hong
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Patent number: 12243748Abstract: A method of forming a semiconductor device includes: forming a fin protruding above a substrate; forming isolation regions on opposing sides of the fin; forming a dummy gate over the fin; reducing a thickness of a lower portion of the dummy gate proximate to the isolation regions, where after reducing the thickness, a distance between opposing sidewalls of the lower portion of the dummy gate decreases as the dummy gate extends toward the isolation regions; after reducing the thickness, forming a gate fill material along at least the opposing sidewalls of the lower portion of the dummy gate; forming gate spacers along sidewalls of the dummy gate and along sidewalls of the gate fill material; and replacing the dummy gate with a metal gate.Type: GrantFiled: July 20, 2022Date of Patent: March 4, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen