Patents by Inventor Shing Yu

Shing Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Immersion lithography system with wafer sealing mechanisms
    Publication number: 20050286033
    Abstract: An immersion lithography system is disclosed to comprise a fluid containing feature for providing an immersion fluid for performing immersion lithography on a wafer, and a seal ring covering a predetermined portion of a wafer edge for preventing the immersion fluid from leaking through the covered portion of the wafer edge while the fluid is used for the immersion lithography.
    Type: Application
    Filed: June 23, 2004
    Publication date: December 29, 2005
    Inventors: Burn Lin, Tsai-Sheng Gau, Chun-Kung Chen, Ru-Gun Liu, Shing Yu, Jen Shih