Patents by Inventor Shinji Furukawa
Shinji Furukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110139606Abstract: The magnetic anisotropy of a magnetic layer in a spin valve tunnel magnetoresistive element or giant magnetoresistive element is enhanced. Deposition of the magnetic layer is performed by making sputtering particles obliquely incident on a substrate from a certain incident direction at a certain incident angle.Type: ApplicationFiled: December 20, 2010Publication date: June 16, 2011Applicant: CANON ANELVA CORPORATIONInventors: Koji TSUNEKAWA, Hiroyuki Hosoya, Yoshinori Nagamine, Shinji Furukawa, Naoki Watanabe
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Patent number: 7935187Abstract: The invention provides a multi-film forming apparatus including a substrate holder stock chamber for storing a plurality of substrate holders separately from a path in the multi-film forming apparatus, so that production can be performed without being affected by the process of removing a film accumulated on the surface of the substrate holder and the process of replacing the substrate holder, or by the process of removing a film accumulated on the surface of the substrate holder or the process of replacing the substrate holder, and hence high-throughput production is possible. A branch path is provided on the path of the multi-film forming apparatus, and a substrate holder stock chamber for storing a plurality of substrate holders which enables retrieval of the substrate holder from the path and feeding of the substrate holder to the path is provided.Type: GrantFiled: February 14, 2008Date of Patent: May 3, 2011Assignee: Anelva CorporationInventors: Shinji Furukawa, Masahiro Shibamoto
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Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
Patent number: 7824497Abstract: An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.Type: GrantFiled: February 25, 2008Date of Patent: November 2, 2010Assignee: Canon Anelva CorporationInventors: Naoki Watanabe, Nobuyoshi Watanabe, Kazunori Tani, Shinji Furukawa, Hiromi Sasaki, Osamu Watabe -
Publication number: 20100253808Abstract: An image processing apparatus includes an image file creation unit, a storage control unit, an extracting unit, and a display controller. The image file creation unit is configured to create a file including a plurality of images, first management information indicating a specified Exif version, and second management information including an image size and a total number of the images in the file. The storage control unit is configured to store the image file in a storage. The extraction unit is configured to extract the image from the image file in the storage based on the second management information. The display controller is configured to display the image on a display.Type: ApplicationFiled: June 21, 2010Publication date: October 7, 2010Applicant: Sony CorporationInventor: Shinji FURUKAWA
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Patent number: 7750953Abstract: When there is created one composite image comprising an arrangement of a plurality of associated captured small images, an intended small image needs to be extracted from the composite image. When a plurality of small images are arranged to create one composite image, pixel data on the first row of a first small image is stored at a first address of DRAM. Pixel data on the second row and later are sequentially stored at specified addresses of DRAM. Likewise, second through ninth small images are stored at specified addresses of DRAM. In this manner, one composite image is created. When the first small image is selected to be extracted, pixel data on the first row of the first small image is read from the first address of DRAM. Pixel data on the second row is read from the second address. Pixel data on the third row and later are sequentially read by incrementing addresses. The present invention can be applied to a digital still camera.Type: GrantFiled: December 23, 2003Date of Patent: July 6, 2010Assignee: Sony CorporationInventor: Shinji Furukawa
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Patent number: 7731825Abstract: A manufacturing method of a magnetoresistance element having a pinned magnetic layer, a non-magnetic intermediate layer, and a free magnetic layer, the method includes forming at least one thin film of the non-magnetic intermediate layer and the free magnetic layer at a pressure of 8.0×10?3 Pa or less in the vicinity of a substrate using a sputtering apparatus. The apparatus includes a vacuum chamber in which a cathode and a substrate holder are arranged, a first exhausting apparatus connected to an exhausting port of the vacuum chamber, a gas introduction mechanism to introduce a gas toward the target, a first pressure regulator to cause a pressure difference between a target space and a center space outside the target space, a second pressure regulator to cause a pressure difference between the center space and a substrate space, and a second exhausting apparatus to exhaust the center space.Type: GrantFiled: August 24, 2005Date of Patent: June 8, 2010Assignee: Canon Anelva CorporationInventors: Toru Kitada, Naoki Watanabe, Shinji Takagi, Shinji Furukawa
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Patent number: 7625450Abstract: The invention provides a multi-film forming apparatus including a substrate holder stock chamber for storing a plurality of substrate holders separately from a path in the multi-film forming apparatus, so that production can be performed without being affected by the process of removing a film accumulated on the surface of the substrate holder and the process of replacing the substrate holder, or by the process of removing a film accumulated on the surface of the substrate holder or the process of replacing the substrate holder, and hence high-throughput production is possible. A branch path is provided on the path of the multi-film forming apparatus, and a substrate holder stock chamber for storing a plurality of substrate holders which enables retrieval of the substrate holder from the path and feeding of the substrate holder to the path is provided.Type: GrantFiled: October 4, 2004Date of Patent: December 1, 2009Assignee: Canon Anelva CorporationInventors: Shinji Furukawa, Masahiro Shibamoto
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Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
Publication number: 20090151634Abstract: An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.Type: ApplicationFiled: January 5, 2009Publication date: June 18, 2009Applicants: CANON ANELVA CORPORATION, NIHON MICRO COATING CO., LTD.Inventors: Naoki WATANABE, Nobuyoshi WATANABE, Kazunori TANI, Shinji FURUKAWA, Hiromi SASAKI, Osamu WATABE -
Publication number: 20090139855Abstract: A manufacturing method of a magnetoresistance element having a pinned magnetic layer, a non-magnetic intermediate layer, and a free magnetic layer, the method includes forming at least one thin film of the non-magnetic intermediate layer and the free magnetic layer at a pressure of 8.0×10?3 Pa or less in the vicinity of a substrate using a sputtering apparatus. The apparatus includes a vacuum chamber in which a cathode and a substrate holder are arranged, a first exhausting apparatus connected to an exhausting port of the vacuum chamber, a gas introduction mechanism to introduce a gas toward the target, a first pressure regulator to cause a pressure difference between a target space and a center space outside the target space, a second pressure regulator to cause a pressure difference between the center space and a substrate space, and a second exhausting apparatus to exhaust the center space.Type: ApplicationFiled: November 19, 2008Publication date: June 4, 2009Applicant: CANON ANELVA CORPORATIONInventors: Toru Kitada, Naoki Watanabe, Shinji Takagi, Shinji Furukawa
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Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
Publication number: 20090011140Abstract: An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.Type: ApplicationFiled: September 2, 2008Publication date: January 8, 2009Applicant: Canon Anelva CorporationInventors: Naoki Watanabe, Nobuyoshi Watanabe, Kazunori Tani, Shinji Furukawa, Hiromi Sasaki, Osamu Watabe -
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
Publication number: 20080216744Abstract: An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.Type: ApplicationFiled: February 25, 2008Publication date: September 11, 2008Applicant: CANON ANELVA CORPORATIONInventors: Naoki WATANABE, Nobuyoshi WATANABE, Kazunori TANI, Shinji FURUKAWA, Hiromi SASAKI, Osamu WATABE -
Publication number: 20080178796Abstract: The invention provides a multi-film forming apparatus including a substrate holder stock chamber for storing a plurality of substrate holders separately from a path in the multi-film forming apparatus, so that production can be performed without being affected by the process of removing a film accumulated on the surface of the substrate holder and the process of replacing the substrate holder, or by the process of removing a film accumulated on the surface of the substrate holder or the process of replacing the substrate holder, and hence high-throughput production is possible. A branch path is provided on the path of the multi-film forming apparatus, and a substrate holder stock chamber for storing a plurality of substrate holders which enables retrieval of the substrate holder from the path and feeding of the substrate holder to the path is provided.Type: ApplicationFiled: February 14, 2008Publication date: July 31, 2008Applicant: ANELVA CorporationInventors: Shinji Furukawa, Masahiro Shibamoto
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Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
Publication number: 20080178804Abstract: An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.Type: ApplicationFiled: February 25, 2008Publication date: July 31, 2008Applicant: CANON ANELVA CORPORATIONInventors: Naoki WATANABE, Nobuyoshi WATANABE, Kazunori TANI, Shinji FURUKAWA, Hiromi SASAKI, Osamu WATABE -
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
Publication number: 20070234958Abstract: This invention presents a method and an apparatus for manufacturing a magnetic recording disk, where steps from magnetic-film deposition to lubricant-layer preparation are carried out without vacuum breaking. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where a substrate is cleaned prior to the lubricant-layer preparation. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where burnishing is carried out in vacuum after the magnetic-film deposition. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where post-preparation treatment to coordinate adhesive strength and surface lubricity of the lubricant layer is carried out in vacuum.Type: ApplicationFiled: April 13, 2007Publication date: October 11, 2007Applicants: CANON ANELVA CORPORATION, NIHON MICRO COATING CO. INC.Inventors: Naoki WATANABE, Nobuyoshi WATANABE, Kazunori TANI, Shinji FURUKAWA, Hiromi SASAKI, Osamu WATABE -
Publication number: 20060060466Abstract: A manufacturing method of a magnetoresistance element having a pinned magnetic layer, a non-magnetic intermediate layer, and a free magnetic layer, the method includes forming at least one thin film of the non-magnetic intermediate layer and the free magnetic layer at a pressure of 8.0×10?3 Pa or less in the vicinity of a substrate using a sputtering apparatus. The apparatus includes a vacuum chamber in which a cathode and a substrate holder are arranged, a first exhausting apparatus connected to an exhausting port of the vacuum chamber, a gas introduction mechanism to introduce a gas toward the target, a first pressure regulator to cause a pressure difference between a target space and a center space outside the target space, a second pressure regulator to cause a pressure difference between the center space and a substrate space, and a second exhausting apparatus to exhaust the center space.Type: ApplicationFiled: August 24, 2005Publication date: March 23, 2006Applicant: Anelva CorporationInventors: Toru Kitada, Naoki Watanabe, Shinji Takagi, Shinji Furukawa
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Publication number: 20050115830Abstract: The invention provides a multi-film forming apparatus including a substrate holder stock chamber for storing a plurality of substrate holders separately from a path in the multi-film forming apparatus, so that production can be performed without being affected by the process of removing a film accumulated on the surface of the substrate holder and the process of replacing the substrate holder, or by the process of removing a film accumulated on the surface of the substrate holder or the process of replacing the substrate holder, and hence high-throughput production is possible. A branch path is provided on the path of the multi-film forming apparatus, and a substrate holder stock chamber for storing a plurality of substrate holders which enables retrieval of the substrate holder from the path and feeding of the substrate holder to the path is provided.Type: ApplicationFiled: October 4, 2004Publication date: June 2, 2005Applicant: ANELVA CorporationInventors: Shinji Furukawa, Masahiro Shibamoto
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Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
Publication number: 20050103271Abstract: An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.Type: ApplicationFiled: December 9, 2004Publication date: May 19, 2005Inventors: Naoki Watanabe, Nobuyoshi Watanabe, Kazunori Tani, Shinji Furukawa, Hiromi Sasaki, Osamu Watabe -
Patent number: 6872285Abstract: This application discloses a system for depositing a magnetic film for a magnetic recording layer or depositing an underlying film prior to depositing a magnetic film as a recording layer. The system comprises; a chamber in which the film is deposited onto a substrate by sputtering, a target that is provided in the chamber and made of material of the film to be deposited, a sputter power source for applying voltage to the target for the sputtering, and a direction control member for controlling sputter-particles released from the target during the sputtering. The direction control member is provided between the substrate and the target. The direction control member provides a passage for the sputter-particles. The direction control member lets the sputter-particles selectively pass through, thereby allowing magnetic anisotropy to the magnetic film. The passage is not close but open in its cross section.Type: GrantFiled: August 30, 2002Date of Patent: March 29, 2005Assignee: Anelva CorporationInventors: Shinji Furukawa, Miho Sakai
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Publication number: 20040141211Abstract: When there is created one composite image comprising an arrangement of a plurality of associated captured small images, an intended small image needs to be extracted from the composite image. When a plurality of small images are arranged to create one composite image, pixel data on the first row of a number-1 small image is stored at address adr 11 of DRAM. Pixel data on the second row and later are sequentially stored at specified addresses of DRAM. Likewise, number-2 through number-9 small images are stored at specified addresses of DRAM. In this manner, one composite image is created. When the number-1 small image is selected to be extracted, pixel data on the first row of the number-1 small image is read from address adr 11 of DRAM. Pixel data on the second row is read from address adr 21. Pixel data on the third row and later are sequentially read by incrementing addresses. The present invention can be applied to a digital still camera.Type: ApplicationFiled: December 23, 2003Publication date: July 22, 2004Applicant: Sony CorporationInventor: Shinji Furukawa
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Patent number: 6740209Abstract: This application discloses a multi-layer film deposition apparatus comprising; plural cathodes comprising targets respectively, a main rotation mechanism for rotating each cathode together, and a substrate holder to hold a substrate onto which a multi-layer film is deposited by sputtering. The targets are arranged at positions where their center axes are on a circumference. The main rotation mechanism rotates the cathodes around the axis in common to the circumference. The substrate is located at a position within an area in view to the direction of the axis. The area is formed of two loci of points on the rotated targets. One of the locus is drawn by the point nearest to the axis, and the other locus is drawn by the point furthest from the axis.Type: GrantFiled: July 26, 2002Date of Patent: May 25, 2004Assignee: Anelva CorporationInventors: Masahiro Shibamoto, Shinji Furukawa, Tetsuya Endoh, Miho Sakai, Naoki Watanabe