Abstract: A plasma processing apparatus which is effective for surface processing uses a reactive gas activated by plasma excited by microwave energy. Generation and maintaining of the plasma excited by the microwave energy are different where pressure in the gas chamber is above 0.1 Torr. Generating a high density plasma and maintaining the plasma includes the use of a protrudent window which extends into the activating chamber which also operates as a cavity resonator. Oxidation of resist formed on the surface of VLSI may be provided and damage by charge particles prevented by use of a magnetic field.

Abstract: Herein disclosed is a detent mechanism for a detent mechanism for use in a sliding electric part, in which an operation lever exposed to the outside from a casing is slid for operations, such as a slide switch or a volume control for audios. In the detent mechanism, a slide guide formed in a casing is formed with a series of cam crests. There is fixed to an operation lever an engaging member which engages with those cam crests. At least one of the slide guide and the engaging member is given such an elasticity as to tighten the engagement.

Abstract: Disclosed is a detent mechanism for use in a control with a sliding lever, in which the lever is slid to desired operation positions, such as for example, a slide switch or a volume control of a radio. In the detent mechanism, a slide guide is formed with a series of cam crests. Fixed to the sliding lever is a spring member which carries a roller at its leading end which engages with and rolls on the cam crests.

Abstract: A crankcase blow-by gas breather device and arrangement where the ends of the crankcase are provided with spaces beyond the end supporting walls for the crankshaft, which spaces conduct the blow-by gas directly to a breather chamber for separating at least some of the entrained oil. The breather chamber is connected to the overhead valve chambers which, in turn, are connected to the intake system for recycling the blow-by gases to the engine. In a V-type engine the breather chamber is integrally formed in the bottom wall of the "V".