Patents by Inventor Shin-Hung Li

Shin-Hung Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240142301
    Abstract: The present disclosure provides a sensing circuit, including a photo-sensing component, a first transistor, and a temperature-sensing component. The photo-sensing component is configured to receive a light and transmit a first current according to an intensity of the light. A gate terminal of the first transistor is configured to receive a first control circuit. The photo-sensing component and the first transistor are coupled in series between first and second nodes. The temperature-sensing component is coupled between the first and second nodes and is configured to generate a second current according to a temperature. The temperature-sensing component includes a channel structure, a first gate, a second gate, and a light-shielding structure. The channel structure is configured to transmit the second current.
    Type: Application
    Filed: December 14, 2022
    Publication date: May 2, 2024
    Inventors: Ming-Yao CHEN, Chang-Hung LI, Shin-Shueh CHEN, Jui-Chi LO
  • Patent number: 11971298
    Abstract: The present disclosure provides a sensing circuit, including a photo-sensing component, a first transistor, and a temperature-sensing component. The photo-sensing component is configured to receive a light and transmit a first current according to an intensity of the light. A gate terminal of the first transistor is configured to receive a first control circuit. The photo-sensing component and the first transistor are coupled in series between first and second nodes. The temperature-sensing component is coupled between the first and second nodes and is configured to generate a second current according to a temperature. The temperature-sensing component includes a channel structure, a first gate, a second gate, and a light-shielding structure. The channel structure is configured to transmit the second current.
    Type: Grant
    Filed: December 14, 2022
    Date of Patent: April 30, 2024
    Assignee: AUO CORPORATION
    Inventors: Ming-Yao Chen, Chang-Hung Li, Shin-Shueh Chen, Jui-Chi Lo
  • Publication number: 20240055361
    Abstract: A method for forming alignment keys of a semiconductor structure includes: forming an oxide pad layer and a passivation layer on a substrate; forming a patterned photoresist layer on the passivation layer, and using the patterned photoresist layer as a mask to remove part of the oxide pad layer and passivation layer and expose the substrate surface in the medium voltage and alignment mark regions; forming oxide portions on the exposed substrate surface, and the oxide portions extending into the first depth of the substrate; forming deep doped wells in the low voltage and medium voltage regions; thinning the oxide portions; forming high-voltage doped wells in the high voltage and alignment mark regions; performing an etching process on the high voltage and alignment mark regions to form a second trench, as an alignment key, having a second depth greater than the first depth in the alignment mark region.
    Type: Application
    Filed: September 26, 2022
    Publication date: February 15, 2024
    Inventors: TSUNG-YU YANG, Shin-Hung Li, Shan-shi Huang, Ruei Jhe Tsao, Che-Hua Chang, YUAN YU CHUNG
  • Publication number: 20230335637
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Application
    Filed: April 27, 2023
    Publication date: October 19, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung LI, Chang-Po Hsiung
  • Publication number: 20230335638
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Application
    Filed: April 27, 2023
    Publication date: October 19, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung Li, Chang-Po Hsiung
  • Publication number: 20230253496
    Abstract: A semiconductor device and method of fabricating the same, the semiconductor device includes a substrate, a first transistor and a second transistor. The substrate includes a high-voltage region and a low-voltage region. The first transistor is disposed on the HV region, and includes a first gate dielectric layer disposed on a first base, and a first gate electrode on the first gate dielectric layer. The first gate dielectric layer includes a composite structure having a first dielectric layer and a second dielectric layer stacked sequentially. The second transistor is disposed on the LV region, and includes a fin shaped structure protruded from a second base on the substrate, and a second gate electrode disposed on the fin shaped structure. The first dielectric layer covers sidewalls of the second gate electrode and a top surface of the first dielectric layer is even with a top surface of the second gate electrode.
    Type: Application
    Filed: March 7, 2022
    Publication date: August 10, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Shin-Hung Li
  • Publication number: 20230231033
    Abstract: The invention provides a manufacturing method of a semiconductor structure, the method includes providing a substrate, forming two shallow trench isolation structures in the substrate. A first region, a second region and a third region are defined between the two shallow trench isolation structures, and the second region is located between the first region and the third region. Next, an oxide layer is formed in the first region, the second region and the third region, and the oxide layer directly contacts the two shallow trench isolation structures. The oxide layer in the second region is then removed, and another oxide layer is formed in the first region, the second region and the third region, so that a thick oxide layer is formed in the first and third regions, and a thin oxide layer is formed in the second region.
    Type: Application
    Filed: March 23, 2023
    Publication date: July 20, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Shin-Hung Li
  • Publication number: 20230215914
    Abstract: A semiconductor high-voltage device includes a semiconductor substrate; a high-voltage well in the semiconductor substrate; a drift region in the high-voltage well; a recessed channel region adjacent to the drift region; a heavily doped drain region in the drift region and spaced apart from the recessed channel; an isolation structure between the recessed channel region and the heavily doped drain region in the drift region; a buried gate dielectric layer on the recessed channel region, wherein the top surface of the buried gate dielectric layer is lower than the top surface of the heavily doped drain region; and a gate on the buried gate dielectric layer.
    Type: Application
    Filed: January 18, 2022
    Publication date: July 6, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Shin-Hung Li
  • Publication number: 20230197843
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure, a first drift region, a first source/drain region, and a gate oxide layer. The gate structure and the gate oxide layer are disposed on the semiconductor substrate. The first drift region is disposed in the semiconductor substrate. The first source/drain region is disposed in the first drift region. At least a part of a first portion of the gate oxide layer is disposed between the gate structure and the semiconductor substrate in a vertical direction. A second portion of the gate oxide layer is disposed between the first portion and the first source/drain region in a horizontal direction. The second portion includes a bottom extending downwards and a first concave top surface located above the bottom. A part of the first drift region is located under the first portion and the second portion of the gate oxide layer.
    Type: Application
    Filed: January 18, 2022
    Publication date: June 22, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Ruei-Jhe Tsao, Che-Hua Chang
  • Patent number: 11682726
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: June 20, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung Li, Chang-Po Hsiung
  • Publication number: 20230187547
    Abstract: A semiconductor device includes a semiconductor substrate, a trench, and a gate structure. The trench is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate. The gate structure includes a gate electrode, a first gate oxide layer, and a second gate oxide layer. A first portion of the gate electrode is disposed in the trench, and a second portion of the gate electrode is disposed outside the trench. The first gate oxide layer is disposed between the gate electrode and the semiconductor substrate. At least a portion of the first gate oxide layer is disposed in the trench. The second gate oxide layer is disposed between the second portion of the gate electrode and the semiconductor substrate in a vertical direction. A thickness of the second gate oxide layer is greater than a thickness of the first gate oxide layer.
    Type: Application
    Filed: January 6, 2022
    Publication date: June 15, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Che-Hua Chang, Shin-Hung Li, Tsung-Yu Yang, Ruei-Jhe Tsao
  • Patent number: 11640981
    Abstract: The invention provides a semiconductor structure, the semiconductor structure includes a substrate, two shallow trench isolation structures are located in the substrate, a first region, a second region and a third region are defined between the two shallow trench isolation structures, the second region is located between the first region and the third region. Two thick oxide layers are respectively located in the first region and the third region and directly contact the two shallow trench isolation structures respectively, and a thin oxide layer is located in the second region, the thickness of the thick oxide layer in the first region is greater than that of the thin oxide layer in the second region.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: May 2, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Shin-Hung Li
  • Patent number: 11515404
    Abstract: A semiconductor structure includes a substrate having a first region and a second region around the first region. A first fin structure is disposed within the first region. A second fin structure is disposed within the second region. A first isolation trench is disposed within the first region and situated adjacent to the first fin structure. A first trench isolation layer is disposed in the first isolation trench. A second isolation trench is disposed around the first region and situated between the first fin structure and the second fin structure. The bottom surface of the second isolation trench has a step height. A second isolation layer is disposed in the second isolation trench.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: November 29, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Ruei-Jhe Tsao, Ta-Wei Chiu
  • Publication number: 20220367653
    Abstract: The invention provides a semiconductor structure, the semiconductor structure includes a substrate, two shallow trench isolation structures are located in the substrate, a first region, a second region and a third region are defined between the two shallow trench isolation structures, the second region is located between the first region and the third region. Two thick oxide layers are respectively located in the first region and the third region and directly contact the two shallow trench isolation structures respectively, and a thin oxide layer is located in the second region, the thickness of the thick oxide layer in the first region is greater than that of the thin oxide layer in the second region.
    Type: Application
    Filed: June 15, 2021
    Publication date: November 17, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Shin-Hung Li
  • Patent number: 11495681
    Abstract: A semiconductor device includes a semiconductor substrate, a recess, a first gate oxide layer, and a gate structure. The semiconductor substrate includes a first region and a second region adjacent to the first region. The recess is disposed in the first region of the semiconductor substrate, and an edge of the recess is located at an interface between the first region and the second region. At least a part of the first gate oxide layer is disposed in the recess. The first gate oxide layer includes a hump portion disposed adjacent to the edge of the recess, and a height of the hump portion is less than a depth of the recess. The gate structure is disposed on the first region and the second region of the semiconductor substrate, and the gate structure overlaps the hump portion of the first gate oxide layer in a vertical direction.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: November 8, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chang-Po Hsiung, Ching-Chung Yang, Shan-Shi Huang, Shin-Hung Li, Nien-Chung Li, Wen-Fang Lee, Chiu-Te Lee, Chih-Kai Hsu, Chun-Ya Chiu, Chin-Hung Chen, Chia-Jung Hsu, Ssu-I Fu, Yu-Hsiang Lin
  • Patent number: 11404305
    Abstract: A manufacturing method a semiconductor device includes the following steps. A first mask pattern and a second mask pattern are formed on a first region and a second region of a substrate respectively. The second region is located adjacent to the first region. A top surface of the first mask pattern is lower than a top surface of the second mask pattern in a thickness direction of the substrate. A trench is formed in the substrate. The trench is partly located in the first region and partly located in the second region. A first etching process is performed for reducing a thickness of the second mask pattern and reducing a height difference between the top surface of the first mask pattern and the top surface of the second mask pattern in the thickness direction of the substrate. An isolation structure is formed in the trench after the first etching process.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: August 2, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ta-Wei Chiu, Shin-Hung Li, Tsung-Yu Yang, Ruei-Jhe Tsao
  • Publication number: 20220223720
    Abstract: A semiconductor structure includes a substrate having a first region and a second region around the first region. A first fin structure is disposed within the first region. A second fin structure is disposed within the second region. A first isolation trench is disposed within the first region and situated adjacent to the first fin structure. A first trench isolation layer is disposed in the first isolation trench. A second isolation trench is disposed around the first region and situated between the first fin structure and the second fin structure. The bottom surface of the second isolation trench has a step height. A second isolation layer is disposed in the second isolation trench.
    Type: Application
    Filed: January 28, 2021
    Publication date: July 14, 2022
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Ruei-Jhe Tsao, Ta-Wei Chiu
  • Publication number: 20220209009
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Application
    Filed: January 27, 2021
    Publication date: June 30, 2022
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung Li, Chang-Po Hsiung
  • Publication number: 20220085210
    Abstract: A semiconductor device includes a semiconductor substrate, a recess, a first gate oxide layer, and a gate structure. The semiconductor substrate includes a first region and a second region adjacent to the first region. The recess is disposed in the first region of the semiconductor substrate, and an edge of the recess is located at an interface between the first region and the second region. At least a part of the first gate oxide layer is disposed in the recess. The first gate oxide layer includes a hump portion disposed adjacent to the edge of the recess, and a height of the hump portion is less than a depth of the recess. The gate structure is disposed on the first region and the second region of the semiconductor substrate, and the gate structure overlaps the hump portion of the first gate oxide layer in a vertical direction.
    Type: Application
    Filed: October 12, 2020
    Publication date: March 17, 2022
    Inventors: Chang-Po Hsiung, Ching-Chung Yang, Shan-Shi Huang, Shin-Hung Li, Nien-Chung Li, Wen-Fang Lee, Chiu-Te Lee, Chih-Kai Hsu, Chun-Ya Chiu, Chin-Hung Chen, Chia-Jung Hsu, Ssu-I Fu, Yu-Hsiang Lin
  • Patent number: 11251180
    Abstract: A transistor and a method for forming the same are provided. The transistor includes a semiconductor substrate, a gate dielectric layer, a gate electrode, a spacer, and a source/drain. The semiconductor substrate includes a protrusive semiconductor portion protruded from a lower surface of the semiconductor substrate. The gate dielectric layer is on the semiconductor substrate. The gate electrode is on the gate dielectric layer. The spacer is on a sidewall of the gate electrode. An outer surface of the spacer has a concave portion. The source/drain is in the semiconductor substrate.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: February 15, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Shin-Hung Li