Abstract: There is provided a ceramic susceptor where a conduction failure due to defective connection of inner electrodes is unlikely to occur. The ceramic susceptor includes a ceramic susceptor main body including a first surface for a wafer to be placed thereon, and a second surface opposite the first surface; an inner electrode that is embedded in the ceramic susceptor main body; and a terminal having one end connected to the inner electrode and another end reaching the second surface of the ceramic susceptor main body. The inner electrode includes a horizontal portion provided in parallel with the first surface, and a non-horizontal portion extending from the horizontal portion toward the first surface or the second surface. The horizontal portion and the non-horizontal portion are integrally formed by bending one electrode such that a bent portion that forms a boundary between the horizontal portion and the non-horizontal portion is present.

Abstract: An external input device is employed, the external input device being configured to operate a robot system including an imaging apparatus capable of changing an imaging point of view and a robot apparatus, the external input device includes a display area, a robot apparatus operation unit configured to operate the robot apparatus, an imaging operation unit configured to operate the imaging apparatus, and an image display unit configured to display an image captured by the imaging apparatus, wherein the robot apparatus operation unit, the imaging operation unit, and the image display unit are displayed on the display area, and wherein the image display unit is disposed between the robot apparatus operation unit and the imaging operation unit.

Abstract: An external input device is employed, the external input device being configured to operate a robot system including an imaging apparatus capable of changing an imaging point of view and a robot apparatus, the external input device includes a display area, a robot apparatus operation unit configured to operate the robot apparatus, an imaging operation unit configured to operate the imaging apparatus, and an image display unit configured to display an image captured by the imaging apparatus, wherein the robot apparatus operation unit, the imaging operation unit, and the image display unit are displayed on the display area, and wherein the image display unit is disposed between the robot apparatus operation unit and the imaging operation unit.

Abstract: A member for a semiconductor manufacturing equipment includes a ceramic substrate including: a terminal dense portion, a plurality of heater electrodes which are zoned, and a plurality of jumper electrode layers; wherein each of the jumper electrode layers is composed of a plurality of planar jumper electrodes that are electrically isolated by an insulator, and wherein in at least one of the terminal dense portion, each of 70% or more of all the terminals arranged in the terminal dense portion is electrically connected to a predetermined planar jumper electrode through a first via extending in the vertical direction, on a condition that it is not electrically connected to a planar jumper electrode located in a layer above any other planar jumper electrode to which other terminals that have a longer distance from an outer periphery of the terminal dense portion than itself are electrically connected.

Abstract: There is provided a ceramic susceptor including a disk-shaped ceramic plate bonded body including an upper ceramic plate and a lower ceramic plate, an internal electrode embedded in the bonded body, and a purge gas groove, a vacuum suction groove, and a thermocouple insertion groove that are respectively provided on a bonding surface side of the upper ceramic plate or the lower ceramic plate. The ceramic plate bonded body has a central zone and an outer peripheral zone. The purge gas groove, the vacuum suction groove, and the thermocouple insertion groove respectively have straight-line portions in the central zone. An angle ?1 formed by a straight-line portion of the purge gas groove and a straight-line portion of the thermocouple insertion groove, and an angle ?2 formed by the straight-line portion of the purge gas groove and a straight-line portion of the vacuum suction groove satisfy 90°<?1<180°, 135°<?2<225°, and ?1<?2.

Abstract: A ceramic heater includes: a ceramic plate having a wafer placement surface on its upper surface; a plurality of zones in the wafer placement surface; a zone heater embedded in the ceramic plate for each of the plurality of zones; a single temperature detector passage in the ceramic plate; and a single temperature detector (multi TC) in the temperature detector passage. The temperature detector passage extends from the inlet in a lower surface of the ceramic plate through each of the plurality of zones. The multi TC has a plurality of temperature detecting portions. The temperature detecting portions are positioned at measurement positions corresponding to the plurality of zones.

Abstract: A method includes controlling a robot body performed by a controller. The robot body includes a finger, a driving unit, and a detection unit. The driving unit is configured to move the finger. The detection unit is configured to output a signal corresponding to a state of the finger moved by the driving unit. The method includes causing the finger to hold a workpiece, causing the robot body to start a predetermined operation while causing the finger to keep holding the workpiece, if a detected value based on the signal outputted from the detection unit is within a first range, and causing the robot body to continue to perform the predetermined operation until completion of the predetermined operation, if the detected value is within a second range in the predetermined operation. The second range is different from the first range.

Abstract: There is provided a ceramic susceptor where a conduction failure due to defective connection of inner electrodes is unlikely to occur. The ceramic susceptor includes a ceramic susceptor main body including a first surface for a wafer to be placed thereon, and a second surface opposite the first surface; an inner electrode that is embedded in the ceramic susceptor main body; and a terminal having one end connected to the inner electrode and another end reaching the second surface of the ceramic susceptor main body. The inner electrode includes a horizontal portion provided in parallel with the first surface, and a non-horizontal portion extending from the horizontal portion toward the first surface or the second surface. The horizontal portion and the non-horizontal portion are integrally formed by bending one electrode such that a bent portion that forms a boundary between the horizontal portion and the non-horizontal portion is present.

Abstract: A robot hand includes at least one finger. The finger includes a first member configured to come into contact with an object to apply a gripping force to the object, and a second member movable with respect to the first member to come into contact with the object.

Abstract: There is provided a robot hand that grips and positions a work with a certain gripping force, and that rapidly conveys the work to execute assembling after gripping the work.

Abstract: There is provided a robot hand that grips and positions a work with a certain gripping force, and that rapidly conveys the work to execute assembling after gripping the work.

Abstract: An external input device is employed, the external input device being configured to operate a robot system including an imaging apparatus capable of changing an imaging point of view and a robot apparatus, the external input device includes a display area, a robot apparatus operation unit configured to operate the robot apparatus, an imaging operation unit configured to operate the imaging apparatus, and an image display unit configured to display an image captured by the imaging apparatus, wherein the robot apparatus operation unit, the imaging operation unit, and the image display unit are displayed on the display area, and wherein the image display unit is disposed between the robot apparatus operation unit and the imaging operation unit.

Abstract: A method of controlling a holding apparatus configured to hold plural kinds of target objects by plural fingers in plural relative postures includes calculating, on a basis of information about holding force of the fingers in a relative posture for a target object, an amount of positional deviation of the target object held by the fingers, and correcting, on a basis of the amount of positional deviation calculated in the calculating, a position of the target object held by the fingers.

Abstract: A method includes controlling a robot body performed by a controller. The robot body includes a finger, a driving unit, and a detection unit. The driving unit is configured to move the finger. The detection unit is configured to output a signal corresponding to a state of the finger moved by the driving unit. The method includes causing the finger to hold a workpiece, causing the robot body to start a predetermined operation while causing the finger to keep holding the workpiece, if a detected value based on the signal outputted from the detection unit is within a first range, and causing the robot body to continue to perform the predetermined operation until completion of the predetermined operation, if the detected value is within a second range in the predetermined operation. The second range is different from the first range.

Abstract: A method for determining a microstructure of a titanium alloy includes determining a microstructure morphology of a titanium alloy based on a relational expression including a mechanical property parameter relating to a mechanical property of the titanium alloy, a microstructure parameter relating to a microstructure of the titanium alloy, and a composition parameter relating to a composition of the titanium alloy.

Abstract: A robot calibrating apparatus calibrating a command value for a robot body 2 whose position and orientation is controlled based on the command value, includes an operating unit configured to calculate a calibrating function of calibrating the command value, based on the difference between an ideal position and orientation of the robot body 2 and an actual position and orientation of the robot body 2. The ideal position and orientation is operated based on a command value RHTcom for calibration used during calibration or on a control result value which is a result of control according to the command value. The actual position and orientation is operated based on a measurement value RHT?meas for calibration acquired by a camera 3 arranged at a prescribed relative position and orientation with respect to the robot body 2 during the robot body 2 being controlled according to the command value for calibration.

Abstract: There is provided a robot hand that grips and positions a work with a certain gripping force, and that rapidly conveys the work to execute assembling after gripping the work.

Abstract: A method of controlling a holding apparatus configured to hold plural kinds of target objects by plural fingers in plural relative postures includes calculating, on a basis of information about holding force of the fingers in a relative posture for a target object, an amount of positional deviation of the target object held by the fingers, and correcting, on a basis of the amount of positional deviation calculated in the calculating, a position of the target object held by the fingers.

Abstract: A wafer placement apparatus 30 includes a ceramic substrate 32 having a wafer placement surface, a heater electrode 34 embedded in the ceramic substrate 32, and feeder rods 36 and 37 made of Cu and electrically connected to the heater electrode 34 through a surface of the ceramic substrate 32 opposite the wafer placement surface. When one end and the other end of the feeder rod 36 in an unengaged state are a fixed end and a free end, respectively, and when a relationship between a stress applied to the feeder rod 36 at a position 50 mm apart from the fixed end toward the free end and a strain at the position is obtained, the stress is in a range of 5 to 10 N when the strain is 1 mm.

Abstract: A robot calibrating apparatus calibrating a command value for a robot body 2 whose position and orientation is controlled based on the command value, includes an operating unit configured to calculate a calibrating function of calibrating the command value, based on the difference between an ideal position and orientation of the robot body 2 and an actual position and orientation of the robot body 2. The ideal position and orientation is operated based on a command value RHTcom for calibration used during calibration or on a control result value which is a result of control according to the command value. The actual position and orientation is operated based on a measurement value RHT?meas for calibration acquired by a camera 3 arranged at a prescribed relative position and orientation with respect to the robot body 2 during the robot body 2 being controlled according to the command value for calibration.